JPH021907B2 - - Google Patents

Info

Publication number
JPH021907B2
JPH021907B2 JP57045994A JP4599482A JPH021907B2 JP H021907 B2 JPH021907 B2 JP H021907B2 JP 57045994 A JP57045994 A JP 57045994A JP 4599482 A JP4599482 A JP 4599482A JP H021907 B2 JPH021907 B2 JP H021907B2
Authority
JP
Japan
Prior art keywords
discharge
treated
filament
treatment method
torr
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57045994A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58164717A (ja
Inventor
Suketsugu Enomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4599482A priority Critical patent/JPS58164717A/ja
Priority to US06/460,937 priority patent/US4500564A/en
Publication of JPS58164717A publication Critical patent/JPS58164717A/ja
Publication of JPH021907B2 publication Critical patent/JPH021907B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP4599482A 1982-02-01 1982-03-23 放電硬化処理方法 Granted JPS58164717A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4599482A JPS58164717A (ja) 1982-03-23 1982-03-23 放電硬化処理方法
US06/460,937 US4500564A (en) 1982-02-01 1983-01-25 Method for surface treatment by ion bombardment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4599482A JPS58164717A (ja) 1982-03-23 1982-03-23 放電硬化処理方法

Publications (2)

Publication Number Publication Date
JPS58164717A JPS58164717A (ja) 1983-09-29
JPH021907B2 true JPH021907B2 (enrdf_load_stackoverflow) 1990-01-16

Family

ID=12734665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4599482A Granted JPS58164717A (ja) 1982-02-01 1982-03-23 放電硬化処理方法

Country Status (1)

Country Link
JP (1) JPS58164717A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010132937A (ja) * 2008-12-02 2010-06-17 Nippon Parkerizing Co Ltd ステンレス材料の表面改質方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2707894B1 (fr) * 1993-07-20 1995-10-06 Lorraine Laminage Traitement de surface d'une tôle d'acier revêtue de zinc ou d'alliage de zinc avant sa mise en peinture.

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5827344B2 (ja) * 1976-07-16 1983-06-08 富士電子工業株式会社 低電圧処理可能なグロ−放電処理法並びにその装置
JPS5399080A (en) * 1977-02-10 1978-08-30 Ulvac Corp Treating method for inner circumference face of cylinder block

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010132937A (ja) * 2008-12-02 2010-06-17 Nippon Parkerizing Co Ltd ステンレス材料の表面改質方法

Also Published As

Publication number Publication date
JPS58164717A (ja) 1983-09-29

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