JPH0531164B2 - - Google Patents

Info

Publication number
JPH0531164B2
JPH0531164B2 JP1258760A JP25876089A JPH0531164B2 JP H0531164 B2 JPH0531164 B2 JP H0531164B2 JP 1258760 A JP1258760 A JP 1258760A JP 25876089 A JP25876089 A JP 25876089A JP H0531164 B2 JPH0531164 B2 JP H0531164B2
Authority
JP
Japan
Prior art keywords
flow rate
flow path
flow
rate adjustment
radial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1258760A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02153409A (ja
Inventor
Kazuo Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON TYLAN KK
Original Assignee
NIPPON TYLAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON TYLAN KK filed Critical NIPPON TYLAN KK
Priority to JP25876089A priority Critical patent/JPH02153409A/ja
Publication of JPH02153409A publication Critical patent/JPH02153409A/ja
Publication of JPH0531164B2 publication Critical patent/JPH0531164B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Flow Control (AREA)
JP25876089A 1989-10-05 1989-10-05 マスフローコントローラーの流量調整機構 Granted JPH02153409A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25876089A JPH02153409A (ja) 1989-10-05 1989-10-05 マスフローコントローラーの流量調整機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25876089A JPH02153409A (ja) 1989-10-05 1989-10-05 マスフローコントローラーの流量調整機構

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP23763684A Division JPS61116195A (ja) 1984-11-13 1984-11-13 流量調整機構

Publications (2)

Publication Number Publication Date
JPH02153409A JPH02153409A (ja) 1990-06-13
JPH0531164B2 true JPH0531164B2 (enExample) 1993-05-11

Family

ID=17324708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25876089A Granted JPH02153409A (ja) 1989-10-05 1989-10-05 マスフローコントローラーの流量調整機構

Country Status (1)

Country Link
JP (1) JPH02153409A (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4412547Y1 (enExample) * 1964-04-24 1969-05-24
JPS53140637A (en) * 1977-05-13 1978-12-07 Cosmo Instr Co Ltd Valve
JPS5597569A (en) * 1979-01-18 1980-07-24 Nec Corp Fluid throttle valve

Also Published As

Publication number Publication date
JPH02153409A (ja) 1990-06-13

Similar Documents

Publication Publication Date Title
EP0428364A1 (en) Flowmeter
CN100334515C (zh) 流量控制器
US4524616A (en) Adjustable laminar flow bypass
US4436111A (en) Hydraulic fuse valve
US20090095068A1 (en) System for and method of providing a wide-range flow controller
JPH0618306A (ja) 流量計およびそのフロースプリッタ装置
US4377090A (en) Through-flow monitor for liquid or gaseous media
CN109891353A (zh) 用于流量测量的可变限制
CN205190915U (zh) 流体调节装置及用于感测其出口压力的传感管
JPH09196221A (ja) 比例可変力ソレノイド制御弁
US4306585A (en) Constant flow valve
US5303738A (en) Control valve
JPH0742869A (ja) バルブ装置
US20080271794A1 (en) Automated mechanical constant flow valve for air ducts
JPH0531164B2 (enExample)
EP0974815A1 (de) Clamp-On-Ultraschall-Durchflussaufnehmer-Vorrichtung
JP3026026B2 (ja) 定流量弁
US6755210B2 (en) Mass flow controller
JPS60119292A (ja) スライスリツプ調整装置
JPS61116195A (ja) 流量調整機構
Welanetz A suction device using air under pressure
US3373772A (en) Fluid system and a restrictor therefor
JPH0418176B2 (enExample)
JPS6323071A (ja) 流体制御装置
JPH0317226Y2 (enExample)