JPH0222004B2 - - Google Patents

Info

Publication number
JPH0222004B2
JPH0222004B2 JP56037491A JP3749181A JPH0222004B2 JP H0222004 B2 JPH0222004 B2 JP H0222004B2 JP 56037491 A JP56037491 A JP 56037491A JP 3749181 A JP3749181 A JP 3749181A JP H0222004 B2 JPH0222004 B2 JP H0222004B2
Authority
JP
Japan
Prior art keywords
reactor
trichlorosilane
reaction
sihcl
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56037491A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57156318A (en
Inventor
Hideo Ito
Mitsutoshi Ubukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOJUNDO SHIRIKON KK
Original Assignee
KOJUNDO SHIRIKON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOJUNDO SHIRIKON KK filed Critical KOJUNDO SHIRIKON KK
Priority to JP3749181A priority Critical patent/JPS57156318A/ja
Publication of JPS57156318A publication Critical patent/JPS57156318A/ja
Publication of JPH0222004B2 publication Critical patent/JPH0222004B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP3749181A 1981-03-16 1981-03-16 Production of trichlorosilane Granted JPS57156318A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3749181A JPS57156318A (en) 1981-03-16 1981-03-16 Production of trichlorosilane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3749181A JPS57156318A (en) 1981-03-16 1981-03-16 Production of trichlorosilane

Publications (2)

Publication Number Publication Date
JPS57156318A JPS57156318A (en) 1982-09-27
JPH0222004B2 true JPH0222004B2 (en, 2012) 1990-05-17

Family

ID=12498986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3749181A Granted JPS57156318A (en) 1981-03-16 1981-03-16 Production of trichlorosilane

Country Status (1)

Country Link
JP (1) JPS57156318A (en, 2012)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2530638A1 (fr) * 1982-07-26 1984-01-27 Rhone Poulenc Spec Chim Procede de preparation d'un melange a base de trichlorosilane utilisable pour la preparation de silicium de haute purete
US4526769A (en) * 1983-07-18 1985-07-02 Motorola, Inc. Trichlorosilane production process
DE3828344C1 (en, 2012) * 1988-08-20 1989-07-06 Huels Ag, 4370 Marl, De
CN100436315C (zh) * 2001-10-19 2008-11-26 株式会社德山 硅的制造方法
JP5428146B2 (ja) * 2006-10-31 2014-02-26 三菱マテリアル株式会社 トリクロロシラン製造装置
JP5205906B2 (ja) 2006-10-31 2013-06-05 三菱マテリアル株式会社 トリクロロシラン製造装置
JP5205910B2 (ja) 2006-10-31 2013-06-05 三菱マテリアル株式会社 トリクロロシラン製造装置
JP5428145B2 (ja) 2006-10-31 2014-02-26 三菱マテリアル株式会社 トリクロロシラン製造装置
JP5601438B2 (ja) * 2006-11-07 2014-10-08 三菱マテリアル株式会社 トリクロロシランの製造方法およびトリクロロシラン製造装置
JP5397580B2 (ja) * 2007-05-25 2014-01-22 三菱マテリアル株式会社 トリクロロシランの製造方法と製造装置および多結晶シリコンの製造方法
TW201031591A (en) * 2008-10-30 2010-09-01 Mitsubishi Materials Corp Process for production of trichlorosilane and method for use thereof
JP5333725B2 (ja) * 2008-10-30 2013-11-06 三菱マテリアル株式会社 トリクロロシランの製造方法および利用方法
DE102009037155B3 (de) * 2009-08-04 2010-11-04 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Herstellung von Trichlorsilan

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118017A (en) * 1981-01-16 1982-07-22 Koujiyundo Silicon Kk Manufacture of trichlorosilane

Also Published As

Publication number Publication date
JPS57156318A (en) 1982-09-27

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