JPH0222143B2 - - Google Patents

Info

Publication number
JPH0222143B2
JPH0222143B2 JP5672583A JP5672583A JPH0222143B2 JP H0222143 B2 JPH0222143 B2 JP H0222143B2 JP 5672583 A JP5672583 A JP 5672583A JP 5672583 A JP5672583 A JP 5672583A JP H0222143 B2 JPH0222143 B2 JP H0222143B2
Authority
JP
Japan
Prior art keywords
film
plastic
sputtering
metal compound
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5672583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59179630A (ja
Inventor
Takashi Kuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentel Co Ltd
Original Assignee
Pentel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pentel Co Ltd filed Critical Pentel Co Ltd
Priority to JP5672583A priority Critical patent/JPS59179630A/ja
Publication of JPS59179630A publication Critical patent/JPS59179630A/ja
Publication of JPH0222143B2 publication Critical patent/JPH0222143B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase

Landscapes

  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP5672583A 1983-03-31 1983-03-31 プラスチツクへの被膜形成方法 Granted JPS59179630A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5672583A JPS59179630A (ja) 1983-03-31 1983-03-31 プラスチツクへの被膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5672583A JPS59179630A (ja) 1983-03-31 1983-03-31 プラスチツクへの被膜形成方法

Publications (2)

Publication Number Publication Date
JPS59179630A JPS59179630A (ja) 1984-10-12
JPH0222143B2 true JPH0222143B2 (OSRAM) 1990-05-17

Family

ID=13035466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5672583A Granted JPS59179630A (ja) 1983-03-31 1983-03-31 プラスチツクへの被膜形成方法

Country Status (1)

Country Link
JP (1) JPS59179630A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006028977B4 (de) * 2006-06-23 2012-04-12 Qimonda Ag Sputterdepositions-Vorrichtung
CN104651779A (zh) * 2015-02-11 2015-05-27 烟台首钢磁性材料股份有限公司 一种用于钕铁硼磁体的镀膜设备及镀膜工艺
JP7478049B2 (ja) * 2020-07-08 2024-05-02 株式会社アルバック スパッタリング装置及び金属化合物膜の成膜方法

Also Published As

Publication number Publication date
JPS59179630A (ja) 1984-10-12

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