JPH02236278A - 超微紛体の超薄膜被覆法 - Google Patents

超微紛体の超薄膜被覆法

Info

Publication number
JPH02236278A
JPH02236278A JP1089283A JP8928389A JPH02236278A JP H02236278 A JPH02236278 A JP H02236278A JP 1089283 A JP1089283 A JP 1089283A JP 8928389 A JP8928389 A JP 8928389A JP H02236278 A JPH02236278 A JP H02236278A
Authority
JP
Japan
Prior art keywords
ultra
thin film
fibrous material
powder
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1089283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH055896B2 (OSRAM
Inventor
Sumio Iijima
澄男 飯島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61165422A external-priority patent/JPS6320480A/ja
Application filed by Research Development Corp of Japan filed Critical Research Development Corp of Japan
Priority to JP1089283A priority Critical patent/JPH02236278A/ja
Publication of JPH02236278A publication Critical patent/JPH02236278A/ja
Publication of JPH055896B2 publication Critical patent/JPH055896B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Silicon Compounds (AREA)
  • Powder Metallurgy (AREA)
JP1089283A 1986-07-14 1989-04-07 超微紛体の超薄膜被覆法 Granted JPH02236278A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1089283A JPH02236278A (ja) 1986-07-14 1989-04-07 超微紛体の超薄膜被覆法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP61165422A JPS6320480A (ja) 1986-07-14 1986-07-14 粉体または繊維状物質の表面処理法とその装置
JP1089283A JPH02236278A (ja) 1986-07-14 1989-04-07 超微紛体の超薄膜被覆法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP61165422A Division JPS6320480A (ja) 1986-07-14 1986-07-14 粉体または繊維状物質の表面処理法とその装置

Publications (2)

Publication Number Publication Date
JPH02236278A true JPH02236278A (ja) 1990-09-19
JPH055896B2 JPH055896B2 (OSRAM) 1993-01-25

Family

ID=26430711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1089283A Granted JPH02236278A (ja) 1986-07-14 1989-04-07 超微紛体の超薄膜被覆法

Country Status (1)

Country Link
JP (1) JPH02236278A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010212580A (ja) * 2009-03-12 2010-09-24 Kurimoto Ltd 磁気粘性流体

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4216270B2 (ja) 2004-06-30 2009-01-28 三星エスディアイ株式会社 電子装置、薄膜トランジスタ構造体及びそれを備える平板ディスプレイ装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4893589A (OSRAM) * 1972-03-13 1973-12-04
JPS5669210A (en) * 1979-11-09 1981-06-10 Mitsubishi Chem Ind Ltd Method for depositing thermally decomposed carbon
JPS58100601A (ja) * 1981-12-09 1983-06-15 Japan Synthetic Rubber Co Ltd 被覆超微粒子またはその膜並びに形成方法及び装置
JPS6078635A (ja) * 1983-10-07 1985-05-04 Res Dev Corp Of Japan 弧立超微粒子の生成法並に生成装置
JPS60159855A (ja) * 1984-01-31 1985-08-21 Tdk Corp 電子写真感光体の製造装置
JPS6133867U (ja) * 1984-07-30 1986-03-01 シャープ株式会社 気相成長成膜装置
JPS6320480A (ja) * 1986-07-14 1988-01-28 Res Dev Corp Of Japan 粉体または繊維状物質の表面処理法とその装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4893589A (OSRAM) * 1972-03-13 1973-12-04
JPS5669210A (en) * 1979-11-09 1981-06-10 Mitsubishi Chem Ind Ltd Method for depositing thermally decomposed carbon
JPS58100601A (ja) * 1981-12-09 1983-06-15 Japan Synthetic Rubber Co Ltd 被覆超微粒子またはその膜並びに形成方法及び装置
JPS6078635A (ja) * 1983-10-07 1985-05-04 Res Dev Corp Of Japan 弧立超微粒子の生成法並に生成装置
JPS60159855A (ja) * 1984-01-31 1985-08-21 Tdk Corp 電子写真感光体の製造装置
JPS6133867U (ja) * 1984-07-30 1986-03-01 シャープ株式会社 気相成長成膜装置
JPS6320480A (ja) * 1986-07-14 1988-01-28 Res Dev Corp Of Japan 粉体または繊維状物質の表面処理法とその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010212580A (ja) * 2009-03-12 2010-09-24 Kurimoto Ltd 磁気粘性流体

Also Published As

Publication number Publication date
JPH055896B2 (OSRAM) 1993-01-25

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