JPH0220835Y2 - - Google Patents

Info

Publication number
JPH0220835Y2
JPH0220835Y2 JP1985054426U JP5442685U JPH0220835Y2 JP H0220835 Y2 JPH0220835 Y2 JP H0220835Y2 JP 1985054426 U JP1985054426 U JP 1985054426U JP 5442685 U JP5442685 U JP 5442685U JP H0220835 Y2 JPH0220835 Y2 JP H0220835Y2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
storage container
external stress
wafer storage
holding frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985054426U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61172085U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985054426U priority Critical patent/JPH0220835Y2/ja
Publication of JPS61172085U publication Critical patent/JPS61172085U/ja
Application granted granted Critical
Publication of JPH0220835Y2 publication Critical patent/JPH0220835Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Packages (AREA)
  • Packaging Frangible Articles (AREA)
JP1985054426U 1985-04-12 1985-04-12 Expired JPH0220835Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985054426U JPH0220835Y2 (enExample) 1985-04-12 1985-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985054426U JPH0220835Y2 (enExample) 1985-04-12 1985-04-12

Publications (2)

Publication Number Publication Date
JPS61172085U JPS61172085U (enExample) 1986-10-25
JPH0220835Y2 true JPH0220835Y2 (enExample) 1990-06-06

Family

ID=30576174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985054426U Expired JPH0220835Y2 (enExample) 1985-04-12 1985-04-12

Country Status (1)

Country Link
JP (1) JPH0220835Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5873468A (en) * 1995-11-16 1999-02-23 Sumitomo Sitix Corporation Thin-plate supporting container with filter means

Also Published As

Publication number Publication date
JPS61172085U (enExample) 1986-10-25

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