JPH0220830Y2 - - Google Patents

Info

Publication number
JPH0220830Y2
JPH0220830Y2 JP1985169939U JP16993985U JPH0220830Y2 JP H0220830 Y2 JPH0220830 Y2 JP H0220830Y2 JP 1985169939 U JP1985169939 U JP 1985169939U JP 16993985 U JP16993985 U JP 16993985U JP H0220830 Y2 JPH0220830 Y2 JP H0220830Y2
Authority
JP
Japan
Prior art keywords
boat
wafer
rod
wafers
shaped body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985169939U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6278753U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985169939U priority Critical patent/JPH0220830Y2/ja
Publication of JPS6278753U publication Critical patent/JPS6278753U/ja
Application granted granted Critical
Publication of JPH0220830Y2 publication Critical patent/JPH0220830Y2/ja
Expired legal-status Critical Current

Links

JP1985169939U 1985-11-05 1985-11-05 Expired JPH0220830Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985169939U JPH0220830Y2 (enEXAMPLES) 1985-11-05 1985-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985169939U JPH0220830Y2 (enEXAMPLES) 1985-11-05 1985-11-05

Publications (2)

Publication Number Publication Date
JPS6278753U JPS6278753U (enEXAMPLES) 1987-05-20
JPH0220830Y2 true JPH0220830Y2 (enEXAMPLES) 1990-06-06

Family

ID=31104203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985169939U Expired JPH0220830Y2 (enEXAMPLES) 1985-11-05 1985-11-05

Country Status (1)

Country Link
JP (1) JPH0220830Y2 (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0648859Y2 (ja) * 1989-03-03 1994-12-12 ラムコ株式会社 ウエハー支持具

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56165317A (en) * 1980-05-26 1981-12-18 Fujitsu Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS6278753U (enEXAMPLES) 1987-05-20

Similar Documents

Publication Publication Date Title
JP3280438B2 (ja) 縦型ボート
US4569452A (en) Silica glass tray made for wafers
JPS633446B2 (enEXAMPLES)
JPH0220830Y2 (enEXAMPLES)
JPH04304652A (ja) 熱処理装置用ボート
JP3650423B2 (ja) ウエハボート
JP2506408B2 (ja) ウェ―ハ熱処理用治具
JP3332168B2 (ja) 縦型ボート及びその製造方法
JPS6317245Y2 (enEXAMPLES)
JP3023977B2 (ja) 縦型熱処理装置
JPH02123736A (ja) 縦型熱処理炉用ウェハボート
JPH0219959Y2 (enEXAMPLES)
JPH0311620A (ja) 半導体ウェハ熱処理炉用ボートローダ
JPH09298236A (ja) 基板支持治具及び基板支持手段
JP2568209B2 (ja) 半導体処理用カンチレバ−
JP2599005Y2 (ja) ウェーハ支持ボート
JPH04120723A (ja) ウエハ熱処理用治具
JPS6323313A (ja) 半導体ウエハの熱処理方法
JPH08107079A (ja) 縦型ウェ−ハボ−ト及び縦型熱処理炉
JPS633155Y2 (enEXAMPLES)
JPS6290927A (ja) 半導体ウエ−ハ処理用治具
JP2533551Y2 (ja) 半導体ウエハ保持治具
JPS632317A (ja) 縦型処理装置およびその治具
JPS6211224A (ja) 半導体ウエハの熱処理方法
JPH05267202A (ja) ウェーハ支持ボート