JPH0214808B2 - - Google Patents
Info
- Publication number
- JPH0214808B2 JPH0214808B2 JP54014390A JP1439079A JPH0214808B2 JP H0214808 B2 JPH0214808 B2 JP H0214808B2 JP 54014390 A JP54014390 A JP 54014390A JP 1439079 A JP1439079 A JP 1439079A JP H0214808 B2 JPH0214808 B2 JP H0214808B2
- Authority
- JP
- Japan
- Prior art keywords
- resonator
- resonant frequency
- frequency
- laser
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 63
- 238000012545 processing Methods 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 20
- 238000003754 machining Methods 0.000 claims description 13
- 239000007772 electrode material Substances 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 230000002829 reductive effect Effects 0.000 claims description 6
- 230000003247 decreasing effect Effects 0.000 claims description 5
- 238000013459 approach Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 description 17
- 230000005284 excitation Effects 0.000 description 14
- 230000008859 change Effects 0.000 description 12
- 230000008569 process Effects 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000004020 conductor Substances 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000013532 laser treatment Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- PSNPEOOEWZZFPJ-UHFFFAOYSA-N alumane;yttrium Chemical compound [AlH3].[Y] PSNPEOOEWZZFPJ-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000368 destabilizing effect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B17/00—Methods preventing fouling
- B08B17/02—Preventing deposition of fouling or of dust
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49004—Electrical device making including measuring or testing of device or component part
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/877,541 US4131484A (en) | 1978-02-13 | 1978-02-13 | Frequency adjusting a piezoelectric device by lasering |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54129898A JPS54129898A (en) | 1979-10-08 |
JPH0214808B2 true JPH0214808B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-04-10 |
Family
ID=25370192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1439079A Granted JPS54129898A (en) | 1978-02-13 | 1979-02-13 | Method of adjusting resonant frequency of piezooelectric element |
Country Status (6)
Families Citing this family (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4327277A (en) * | 1978-08-24 | 1982-04-27 | Raytheon Company | Method for laser soldering |
CH630747A5 (fr) * | 1979-01-18 | 1982-06-30 | Ebauches Sa | Procede d'ajustement de la frequence d'un resonateur et resonateur a frequence ajustee obtenu par la mise en oeuvre de ce procede. |
US4259563A (en) * | 1979-03-19 | 1981-03-31 | Litton Resources Systems, Inc. | Method for dynamically tuning a seismic transducer |
US4288530A (en) * | 1979-10-15 | 1981-09-08 | Motorola, Inc. | Method of tuning apparatus by low power laser beam removal |
JPS5669912A (en) * | 1979-10-23 | 1981-06-11 | Fujitsu Ltd | Automatic adjusting method for frequency of mechanical resonator |
JPS57175089A (en) * | 1981-04-20 | 1982-10-27 | Inoue Japax Res Inc | Beam working device |
EP0091947A1 (en) * | 1981-10-22 | 1983-10-26 | First Of Chelsea Corporation | Laser removal of materials from surfaces |
US4468582A (en) * | 1982-04-20 | 1984-08-28 | Fujitsu Limited | Piezoelectric resonator chip and trimming method for adjusting the frequency thereof |
WO1984000081A1 (en) * | 1982-06-14 | 1984-01-05 | Gte Prod Corp | Apparatus for trimming of piezoelectric components |
EP0111483A4 (en) * | 1982-06-14 | 1985-12-19 | Gte Prod Corp | TRIMING PIEZOELECTRIC COMPONENTS. |
US4442574A (en) * | 1982-07-26 | 1984-04-17 | General Electric Company | Frequency trimming of saw resonators |
US4532402A (en) * | 1983-09-02 | 1985-07-30 | Xrl, Inc. | Method and apparatus for positioning a focused beam on an integrated circuit |
FR2557732B1 (fr) * | 1983-12-28 | 1986-04-11 | Lefevre Rene | Procede de realisation de dispositifs piezoelectriques miniatures utilisant un usinage par laser et dispositifs obtenus par ce procede |
US4642505A (en) * | 1984-03-05 | 1987-02-10 | Motorola, Inc. | Laser trimming monolithic crystal filters to frequency |
US4562740A (en) * | 1984-04-20 | 1986-01-07 | United Technologies Automotive, Inc. | Vibration sensor and the method of and apparatus for manufacture thereof |
US4678891A (en) * | 1984-10-18 | 1987-07-07 | American Telephone And Telegraph Company, At&T Technologies | Method for adjusting an electrical device by electrode trimming |
US4833430A (en) * | 1984-11-29 | 1989-05-23 | General Electric Company | Coupled-dual resonator crystal |
FR2592246A1 (fr) * | 1985-12-24 | 1987-06-26 | Electronique Piezo Electr Cie | Procede et banc de mise a la frequence d'un resonateur monolithqiue couple. |
GB2203590B (en) * | 1987-04-02 | 1991-02-06 | Stc Plc | Resonator manufacture |
US4839618A (en) * | 1987-05-26 | 1989-06-13 | General Electric Company | Monolithic crystal filter with wide bandwidth and method of making same |
US4914270A (en) * | 1988-11-08 | 1990-04-03 | University Of Southern California | Method and apparatus for shaping articles using a laser beam |
US5016255A (en) * | 1989-08-07 | 1991-05-14 | Omnipoint Data Company, Incorporated | Asymmetric spread spectrum correlator |
US5499265A (en) * | 1989-08-07 | 1996-03-12 | Omnipoint Data Company, Incorporated | Spread spectrum correlator |
US5022047A (en) * | 1989-08-07 | 1991-06-04 | Omnipoint Data Corporation | Spread spectrum correlator |
JPH05509213A (ja) * | 1990-07-23 | 1993-12-16 | オムニポイント・コーポレイション | Sawc位相検出方法及び装置 |
US5081642A (en) * | 1990-08-06 | 1992-01-14 | Omnipoint Data Company, Incorporated | Reciprocal saw correlator method and apparatus |
WO1992007434A1 (en) | 1990-10-23 | 1992-04-30 | Omnipoint Corporation | Method and apparatus for establishing spread spectrum communications |
US5402413A (en) * | 1991-04-08 | 1995-03-28 | Omnipoint Corporation | Three-cell wireless communication system |
CA2102914A1 (en) * | 1991-05-13 | 1992-11-26 | Robert C. Dixon | Dual mode transmitter and receiver |
US5285469A (en) | 1991-06-03 | 1994-02-08 | Omnipoint Data Corporation | Spread spectrum wireless telephone system |
US6008791A (en) * | 1991-08-01 | 1999-12-28 | Hitachi, Ltd. | Automatic adjusting apparatus of multiscan display |
DE69232442T2 (de) * | 1991-12-16 | 2002-08-22 | Xircom Wireless Inc | Spreizspektrum-datenveröffentlichungssystem |
US5355389A (en) * | 1993-01-13 | 1994-10-11 | Omnipoint Corporation | Reciprocal mode saw correlator method and apparatus |
JP3239542B2 (ja) * | 1993-06-21 | 2001-12-17 | 株式会社村田製作所 | 振動ジャイロの調整装置 |
US5436941A (en) * | 1993-11-01 | 1995-07-25 | Omnipoint Corporation | Spread spectrum spectral density techniques |
US5784403A (en) * | 1995-02-03 | 1998-07-21 | Omnipoint Corporation | Spread spectrum correlation using saw device |
US6114795A (en) | 1997-06-24 | 2000-09-05 | Tdk Corporation | Piezoelectric component and manufacturing method thereof |
JP4326151B2 (ja) | 1998-05-08 | 2009-09-02 | アバゴ・テクノロジーズ・ワイヤレス・アイピー(シンガポール)プライベート・リミテッド | 薄膜圧電振動子 |
US6337465B1 (en) | 1999-03-09 | 2002-01-08 | Mide Technology Corp. | Laser machining of electroactive ceramics |
RU2168849C2 (ru) * | 1999-06-29 | 2001-06-10 | Омский научно-исследовательский институт приборостроения | Способ настройки на центральную частоту узкополосного прибора на поверхностных акустических волнах |
US6662439B1 (en) | 1999-10-04 | 2003-12-16 | Roche Diagnostics Corporation | Laser defined features for patterned laminates and electrodes |
US7073246B2 (en) * | 1999-10-04 | 2006-07-11 | Roche Diagnostics Operations, Inc. | Method of making a biosensor |
US6645359B1 (en) * | 2000-10-06 | 2003-11-11 | Roche Diagnostics Corporation | Biosensor |
US6540890B1 (en) * | 2000-11-01 | 2003-04-01 | Roche Diagnostics Corporation | Biosensor |
US20020074897A1 (en) * | 2000-12-15 | 2002-06-20 | Qing Ma | Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition |
US6814844B2 (en) | 2001-08-29 | 2004-11-09 | Roche Diagnostics Corporation | Biosensor with code pattern |
US6864457B1 (en) * | 2002-02-25 | 2005-03-08 | The Board Of Regents Of The University Of Nebraska | Laser machining of materials |
US20050109747A1 (en) * | 2002-02-25 | 2005-05-26 | Alexander Dennis R. | Laser scribing and machining of materials |
US6866758B2 (en) * | 2002-03-21 | 2005-03-15 | Roche Diagnostics Corporation | Biosensor |
WO2004113917A2 (en) | 2003-06-20 | 2004-12-29 | Roche Diagnostics Gmbh | Method and reagent for producing narrow, homogenous reagent strips |
US20130155535A1 (en) * | 2010-08-16 | 2013-06-20 | Ronald O. Woodward | Integrated solar concentrator system |
CN105745059B (zh) * | 2013-11-27 | 2017-09-15 | 豪夫迈·罗氏有限公司 | 用于对一次性测试单元进行激光焊接的方法 |
JP2016144092A (ja) * | 2015-02-03 | 2016-08-08 | セイコーエプソン株式会社 | 振動子の製造方法 |
US20160225978A1 (en) * | 2015-02-03 | 2016-08-04 | Seiko Epson Corporation | Method of manufacturing vibration device |
CN107175239B (zh) * | 2017-05-25 | 2019-05-10 | 张家港清研再制造产业研究院有限公司 | 一种汽车起动机转子激光清洗装置及方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2411298A (en) * | 1945-02-12 | 1946-11-19 | Philips Corp | Piezoelectric crystal |
US3653253A (en) * | 1970-01-05 | 1972-04-04 | Thermo Systems Inc | Aerosol mass concentration spectrometer |
US3808752A (en) * | 1972-07-10 | 1974-05-07 | Comtec Economation | Method of automatically adjusting the frequency of crystal resonators |
US3928063A (en) * | 1974-06-05 | 1975-12-23 | Exxon Research Engineering Co | Method for cleaning a crystal microbalance |
-
1978
- 1978-02-13 US US05/877,541 patent/US4131484A/en not_active Expired - Lifetime
-
1979
- 1979-02-06 CA CA000320941A patent/CA1120544A/en not_active Expired
- 1979-02-10 DE DE19792905132 patent/DE2905132A1/de active Granted
- 1979-02-12 GB GB7904906A patent/GB2016207B/en not_active Expired
- 1979-02-12 FR FR7903473A patent/FR2417214A1/fr active Granted
- 1979-02-13 JP JP1439079A patent/JPS54129898A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2417214A1 (fr) | 1979-09-07 |
US4131484A (en) | 1978-12-26 |
FR2417214B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-07-23 |
GB2016207A (en) | 1979-09-19 |
DE2905132C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-04-21 |
JPS54129898A (en) | 1979-10-08 |
DE2905132A1 (de) | 1979-08-16 |
CA1120544A (en) | 1982-03-23 |
GB2016207B (en) | 1982-04-21 |
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