JPH0222984Y2 - - Google Patents

Info

Publication number
JPH0222984Y2
JPH0222984Y2 JP1984081466U JP8146684U JPH0222984Y2 JP H0222984 Y2 JPH0222984 Y2 JP H0222984Y2 JP 1984081466 U JP1984081466 U JP 1984081466U JP 8146684 U JP8146684 U JP 8146684U JP H0222984 Y2 JPH0222984 Y2 JP H0222984Y2
Authority
JP
Japan
Prior art keywords
doors
door
diffusion furnace
core tube
mounting plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984081466U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60194329U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8146684U priority Critical patent/JPS60194329U/ja
Publication of JPS60194329U publication Critical patent/JPS60194329U/ja
Application granted granted Critical
Publication of JPH0222984Y2 publication Critical patent/JPH0222984Y2/ja
Granted legal-status Critical Current

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  • Furnace Details (AREA)
JP8146684U 1984-06-01 1984-06-01 拡散炉装置 Granted JPS60194329U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8146684U JPS60194329U (ja) 1984-06-01 1984-06-01 拡散炉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8146684U JPS60194329U (ja) 1984-06-01 1984-06-01 拡散炉装置

Publications (2)

Publication Number Publication Date
JPS60194329U JPS60194329U (ja) 1985-12-24
JPH0222984Y2 true JPH0222984Y2 (enrdf_load_stackoverflow) 1990-06-21

Family

ID=30628272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8146684U Granted JPS60194329U (ja) 1984-06-01 1984-06-01 拡散炉装置

Country Status (1)

Country Link
JP (1) JPS60194329U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6571433B2 (ja) * 2015-07-24 2019-09-04 光洋サーモシステム株式会社 熱処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750846U (enrdf_load_stackoverflow) * 1980-09-09 1982-03-24

Also Published As

Publication number Publication date
JPS60194329U (ja) 1985-12-24

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