JPH021861Y2 - - Google Patents
Info
- Publication number
- JPH021861Y2 JPH021861Y2 JP13722286U JP13722286U JPH021861Y2 JP H021861 Y2 JPH021861 Y2 JP H021861Y2 JP 13722286 U JP13722286 U JP 13722286U JP 13722286 U JP13722286 U JP 13722286U JP H021861 Y2 JPH021861 Y2 JP H021861Y2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- wafer
- susceptor
- push
- connecting portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 43
- 230000000694 effects Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13722286U JPH021861Y2 (enrdf_load_stackoverflow) | 1986-09-05 | 1986-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13722286U JPH021861Y2 (enrdf_load_stackoverflow) | 1986-09-05 | 1986-09-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6344444U JPS6344444U (enrdf_load_stackoverflow) | 1988-03-25 |
| JPH021861Y2 true JPH021861Y2 (enrdf_load_stackoverflow) | 1990-01-17 |
Family
ID=31041076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13722286U Expired JPH021861Y2 (enrdf_load_stackoverflow) | 1986-09-05 | 1986-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH021861Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-09-05 JP JP13722286U patent/JPH021861Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6344444U (enrdf_load_stackoverflow) | 1988-03-25 |
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