JPH02150822A - Matrix device - Google Patents

Abstract

PURPOSE:To prevent a line defect from occurring by employing double structure for signal transmission paths of 1st and 2nd wires in the device having a matrix operation part where the 1st wire group and 2nd wire group cross each other. CONSTITUTION:The double structure consists of a 3rd wire group 4 and a 4th wire group 9 provided with the 1st wire group 1 and 2nd wire group 2 across insulation films 7 respectively. Therefore, a signal can be transmitted from the 3rd and 4th wires 4 and 9 if a 1st wire 1 is broken or the 4th wire 9 if the 2nd wire is broken. Consequently, the occurrence of a line defect can be suppressed.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a matrix device that can be suitably used for IJ Fuchs dynamic liquid crystal display devices, etc., and particularly relates to a matrix device that can be suitably used for IJ Fuchs dynamic liquid crystal display devices, etc. The present invention relates to means for relieving disconnection defects in a matrix type device having matrix operating portions arranged in a manner that crosses each other.

BACKGROUND OF THE INVENTION FIG. 4 shows the relationship of wiring in a conventionally developed liquid crystal display device. The area surrounded by broken lines A1, B1, CX, and D is the liquid crystal panel unit that drives the liquid crystal, and lines E, F,
The area surrounded by G and H is a matrix operation section (hereinafter referred to as TFT: thin film transistor) in which liquid crystal is sealed and image display is performed. In a TFT, a first group of multiple wires that transmit scanning signals and a second group of multiple wires that transmit display signals cross each other via an insulating film.
They are arranged in a Y matrix. Said first wiring 1
Switching elements are arranged corresponding to the intersections of the second group of wires and the second group of wires, and these wire groups are connected to a drive circuit 3 provided at the periphery of the liquid crystal panel unit section.

A third wiring 14 for rescue is provided around the TPT. What is a rescue wiring? In the TPT forming process, if a pixel electrode becomes defective due to dust, for example, the scanning signal sequentially transmitted from the first wiring 1 will not be transmitted beyond the defective point, so a line defect will appear in the image. will be displayed as . Therefore, by connecting the third wiring 14 and the broken first wiring 1-a or 1-b by wire bonding 15, a detour for the signal is created (to transmit the display signal even after the defective point). It is for image restoration.

Problems to be Solved by the Invention The first and second wires 1.2 each have several hundred wires, and in order to obtain high image quality, these wires must be formed in a small area. Therefore, even if extreme care is taken in the microfabrication process, defects due to dust etc. cannot be eliminated and are displayed as point defects or line defects on the image. A line defect is a fatal defect, and therefore it is necessary to provide a larger number of third wiring lines 14 that serve as signal detours. Further, when forming a large matrix/socket device of several tens of inches with a larger number of wiring lines, even more rescue measures are required.

In addition, in such conventional methods, a liquid crystal display panel is temporarily mounted or tested, and after addressing the defective location, the panel is taken out and the corresponding wiring is connected to the third
This was carried out after the process of connecting to the wiring 14 and wire bonding 15, and then mounting. This required many man-hours in the repair process, and also caused other defects such as destruction due to static electricity when the panels were attached and detached.

Means for Solving the Problems In order to solve these problems, the present invention provides a third wiring in which each of the first wiring group and the second wiring group is provided through an insulating film when forming a TPT. It has a double structure consisting of a group of wires and a fourth group of wires.

Effect of the Invention In the present invention, the signal transmission paths of the first and second wirings each have a double structure by the above-mentioned means, so that generation of line defects can be suppressed and manufacturing yield can be improved.

Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 to 3. FIGS. 1(a), 1(b), and 1(c) are a plan view and a cross-sectional view in the X direction and the X direction of the rescue wiring formed three-dimensionally in the X direction and the X direction with an insulating film interposed therebetween.

By providing a contact window at the tip of each wiring, it is possible to scan the TPT and connect it to the display signal line to be formed later. FIGS. 2 and 3 show these rescue and TPT forming steps.

First, the cross-sectional structure of the rescue wiring in the X direction will be explained step by step with reference to FIG. First, the third wiring 4 is placed on the substrate θ.
is formed and covered with the first layer of the absolute R film 7 (FIG. 2(a)).

Next, a contact window 8 is provided at the end of the third wiring by etching or the like (FIG. 2(b)). Next, a fourth wiring 9 is formed and further covered with a second layer of insulating film 7 ((C) in FIG. 2).

When forming the first wiring group 1 in the subsequent TPT forming process, they are individually connected to the third wiring group ((d) in FIG. 2).

Next, the cross-sectional structure of the rescue wiring and TFT in the X direction will be explained step by step with reference to FIG. First, a third wiring 4 is formed on the substrate θ and covered with a first layer insulating film 7 ((a') in FIG. 3). Next, a contact portion 8 is provided at the end of the third wiring 4 by etching or the like, but no change is observed in the cross-sectional structure in the X direction ((b') in FIG. 3). Next, the fourth
wiring 9 is formed and then covered with a second layer of insulating film 7 (third layer).
(C") in the figure). Next, the first wiring is formed and covered with a third layer of insulating film ((d') in Figure 3).
')). Next, the second and third layers of the insulating film 7 are etched by, for example, dry etching to form a contact window 8 at the end of the fourth wiring ((f' in FIG. 3).
)-f). When forming the second group of 12 arrangements in the subsequent TPT forming process, they are individually connected to the fourth wiring ((g' in FIG. 3)).

In this way, the first wiring 1 is connected to the third wiring 4, and the second wiring 2 is connected to the fourth wiring 9, so that each signal transmission path has a double structure. In the TPT forming step, after forming the second group of wirings at the time described above, a switching element is formed via an insulating film, and a counter substrate is mounted via a liquid crystal to manufacture a liquid crystal display device. As the switching element, a thin film transistor using amorphous silicon as a semiconductor layer is used.

Next, another example will be described. After forming the third and fourth wirings 4.9 and covering them with the insulating film 7 in the same manner as in the above embodiment, T
Although the PT is formed, the third wiring 1.4 and the second and fourth wirings 2.9 are not connected to the rear cylinder 1 after the contact window 8 is formed in the insulating film 7. Therefore, the third and fourth wiring 4.9
is used for rescue like the conventional third wiring.

That is, the line defect portion that occurs during image evaluation after being mounted as a liquid crystal display device is connected to the corresponding contact window of the third or fourth wiring.

When forming the 3.4 wiring, if it is designed to be narrower than the 1.2 wiring in consideration of alignment accuracy, it will not affect the area of each pixel aperture and therefore there will be no practical problem.

Effects of the Invention According to the present invention, instead of arranging the third wiring two-dimensionally as in the conventional method, the third and fourth wirings are provided three-dimensionally. Since the occupied area becomes unnecessary, the size of the liquid crystal display device can be reduced. Furthermore, if the first and second wiring groups and the third and fourth wiring groups are connected to each other when completed using a TPT substrate, both the first and third wirings transmit scanning signals. Both the second and fourth wirings serve as wirings for transmitting display signals. Therefore, even if the first wiring is disconnected, signals can be transmitted from the third and fourth wirings, and even if the second wiring is disconnected, signals can be transmitted from the fourth wiring, so line defects can be transmitted. The occurrence can be suppressed. Further, since it is possible to provide a large number of third and fourth wiring lines that serve as detours for signals, it is possible to manufacture large matrix devices of several tens of inches with a larger number of wiring lines. Furthermore, the process of repairing line defects is omitted, and defects such as electrostatic damage can be suppressed.

If the first and second wiring groups are not connected to the third and fourth wiring groups, connections can also be made between the third and fourth wirings, which was previously treated as a defective product. A liquid crystal display device with multiple line defects can also be made into a good product.
Product yield can be improved.

[Brief explanation of the drawing]

FIGS. 1(A), (B), and (C) are a plan view and a cross-sectional view in the X direction and the X direction of the three-dimensional rescue formation of a liquid crystal display device in an embodiment of the present invention, and FIG. 2 is the same embodiment. Figure 3 is a process diagram showing the cross-sectional structure in the X direction of the same example.
FIG. 4 is a plan view of secondary rescue formation of a liquid crystal display device in a conventional example. ■...First wiring for transmitting scanning signals, 2...
Second wiring for transmitting display signals, 3...drive circuit 4
....Third wiring for rescue, 5..Bonding wire, 6..Substrate, 7..Pa insulating film, 8..
... Contact window, 9... Fourth wiring for rescue. Name of agent: Patent attorney Shigetaka Kurino (1 figure) Indication of 1988 Patent Application No. 30491 Name of the invention Matrix device Agent for the person making the amendment 571 [Contact number (Tokyo) 437-Plate +215 Date of amendment order Tokyo Patent Office] 7. Contents of amendment (1) We will correct everything from page 6, line 11 to page 7, line 6 of the specification as follows (no change in content). [Next, the cross-sectional configuration of the rescue wiring and TPT in the Y direction This will be explained with reference to FIG. 3. First, the third wiring 4 is formed on the substrate 6, and then the first layer of insulating film 7 is formed.
((a) in Figure 3). Next, a contact portion 8 is provided at the end of the third wiring 4 by etching or the like.
There is no change in the cross-sectional structure in the direction ((b) in Figure 3).
. Next, a fourth wiring 9 is formed and a second insulating film 7 is formed.
((C) in Figure 3). Next, the first wiring is formed (Fig. 3(d)).
It is covered with a second insulating film ((e) in FIG. 3). Next, the above 2
．． The third layer insulating film 7 is etched, for example, by dry etching to provide a touch window 8 at the end of the fourth wiring ((f)-f in FIG. 3). Later TP
When forming the second two groups of wirings in the T formation process, they are individually connected to the fourth wirings ((g) in FIG. 3). (2) Figure 3 of the drawing will be corrected as shown in the attached sheet. Figure Y1 Bird Figure Y Leftward

Claims (4)

[Claims] (1) In a device having a matrix operation section in which a plurality of first wiring groups and a plurality of second wiring groups cross each other, each of the first wiring group and the second wiring group A matrix device characterized in that it has a double structure with a third wiring group and a fourth wiring group provided through an insulating film. (2) The first wiring group and the second wiring group are connected to the third wiring group in advance.
2. The matrix device according to claim 1, wherein the matrix device is connected to the fourth wiring group to enable signal detour. (3) A first wiring group for transmitting scanning signals and a second wiring group for transmitting display signals are arranged in an XY matrix, and correspond to the intersections of the first wiring group and the second wiring group. A liquid crystal using a matrix device according to claim 1 or 2, characterized in that the liquid crystal is sandwiched between a first substrate on which a switching element is disposed and a second substrate opposing the first substrate. Display device. (4) The liquid crystal display device according to claim 3, wherein the switching element is a thin film transistor using amorphous silicon as a semiconductor layer.