JPH0217932B2 - - Google Patents

Info

Publication number
JPH0217932B2
JPH0217932B2 JP59165229A JP16522984A JPH0217932B2 JP H0217932 B2 JPH0217932 B2 JP H0217932B2 JP 59165229 A JP59165229 A JP 59165229A JP 16522984 A JP16522984 A JP 16522984A JP H0217932 B2 JPH0217932 B2 JP H0217932B2
Authority
JP
Japan
Prior art keywords
layer
gate
metal
gaas
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59165229A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6142966A (ja
Inventor
Koji Tomita
Mitsunori Yoshikawa
Yasuhito Nakagawa
Tatsuya Yamashita
Junko Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP59165229A priority Critical patent/JPS6142966A/ja
Publication of JPS6142966A publication Critical patent/JPS6142966A/ja
Publication of JPH0217932B2 publication Critical patent/JPH0217932B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP59165229A 1984-08-07 1984-08-07 半導体装置の製造方法 Granted JPS6142966A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59165229A JPS6142966A (ja) 1984-08-07 1984-08-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59165229A JPS6142966A (ja) 1984-08-07 1984-08-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6142966A JPS6142966A (ja) 1986-03-01
JPH0217932B2 true JPH0217932B2 (cs) 1990-04-24

Family

ID=15808309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59165229A Granted JPS6142966A (ja) 1984-08-07 1984-08-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6142966A (cs)

Also Published As

Publication number Publication date
JPS6142966A (ja) 1986-03-01

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