JPS63140629U - - Google Patents

Info

Publication number
JPS63140629U
JPS63140629U JP3257787U JP3257787U JPS63140629U JP S63140629 U JPS63140629 U JP S63140629U JP 3257787 U JP3257787 U JP 3257787U JP 3257787 U JP3257787 U JP 3257787U JP S63140629 U JPS63140629 U JP S63140629U
Authority
JP
Japan
Prior art keywords
signal
sensor output
comparing
detection
waveform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3257787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648833Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3257787U priority Critical patent/JPH0648833Y2/ja
Publication of JPS63140629U publication Critical patent/JPS63140629U/ja
Application granted granted Critical
Publication of JPH0648833Y2 publication Critical patent/JPH0648833Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3257787U 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置 Expired - Lifetime JPH0648833Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3257787U JPH0648833Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3257787U JPH0648833Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Publications (2)

Publication Number Publication Date
JPS63140629U true JPS63140629U (enrdf_load_stackoverflow) 1988-09-16
JPH0648833Y2 JPH0648833Y2 (ja) 1994-12-12

Family

ID=30839388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3257787U Expired - Lifetime JPH0648833Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Country Status (1)

Country Link
JP (1) JPH0648833Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0648833Y2 (ja) 1994-12-12

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