JPH02230251A - 電析的に形取り可能な三角形または台形断面の微細構造体をリトグラフ的に製造する方法 - Google Patents

電析的に形取り可能な三角形または台形断面の微細構造体をリトグラフ的に製造する方法

Info

Publication number
JPH02230251A
JPH02230251A JP1324138A JP32413889A JPH02230251A JP H02230251 A JPH02230251 A JP H02230251A JP 1324138 A JP1324138 A JP 1324138A JP 32413889 A JP32413889 A JP 32413889A JP H02230251 A JPH02230251 A JP H02230251A
Authority
JP
Japan
Prior art keywords
resist layer
resist
mask
layer
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1324138A
Other languages
English (en)
Japanese (ja)
Inventor
Asim Maner
アジム・マーナー
Jurgen Mohr
ユルゲン・モール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut fuer Technologie KIT
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Publication of JPH02230251A publication Critical patent/JPH02230251A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/12—Production of screen printing forms or similar printing forms, e.g. stencils

Landscapes

  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Micromachines (AREA)
JP1324138A 1988-12-16 1989-12-15 電析的に形取り可能な三角形または台形断面の微細構造体をリトグラフ的に製造する方法 Pending JPH02230251A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3842354A DE3842354A1 (de) 1988-12-16 1988-12-16 Verfahren zur lithographischen herstellung von galvanisch abformbaren mikrostrukturen mit dreieckigem oder trapezfoermigem querschnitt
DE3842354.5 1988-12-16

Publications (1)

Publication Number Publication Date
JPH02230251A true JPH02230251A (ja) 1990-09-12

Family

ID=6369302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1324138A Pending JPH02230251A (ja) 1988-12-16 1989-12-15 電析的に形取り可能な三角形または台形断面の微細構造体をリトグラフ的に製造する方法

Country Status (5)

Country Link
US (1) US5045439A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0373329B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH02230251A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AT (1) ATE132279T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3842354A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007123614A (ja) * 2005-10-28 2007-05-17 Kyocera Kinseki Corp 露光装置、ウェハ及び露光方法

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05259584A (ja) * 1992-01-14 1993-10-08 Internatl Business Mach Corp <Ibm> 集積光デフレクタおよびその製造方法
DE4332108C1 (de) * 1993-09-22 1995-03-23 Kernforschungsz Karlsruhe Verfahren zur Herstellung von Mikrostrukturkörpern
US6360424B1 (en) 1994-06-06 2002-03-26 Case Western Reserve University Method of making micromotors with utilitarian features
US6029337A (en) * 1994-06-06 2000-02-29 Case Western Reserve University Methods of fabricating micromotors with utilitarian features
US5705318A (en) * 1994-06-06 1998-01-06 Case Western Reserve University Micromotors and methods of fabrication
US5788468A (en) * 1994-11-03 1998-08-04 Memstek Products, Llc Microfabricated fluidic devices
US6226120B1 (en) 1994-11-30 2001-05-01 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Three-dimensional microstructures, and methods for making three-dimensional microstructures
DE19604242C2 (de) * 1996-02-06 1999-09-02 Fraunhofer Ges Forschung Herstellungsverfahren für dreidimensional geformte Metallprofile und Anwendung des Verfahrens zur Herstellung von Metallprofilen für die Mikromechanik
US6197180B1 (en) 1996-02-09 2001-03-06 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College High aspect ratio, microstructure-covered, macroscopic surfaces
DE19652463C2 (de) * 1996-12-17 1999-02-25 Univ Schiller Jena Verfahren und Vorrichtung zur Herstellung dreidimensionaler Mikrostrukturen beliebiger Form
DE69900384T2 (de) * 1998-04-28 2003-02-27 Nano World Ag, Neuchatel Kostengünstiger mikrobiegebalken aus photoplastischem material
US6881203B2 (en) 2001-09-05 2005-04-19 3M Innovative Properties Company Microneedle arrays and methods of manufacturing the same
US6620715B1 (en) 2002-03-29 2003-09-16 Cypress Semiconductor Corp. Method for forming sub-critical dimension structures in an integrated circuit
KR101323980B1 (ko) * 2002-07-19 2013-10-30 쓰리엠 이노베이티브 프로퍼티즈 컴파니 마이크로 니들 장치, 마이크로 니들 장치를 사용하는 방법 및 마이크로 니들 장치를 송출하는 방법
US6875544B1 (en) 2002-10-03 2005-04-05 Sandia Corporation Method for the fabrication of three-dimensional microstructures by deep X-ray lithography
FR2858694B1 (fr) * 2003-08-07 2006-08-18 Commissariat Energie Atomique Procede de realisation de motifs a flancs inclines par photolithographie

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2828625C2 (de) * 1978-06-29 1980-06-19 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur galvanoplastischen Herstellung von Präzisionsflachteilen
DE3006543A1 (de) * 1980-02-21 1981-08-27 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von mit strukturen versehenen lackschichten fuer die mikrogalvanoplastik mittels roentgenstrahlen
JPS57200042A (en) * 1981-06-02 1982-12-08 Hoya Corp Exposure method for chemically machinable photosensitive glass
DE3315665A1 (de) * 1983-04-29 1984-10-31 Siemens AG, 1000 Berlin und 8000 München Herstellung von galvanoplastischen flachteilen mit totationsunsymmetrischen, kegelfoermigen strukturen
DE3879471T2 (de) * 1988-04-21 1993-09-16 Ibm Verfahren zur herstellung eines photoresistmusters und apparat dafuer.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007123614A (ja) * 2005-10-28 2007-05-17 Kyocera Kinseki Corp 露光装置、ウェハ及び露光方法

Also Published As

Publication number Publication date
DE3842354C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-09-03
US5045439A (en) 1991-09-03
EP0373329A2 (de) 1990-06-20
EP0373329A3 (de) 1991-10-09
ATE132279T1 (de) 1996-01-15
EP0373329B1 (de) 1995-12-27
DE3842354A1 (de) 1990-06-21

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