JPH022282B2 - - Google Patents

Info

Publication number
JPH022282B2
JPH022282B2 JP24229585A JP24229585A JPH022282B2 JP H022282 B2 JPH022282 B2 JP H022282B2 JP 24229585 A JP24229585 A JP 24229585A JP 24229585 A JP24229585 A JP 24229585A JP H022282 B2 JPH022282 B2 JP H022282B2
Authority
JP
Japan
Prior art keywords
shroud
film
cylinder
aluminum
cooling fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP24229585A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62101018A (ja
Inventor
Yutaka Kato
Eizo Isoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Altemira Co Ltd
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP24229585A priority Critical patent/JPS62101018A/ja
Publication of JPS62101018A publication Critical patent/JPS62101018A/ja
Publication of JPH022282B2 publication Critical patent/JPH022282B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP24229585A 1985-10-28 1985-10-28 半導体製造装置用シユラウドの製造方法 Granted JPS62101018A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24229585A JPS62101018A (ja) 1985-10-28 1985-10-28 半導体製造装置用シユラウドの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24229585A JPS62101018A (ja) 1985-10-28 1985-10-28 半導体製造装置用シユラウドの製造方法

Publications (2)

Publication Number Publication Date
JPS62101018A JPS62101018A (ja) 1987-05-11
JPH022282B2 true JPH022282B2 (OSRAM) 1990-01-17

Family

ID=17087109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24229585A Granted JPS62101018A (ja) 1985-10-28 1985-10-28 半導体製造装置用シユラウドの製造方法

Country Status (1)

Country Link
JP (1) JPS62101018A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101583981B1 (ko) * 2014-09-04 2016-01-11 (주)지오투정보기술 고속이동차량 기반 wlan 신호 수집 장치 및 방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009110060A1 (ja) 2008-03-04 2009-09-11 東京濾器株式会社 通気管の消音構造及びケースの消音構造

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101583981B1 (ko) * 2014-09-04 2016-01-11 (주)지오투정보기술 고속이동차량 기반 wlan 신호 수집 장치 및 방법

Also Published As

Publication number Publication date
JPS62101018A (ja) 1987-05-11

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