JPH02146828U - - Google Patents
Info
- Publication number
- JPH02146828U JPH02146828U JP5355989U JP5355989U JPH02146828U JP H02146828 U JPH02146828 U JP H02146828U JP 5355989 U JP5355989 U JP 5355989U JP 5355989 U JP5355989 U JP 5355989U JP H02146828 U JPH02146828 U JP H02146828U
- Authority
- JP
- Japan
- Prior art keywords
- moving table
- semiconductor devices
- exposure apparatus
- manufacturing semiconductor
- projection exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5355989U JPH02146828U (OSRAM) | 1989-05-10 | 1989-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5355989U JPH02146828U (OSRAM) | 1989-05-10 | 1989-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146828U true JPH02146828U (OSRAM) | 1990-12-13 |
Family
ID=31574850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5355989U Pending JPH02146828U (OSRAM) | 1989-05-10 | 1989-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146828U (OSRAM) |
-
1989
- 1989-05-10 JP JP5355989U patent/JPH02146828U/ja active Pending
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