JPH0225429B2 - - Google Patents
Info
- Publication number
- JPH0225429B2 JPH0225429B2 JP8616984A JP8616984A JPH0225429B2 JP H0225429 B2 JPH0225429 B2 JP H0225429B2 JP 8616984 A JP8616984 A JP 8616984A JP 8616984 A JP8616984 A JP 8616984A JP H0225429 B2 JPH0225429 B2 JP H0225429B2
- Authority
- JP
- Japan
- Prior art keywords
- roll
- sealing device
- casing
- vacuum
- steel strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007789 sealing Methods 0.000 claims description 19
- 229910000831 Steel Inorganic materials 0.000 description 16
- 239000010959 steel Substances 0.000 description 16
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 7
- 238000007747 plating Methods 0.000 description 7
- 229910052725 zinc Inorganic materials 0.000 description 7
- 239000011701 zinc Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000000573 anti-seizure effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59086169A JPS60234964A (ja) | 1984-05-01 | 1984-05-01 | 真空シ−ル装置 |
| EP85102965A EP0155643B1 (en) | 1984-03-19 | 1985-03-14 | Vacuum evaporation equipment |
| DE198585102965T DE155643T1 (de) | 1984-03-19 | 1985-03-14 | Vorrichtung zur bedampfung. |
| DE8585102965T DE3578437D1 (de) | 1984-03-19 | 1985-03-14 | Vorrichtung zur bedampfung. |
| AU40012/85A AU553239B2 (en) | 1984-03-19 | 1985-03-15 | Preventing reevaporation and sealing strip in continuous metal vacuum evaporation |
| KR1019850001760A KR890004043B1 (ko) | 1984-03-19 | 1985-03-19 | 진공증착장치 |
| US06/713,743 US4649860A (en) | 1984-03-19 | 1985-03-19 | Vacuum evaporation coating equipment |
| CA000476897A CA1233016A (en) | 1984-03-19 | 1985-03-19 | Vacuum evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59086169A JPS60234964A (ja) | 1984-05-01 | 1984-05-01 | 真空シ−ル装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60234964A JPS60234964A (ja) | 1985-11-21 |
| JPH0225429B2 true JPH0225429B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-06-04 |
Family
ID=13879250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59086169A Granted JPS60234964A (ja) | 1984-03-19 | 1984-05-01 | 真空シ−ル装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60234964A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1984
- 1984-05-01 JP JP59086169A patent/JPS60234964A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60234964A (ja) | 1985-11-21 |