JPS59179630A - プラスチツクへの被膜形成方法 - Google Patents

プラスチツクへの被膜形成方法

Info

Publication number
JPS59179630A
JPS59179630A JP5672583A JP5672583A JPS59179630A JP S59179630 A JPS59179630 A JP S59179630A JP 5672583 A JP5672583 A JP 5672583A JP 5672583 A JP5672583 A JP 5672583A JP S59179630 A JPS59179630 A JP S59179630A
Authority
JP
Japan
Prior art keywords
film
plastic
metal compound
sputtering
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5672583A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222143B2 (OSRAM
Inventor
Takashi Kuhara
隆 久原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentel Co Ltd
Original Assignee
Pentel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pentel Co Ltd filed Critical Pentel Co Ltd
Priority to JP5672583A priority Critical patent/JPS59179630A/ja
Publication of JPS59179630A publication Critical patent/JPS59179630A/ja
Publication of JPH0222143B2 publication Critical patent/JPH0222143B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase

Landscapes

  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP5672583A 1983-03-31 1983-03-31 プラスチツクへの被膜形成方法 Granted JPS59179630A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5672583A JPS59179630A (ja) 1983-03-31 1983-03-31 プラスチツクへの被膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5672583A JPS59179630A (ja) 1983-03-31 1983-03-31 プラスチツクへの被膜形成方法

Publications (2)

Publication Number Publication Date
JPS59179630A true JPS59179630A (ja) 1984-10-12
JPH0222143B2 JPH0222143B2 (OSRAM) 1990-05-17

Family

ID=13035466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5672583A Granted JPS59179630A (ja) 1983-03-31 1983-03-31 プラスチツクへの被膜形成方法

Country Status (1)

Country Link
JP (1) JPS59179630A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008001989A (ja) * 2006-06-23 2008-01-10 Qimonda Ag スパッタ堆積装置およびスパッタ堆積方法
JP2016148108A (ja) * 2015-02-11 2016-08-18 煙台首鋼磁性材料株式有限公司 ネオジム磁石の表面コーティング装置及び表面コーティング方法
JP2022014978A (ja) * 2020-07-08 2022-01-21 株式会社アルバック スパッタリング装置及び金属化合物膜の成膜方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008001989A (ja) * 2006-06-23 2008-01-10 Qimonda Ag スパッタ堆積装置およびスパッタ堆積方法
JP2016148108A (ja) * 2015-02-11 2016-08-18 煙台首鋼磁性材料株式有限公司 ネオジム磁石の表面コーティング装置及び表面コーティング方法
JP2022014978A (ja) * 2020-07-08 2022-01-21 株式会社アルバック スパッタリング装置及び金属化合物膜の成膜方法

Also Published As

Publication number Publication date
JPH0222143B2 (OSRAM) 1990-05-17

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