JPS61172085U - - Google Patents
Info
- Publication number
- JPS61172085U JPS61172085U JP5442685U JP5442685U JPS61172085U JP S61172085 U JPS61172085 U JP S61172085U JP 5442685 U JP5442685 U JP 5442685U JP 5442685 U JP5442685 U JP 5442685U JP S61172085 U JPS61172085 U JP S61172085U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- storage container
- external stress
- container according
- wafer storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Packages (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5442685U JPH0220835Y2 (enExample) | 1985-04-12 | 1985-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5442685U JPH0220835Y2 (enExample) | 1985-04-12 | 1985-04-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61172085U true JPS61172085U (enExample) | 1986-10-25 |
| JPH0220835Y2 JPH0220835Y2 (enExample) | 1990-06-06 |
Family
ID=30576174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5442685U Expired JPH0220835Y2 (enExample) | 1985-04-12 | 1985-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220835Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6032802A (en) * | 1995-11-16 | 2000-03-07 | Sumitomo Metal Industries, Ltd. | Thin-plate supporting container with filter means |
-
1985
- 1985-04-12 JP JP5442685U patent/JPH0220835Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6032802A (en) * | 1995-11-16 | 2000-03-07 | Sumitomo Metal Industries, Ltd. | Thin-plate supporting container with filter means |
| US6105781A (en) * | 1995-11-16 | 2000-08-22 | Sumitomo Metal Industries, Ltd. | Thin-plate supporting container with unitary porous gasket |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220835Y2 (enExample) | 1990-06-06 |