JPS60194329U - Diffusion furnace equipment - Google Patents

Diffusion furnace equipment

Info

Publication number
JPS60194329U
JPS60194329U JP8146684U JP8146684U JPS60194329U JP S60194329 U JPS60194329 U JP S60194329U JP 8146684 U JP8146684 U JP 8146684U JP 8146684 U JP8146684 U JP 8146684U JP S60194329 U JPS60194329 U JP S60194329U
Authority
JP
Japan
Prior art keywords
diffusion furnace
furnace equipment
shutter device
shutters
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8146684U
Other languages
Japanese (ja)
Other versions
JPH0222984Y2 (en
Inventor
健一 木下
亘 大加瀬
治夫 伊東
Original Assignee
東京エレクトロン相模株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン相模株式会社 filed Critical 東京エレクトロン相模株式会社
Priority to JP8146684U priority Critical patent/JPS60194329U/en
Publication of JPS60194329U publication Critical patent/JPS60194329U/en
Application granted granted Critical
Publication of JPH0222984Y2 publication Critical patent/JPH0222984Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、本考案を装備した装置を示す図、第２図は、
本考案の実施例を平面図、第３図は第２図の正面図、第
４図は従来例を示す図である。 １１・・・炉芯管、１２・・・シャッタ、１８・・・駆
動軸、２２．２３・・・ギヤ。FIG. 1 shows a device equipped with the present invention, and FIG. 2 shows a device equipped with the present invention.
FIG. 3 is a plan view of an embodiment of the present invention, FIG. 3 is a front view of FIG. 2, and FIG. 4 is a diagram showing a conventional example. 11...Furnace core tube, 12...Shutter, 18...Drive shaft, 22.23...Gear.

Claims (1)

【実用新案登録請求の範囲】 １　炉芯管の端部の両側にシャッタを竪軸に対して回動
自在に設けたことを特徴とする拡散炉のシャッタ装置。 ２　二枚のシャッタが、１本の駆動軸によりギヤを介し
て互に逆方向に回転することを特徴とする実用新案登録
請求の範囲第１項記載の拡散炉、　　のシャッタ装置。 ３　シャッタが、スプリングを嵌合した軸を介して取付
板１１に固定されていることを特徴とする実用新案登録
請求の範囲第１項記載の拡散炉のシャッタ装置。[Claims for Utility Model Registration] 1. A shutter device for a diffusion furnace, characterized in that shutters are provided on both sides of the end of a furnace core tube so as to be rotatable about a vertical axis. 2. A shutter device for a diffusion furnace according to claim 1, wherein the two shutters are rotated in opposite directions by a single drive shaft through gears. 3. The shutter device for a diffusion furnace according to claim 1, wherein the shutter is fixed to the mounting plate 11 via a shaft fitted with a spring.
JP8146684U 1984-06-01 1984-06-01 Diffusion furnace equipment Granted JPS60194329U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8146684U JPS60194329U (en) 1984-06-01 1984-06-01 Diffusion furnace equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8146684U JPS60194329U (en) 1984-06-01 1984-06-01 Diffusion furnace equipment

Publications (2)

Publication Number Publication Date
JPS60194329U true JPS60194329U (en) 1985-12-24
JPH0222984Y2 JPH0222984Y2 (en) 1990-06-21

Family

ID=30628272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8146684U Granted JPS60194329U (en) 1984-06-01 1984-06-01 Diffusion furnace equipment

Country Status (1)

Country Link
JP (1) JPS60194329U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017026243A (en) * 2015-07-24 2017-02-02 光洋サーモシステム株式会社 Thermal treatment device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750846U (en) * 1980-09-09 1982-03-24

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5585617A (en) * 1978-12-22 1980-06-27 Kawasaki Heavy Ind Ltd Steel-making method and converter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750846U (en) * 1980-09-09 1982-03-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017026243A (en) * 2015-07-24 2017-02-02 光洋サーモシステム株式会社 Thermal treatment device

Also Published As

Publication number Publication date
JPH0222984Y2 (en) 1990-06-21

Similar Documents

Publication Publication Date Title
JPS60194329U (en) Diffusion furnace equipment
JPS6065125U (en) Automatic transmission side cover mounting structure
JPS60169448U (en) transmission
JPS60133256U (en) Support structure for the shaft attached to the side gear of the differential
JPS58173494U (en) Vertical movement device
JPS58196454U (en) gear mechanism
JPS5816455U (en) Gear rotation transmission mechanism
JPS595238U (en) clamp device
JPS59173152U (en) Cassette loading mechanism
JPS59130149U (en) Electronics
JPS59156858U (en) Rack and pinion type power steering device
JPS5922891U (en) Movable blinds with window frame
JPS59109098U (en) turntable device
JPS6084849U (en) automatic transmission planetary gearing
JPS59193543U (en) Horizontal crusher drive device
JPS58171197U (en) Drive device for traveling toys
JPS5840721U (en) Pivot device for eyeglass frames
JPS59119453U (en) Corotron wire changing device
JPS5828799U (en) Press drive device
JPS5881947U (en) Accommodation mechanism for cases of different widths
JPS6058950U (en) Gear distance maintaining device
JPS5915845U (en) Gear bump crush removal mechanism
JPS5862224U (en) Pulse motor instrument drive device
JPS5911938U (en) Differential device
JPS584631U (en) double glazing with built-in blinds