JPH0226050Y2 - - Google Patents

Info

Publication number
JPH0226050Y2
JPH0226050Y2 JP14660083U JP14660083U JPH0226050Y2 JP H0226050 Y2 JPH0226050 Y2 JP H0226050Y2 JP 14660083 U JP14660083 U JP 14660083U JP 14660083 U JP14660083 U JP 14660083U JP H0226050 Y2 JPH0226050 Y2 JP H0226050Y2
Authority
JP
Japan
Prior art keywords
axis
sample stage
arm
operating tool
axis rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14660083U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6053042U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14660083U priority Critical patent/JPS6053042U/ja
Publication of JPS6053042U publication Critical patent/JPS6053042U/ja
Application granted granted Critical
Publication of JPH0226050Y2 publication Critical patent/JPH0226050Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP14660083U 1983-09-20 1983-09-20 表面分析装置用試料ステ−ジ Granted JPS6053042U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14660083U JPS6053042U (ja) 1983-09-20 1983-09-20 表面分析装置用試料ステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14660083U JPS6053042U (ja) 1983-09-20 1983-09-20 表面分析装置用試料ステ−ジ

Publications (2)

Publication Number Publication Date
JPS6053042U JPS6053042U (ja) 1985-04-13
JPH0226050Y2 true JPH0226050Y2 (en, 2012) 1990-07-17

Family

ID=30326269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14660083U Granted JPS6053042U (ja) 1983-09-20 1983-09-20 表面分析装置用試料ステ−ジ

Country Status (1)

Country Link
JP (1) JPS6053042U (en, 2012)

Also Published As

Publication number Publication date
JPS6053042U (ja) 1985-04-13

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