JPH02168633A - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPH02168633A
JPH02168633A JP29128289A JP29128289A JPH02168633A JP H02168633 A JPH02168633 A JP H02168633A JP 29128289 A JP29128289 A JP 29128289A JP 29128289 A JP29128289 A JP 29128289A JP H02168633 A JPH02168633 A JP H02168633A
Authority
JP
Japan
Prior art keywords
lead frame
chute
section
distribution
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29128289A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0368533B2 (enrdf_load_stackoverflow
Inventor
Osamu Sumiya
修 角谷
Tsutomu Mimata
巳亦　力
Takeshi Shimizu
猛 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP29128289A priority Critical patent/JPH02168633A/ja
Publication of JPH02168633A publication Critical patent/JPH02168633A/ja
Publication of JPH0368533B2 publication Critical patent/JPH0368533B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)
JP29128289A 1989-11-10 1989-11-10 半導体製造装置 Granted JPH02168633A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29128289A JPH02168633A (ja) 1989-11-10 1989-11-10 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29128289A JPH02168633A (ja) 1989-11-10 1989-11-10 半導体製造装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56112144A Division JPS5815240A (ja) 1981-07-20 1981-07-20 半導体製造装置

Publications (2)

Publication Number Publication Date
JPH02168633A true JPH02168633A (ja) 1990-06-28
JPH0368533B2 JPH0368533B2 (enrdf_load_stackoverflow) 1991-10-28

Family

ID=17766862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29128289A Granted JPH02168633A (ja) 1989-11-10 1989-11-10 半導体製造装置

Country Status (1)

Country Link
JP (1) JPH02168633A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0368533B2 (enrdf_load_stackoverflow) 1991-10-28

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