JPH0222328B2 - - Google Patents
Info
- Publication number
- JPH0222328B2 JPH0222328B2 JP8549081A JP8549081A JPH0222328B2 JP H0222328 B2 JPH0222328 B2 JP H0222328B2 JP 8549081 A JP8549081 A JP 8549081A JP 8549081 A JP8549081 A JP 8549081A JP H0222328 B2 JPH0222328 B2 JP H0222328B2
- Authority
- JP
- Japan
- Prior art keywords
- optical
- optical system
- straight line
- measuring device
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 223
- 238000001514 detection method Methods 0.000 claims description 88
- 238000005259 measurement Methods 0.000 claims description 63
- 238000012360 testing method Methods 0.000 claims description 50
- 230000004907 flux Effects 0.000 claims description 33
- 230000000873 masking effect Effects 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 4
- 238000002834 transmittance Methods 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 2
- 239000011295 pitch Substances 0.000 description 39
- 238000010586 diagram Methods 0.000 description 27
- 239000010408 film Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 238000012545 processing Methods 0.000 description 11
- 239000010409 thin film Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 4
- 230000009466 transformation Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8549081A JPS57199933A (en) | 1981-06-03 | 1981-06-03 | Measuring device for optical characteristic of optical system |
| US06/353,505 US4601575A (en) | 1981-03-03 | 1982-03-01 | Apparatus for measuring the characteristics of an optical system |
| EP82101639A EP0059480B1 (en) | 1981-03-03 | 1982-03-03 | An apparatus for measuring the characteristics of an optical system |
| DE8282101639T DE3275320D1 (en) | 1981-03-03 | 1982-03-03 | An apparatus for measuring the characteristics of an optical system |
| DE198282101639T DE59480T1 (de) | 1981-03-03 | 1982-03-03 | Einrichtung zur messung der kennzeichen eines optischen systems. |
| CA000398453A CA1185809A (en) | 1981-06-03 | 1982-03-16 | Apparatus for measuring the characteristics of an optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8549081A JPS57199933A (en) | 1981-06-03 | 1981-06-03 | Measuring device for optical characteristic of optical system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57199933A JPS57199933A (en) | 1982-12-08 |
| JPH0222328B2 true JPH0222328B2 (enrdf_load_stackoverflow) | 1990-05-18 |
Family
ID=13860362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8549081A Granted JPS57199933A (en) | 1981-03-03 | 1981-06-03 | Measuring device for optical characteristic of optical system |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS57199933A (enrdf_load_stackoverflow) |
| CA (1) | CA1185809A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013105570A1 (de) * | 2013-05-29 | 2014-12-04 | Isra Surface Vision Gmbh | Verfahren zur Bestimmung der Brechkraft eines transparenten Objekts sowie entsprechende Vorrichtung |
-
1981
- 1981-06-03 JP JP8549081A patent/JPS57199933A/ja active Granted
-
1982
- 1982-03-16 CA CA000398453A patent/CA1185809A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA1185809A (en) | 1985-04-23 |
| JPS57199933A (en) | 1982-12-08 |
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