JPH02146164U - - Google Patents
Info
- Publication number
- JPH02146164U JPH02146164U JP5382589U JP5382589U JPH02146164U JP H02146164 U JPH02146164 U JP H02146164U JP 5382589 U JP5382589 U JP 5382589U JP 5382589 U JP5382589 U JP 5382589U JP H02146164 U JPH02146164 U JP H02146164U
- Authority
- JP
- Japan
- Prior art keywords
- seed crystal
- dopant
- crystal
- sectional
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 11
- 239000002019 doping agent Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5382589U JPH02146164U (enrdf_load_stackoverflow) | 1989-05-10 | 1989-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5382589U JPH02146164U (enrdf_load_stackoverflow) | 1989-05-10 | 1989-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146164U true JPH02146164U (enrdf_load_stackoverflow) | 1990-12-12 |
Family
ID=31575344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5382589U Pending JPH02146164U (enrdf_load_stackoverflow) | 1989-05-10 | 1989-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146164U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05201790A (ja) * | 1991-10-09 | 1993-08-10 | Shin Etsu Handotai Co Ltd | 種結晶を用いたドープ剤の添加方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5547450A (en) * | 1978-08-02 | 1980-04-03 | Inst Nat Sante Rech Med | Method and original reacting substance for analyzing immunizing enzyme |
| JPS59223295A (ja) * | 1983-05-27 | 1984-12-15 | Toshiba Corp | 化合物半導体製造方法 |
| JPS62153188A (ja) * | 1985-12-27 | 1987-07-08 | Mitsubishi Metal Corp | ド−ピングされた単結晶の製造方法 |
-
1989
- 1989-05-10 JP JP5382589U patent/JPH02146164U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5547450A (en) * | 1978-08-02 | 1980-04-03 | Inst Nat Sante Rech Med | Method and original reacting substance for analyzing immunizing enzyme |
| JPS59223295A (ja) * | 1983-05-27 | 1984-12-15 | Toshiba Corp | 化合物半導体製造方法 |
| JPS62153188A (ja) * | 1985-12-27 | 1987-07-08 | Mitsubishi Metal Corp | ド−ピングされた単結晶の製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05201790A (ja) * | 1991-10-09 | 1993-08-10 | Shin Etsu Handotai Co Ltd | 種結晶を用いたドープ剤の添加方法 |
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