JPS60194329U - 拡散炉装置 - Google Patents

拡散炉装置

Info

Publication number
JPS60194329U
JPS60194329U JP8146684U JP8146684U JPS60194329U JP S60194329 U JPS60194329 U JP S60194329U JP 8146684 U JP8146684 U JP 8146684U JP 8146684 U JP8146684 U JP 8146684U JP S60194329 U JPS60194329 U JP S60194329U
Authority
JP
Japan
Prior art keywords
diffusion furnace
furnace equipment
shutter device
shutters
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8146684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222984Y2 (enrdf_load_stackoverflow
Inventor
健一 木下
亘 大加瀬
治夫 伊東
Original Assignee
東京エレクトロン相模株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン相模株式会社 filed Critical 東京エレクトロン相模株式会社
Priority to JP8146684U priority Critical patent/JPS60194329U/ja
Publication of JPS60194329U publication Critical patent/JPS60194329U/ja
Application granted granted Critical
Publication of JPH0222984Y2 publication Critical patent/JPH0222984Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP8146684U 1984-06-01 1984-06-01 拡散炉装置 Granted JPS60194329U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8146684U JPS60194329U (ja) 1984-06-01 1984-06-01 拡散炉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8146684U JPS60194329U (ja) 1984-06-01 1984-06-01 拡散炉装置

Publications (2)

Publication Number Publication Date
JPS60194329U true JPS60194329U (ja) 1985-12-24
JPH0222984Y2 JPH0222984Y2 (enrdf_load_stackoverflow) 1990-06-21

Family

ID=30628272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8146684U Granted JPS60194329U (ja) 1984-06-01 1984-06-01 拡散炉装置

Country Status (1)

Country Link
JP (1) JPS60194329U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017026243A (ja) * 2015-07-24 2017-02-02 光洋サーモシステム株式会社 熱処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750846U (enrdf_load_stackoverflow) * 1980-09-09 1982-03-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750846U (enrdf_load_stackoverflow) * 1980-09-09 1982-03-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017026243A (ja) * 2015-07-24 2017-02-02 光洋サーモシステム株式会社 熱処理装置

Also Published As

Publication number Publication date
JPH0222984Y2 (enrdf_load_stackoverflow) 1990-06-21

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