JPH0223021B2 - - Google Patents
Info
- Publication number
- JPH0223021B2 JPH0223021B2 JP58070233A JP7023383A JPH0223021B2 JP H0223021 B2 JPH0223021 B2 JP H0223021B2 JP 58070233 A JP58070233 A JP 58070233A JP 7023383 A JP7023383 A JP 7023383A JP H0223021 B2 JPH0223021 B2 JP H0223021B2
- Authority
- JP
- Japan
- Prior art keywords
- ions
- gas chamber
- target material
- energy
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Plasma Technology (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58070233A JPS59196600A (ja) | 1983-04-21 | 1983-04-21 | 中性粒子注入法およびその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58070233A JPS59196600A (ja) | 1983-04-21 | 1983-04-21 | 中性粒子注入法およびその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59196600A JPS59196600A (ja) | 1984-11-07 |
| JPH0223021B2 true JPH0223021B2 (enrdf_load_stackoverflow) | 1990-05-22 |
Family
ID=13425637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58070233A Granted JPS59196600A (ja) | 1983-04-21 | 1983-04-21 | 中性粒子注入法およびその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59196600A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63126220A (ja) * | 1986-11-14 | 1988-05-30 | Mitsubishi Electric Corp | 不純物添加方法 |
| JPS63166221A (ja) * | 1986-12-27 | 1988-07-09 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
| JPH02102654U (enrdf_load_stackoverflow) * | 1989-02-02 | 1990-08-15 | ||
| FR2966305B1 (fr) * | 2010-10-15 | 2013-07-12 | Commissariat Energie Atomique | Structure acoustique heterogene formee a partir d'un materiau homogene |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4135097A (en) * | 1977-05-05 | 1979-01-16 | International Business Machines Corporation | Ion implantation apparatus for controlling the surface potential of a target surface |
| FR2490873A1 (fr) * | 1980-09-24 | 1982-03-26 | Varian Associates | Procede et dispositif destines a produire une neutralisation amelioree d'un faisceau d'ions positifs |
-
1983
- 1983-04-21 JP JP58070233A patent/JPS59196600A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59196600A (ja) | 1984-11-07 |
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