JPS626637B2 - - Google Patents

Info

Publication number
JPS626637B2
JPS626637B2 JP57014638A JP1463882A JPS626637B2 JP S626637 B2 JPS626637 B2 JP S626637B2 JP 57014638 A JP57014638 A JP 57014638A JP 1463882 A JP1463882 A JP 1463882A JP S626637 B2 JPS626637 B2 JP S626637B2
Authority
JP
Japan
Prior art keywords
vapor deposition
workpiece
discharge
gas
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57014638A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58133370A (ja
Inventor
Suketsugu Enomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1463882A priority Critical patent/JPS58133370A/ja
Priority to US06/460,937 priority patent/US4500564A/en
Publication of JPS58133370A publication Critical patent/JPS58133370A/ja
Publication of JPS626637B2 publication Critical patent/JPS626637B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP1463882A 1982-02-01 1982-02-01 物理蒸着における被処理物の放電処理方法 Granted JPS58133370A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1463882A JPS58133370A (ja) 1982-02-01 1982-02-01 物理蒸着における被処理物の放電処理方法
US06/460,937 US4500564A (en) 1982-02-01 1983-01-25 Method for surface treatment by ion bombardment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1463882A JPS58133370A (ja) 1982-02-01 1982-02-01 物理蒸着における被処理物の放電処理方法

Publications (2)

Publication Number Publication Date
JPS58133370A JPS58133370A (ja) 1983-08-09
JPS626637B2 true JPS626637B2 (enrdf_load_stackoverflow) 1987-02-12

Family

ID=11866734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1463882A Granted JPS58133370A (ja) 1982-02-01 1982-02-01 物理蒸着における被処理物の放電処理方法

Country Status (1)

Country Link
JP (1) JPS58133370A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62243783A (ja) * 1986-04-16 1987-10-24 Hitachi Ltd 真空処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123376B2 (enrdf_load_stackoverflow) * 1972-10-17 1976-07-16
JPS50104188A (enrdf_load_stackoverflow) * 1974-01-24 1975-08-16

Also Published As

Publication number Publication date
JPS58133370A (ja) 1983-08-09

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