JPS63140630U - - Google Patents

Info

Publication number
JPS63140630U
JPS63140630U JP3257887U JP3257887U JPS63140630U JP S63140630 U JPS63140630 U JP S63140630U JP 3257887 U JP3257887 U JP 3257887U JP 3257887 U JP3257887 U JP 3257887U JP S63140630 U JPS63140630 U JP S63140630U
Authority
JP
Japan
Prior art keywords
gas sensor
organic solvent
solvent vapor
atmosphere
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3257887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0713212Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987032578U priority Critical patent/JPH0713212Y2/ja
Publication of JPS63140630U publication Critical patent/JPS63140630U/ja
Application granted granted Critical
Publication of JPH0713212Y2 publication Critical patent/JPH0713212Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1987032578U 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置 Expired - Lifetime JPH0713212Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987032578U JPH0713212Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987032578U JPH0713212Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Publications (2)

Publication Number Publication Date
JPS63140630U true JPS63140630U (enrdf_load_stackoverflow) 1988-09-16
JPH0713212Y2 JPH0713212Y2 (ja) 1995-03-29

Family

ID=30839390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987032578U Expired - Lifetime JPH0713212Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Country Status (1)

Country Link
JP (1) JPH0713212Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752978A (en) * 1980-09-16 1982-03-29 Tamura Electric Works Ltd Card for recording information
JPS59230138A (ja) * 1983-06-11 1984-12-24 Horiba Ltd 有害ガス警報器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752978A (en) * 1980-09-16 1982-03-29 Tamura Electric Works Ltd Card for recording information
JPS59230138A (ja) * 1983-06-11 1984-12-24 Horiba Ltd 有害ガス警報器

Also Published As

Publication number Publication date
JPH0713212Y2 (ja) 1995-03-29

Similar Documents

Publication Publication Date Title
IT1077508B (it) Sensore di ossigeno per l'impiego in una corrente di gas di scarico automobilistico
JPS63140630U (enrdf_load_stackoverflow)
JPS52119989A (en) Air-fuel ratio sensor
JPH0178943U (enrdf_load_stackoverflow)
JPS63140629U (enrdf_load_stackoverflow)
JPH032254U (enrdf_load_stackoverflow)
JPS63130897U (enrdf_load_stackoverflow)
JPS63168708U (enrdf_load_stackoverflow)
JPH0268435U (enrdf_load_stackoverflow)
JPH01117557U (enrdf_load_stackoverflow)
JPS6410643U (enrdf_load_stackoverflow)
JPS6366726U (enrdf_load_stackoverflow)
JPS63159484U (enrdf_load_stackoverflow)
JPS61138929U (enrdf_load_stackoverflow)
JPS6329718U (enrdf_load_stackoverflow)
JPS6366725U (enrdf_load_stackoverflow)
JPH0370386U (enrdf_load_stackoverflow)
JPS58172865U (ja) 分析計の校正装置
JPS6218659U (enrdf_load_stackoverflow)
JPH0343755U (enrdf_load_stackoverflow)
JPS6434557U (enrdf_load_stackoverflow)
JPS6214323U (enrdf_load_stackoverflow)
JPS59160393U (ja) ２段階ガス警報装置
JPH0160531U (enrdf_load_stackoverflow)
JPS61196555U (enrdf_load_stackoverflow)