JPH02153409A - マスフローコントローラーの流量調整機構 - Google Patents

マスフローコントローラーの流量調整機構

Info

Publication number
JPH02153409A
JPH02153409A JP25876089A JP25876089A JPH02153409A JP H02153409 A JPH02153409 A JP H02153409A JP 25876089 A JP25876089 A JP 25876089A JP 25876089 A JP25876089 A JP 25876089A JP H02153409 A JPH02153409 A JP H02153409A
Authority
JP
Japan
Prior art keywords
flow rate
flow
thin plates
flow path
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25876089A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0531164B2 (enExample
Inventor
Kazuo Ozawa
小沢　和雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON TAIRAN KK
Original Assignee
NIPPON TAIRAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON TAIRAN KK filed Critical NIPPON TAIRAN KK
Priority to JP25876089A priority Critical patent/JPH02153409A/ja
Publication of JPH02153409A publication Critical patent/JPH02153409A/ja
Publication of JPH0531164B2 publication Critical patent/JPH0531164B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Flow Control (AREA)
JP25876089A 1989-10-05 1989-10-05 マスフローコントローラーの流量調整機構 Granted JPH02153409A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25876089A JPH02153409A (ja) 1989-10-05 1989-10-05 マスフローコントローラーの流量調整機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25876089A JPH02153409A (ja) 1989-10-05 1989-10-05 マスフローコントローラーの流量調整機構

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP23763684A Division JPS61116195A (ja) 1984-11-13 1984-11-13 流量調整機構

Publications (2)

Publication Number Publication Date
JPH02153409A true JPH02153409A (ja) 1990-06-13
JPH0531164B2 JPH0531164B2 (enExample) 1993-05-11

Family

ID=17324708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25876089A Granted JPH02153409A (ja) 1989-10-05 1989-10-05 マスフローコントローラーの流量調整機構

Country Status (1)

Country Link
JP (1) JPH02153409A (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4412547Y1 (enExample) * 1964-04-24 1969-05-24
JPS53140637A (en) * 1977-05-13 1978-12-07 Cosmo Instr Co Ltd Valve
JPS5597569A (en) * 1979-01-18 1980-07-24 Nec Corp Fluid throttle valve

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4412547Y1 (enExample) * 1964-04-24 1969-05-24
JPS53140637A (en) * 1977-05-13 1978-12-07 Cosmo Instr Co Ltd Valve
JPS5597569A (en) * 1979-01-18 1980-07-24 Nec Corp Fluid throttle valve

Also Published As

Publication number Publication date
JPH0531164B2 (enExample) 1993-05-11

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