JPH0214546A - 特にシリコンウェーハの水平転送装置 - Google Patents

特にシリコンウェーハの水平転送装置

Info

Publication number
JPH0214546A
JPH0214546A JP63324728A JP32472888A JPH0214546A JP H0214546 A JPH0214546 A JP H0214546A JP 63324728 A JP63324728 A JP 63324728A JP 32472888 A JP32472888 A JP 32472888A JP H0214546 A JPH0214546 A JP H0214546A
Authority
JP
Japan
Prior art keywords
transfer
rack
arm
wafer
finger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63324728A
Other languages
English (en)
Japanese (ja)
Inventor
Bernard Poli
ベルナール・ポリ
Gerard Chincholle
ジエラール・シヤンシヨル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Recif SA
Original Assignee
Recif SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Recif SA filed Critical Recif SA
Publication of JPH0214546A publication Critical patent/JPH0214546A/ja
Pending legal-status Critical Current

Links

Classifications

    • H10P72/3412—
    • H10P95/00—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Specific Conveyance Elements (AREA)
  • Load-Engaging Elements For Cranes (AREA)
JP63324728A 1987-12-22 1988-12-22 特にシリコンウェーハの水平転送装置 Pending JPH0214546A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8718454 1987-12-22
FR8718454A FR2624839B1 (fr) 1987-12-22 1987-12-22 Appareil pour le transfert horizontal de plaquettes de silicium notamment

Publications (1)

Publication Number Publication Date
JPH0214546A true JPH0214546A (ja) 1990-01-18

Family

ID=9358503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63324728A Pending JPH0214546A (ja) 1987-12-22 1988-12-22 特にシリコンウェーハの水平転送装置

Country Status (4)

Country Link
JP (1) JPH0214546A (member.php)
KR (1) KR890011020A (member.php)
DE (1) DE3843369A1 (member.php)
FR (1) FR2624839B1 (member.php)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH680317A5 (member.php) * 1990-03-05 1992-07-31 Tet Techno Investment Trust
DE4142671A1 (de) * 1991-12-21 1993-06-24 Wabco Westinghouse Fahrzeug Einrichtung zur messung einer verformung eines bauteils
JPH0662542U (ja) * 1993-01-29 1994-09-02 信越半導体株式会社 ウエーハカセット
US5590996A (en) * 1994-10-13 1997-01-07 Semitherm Wafer transfer apparatus
DE19535617A1 (de) * 1995-09-25 1997-03-27 Siemens Ag System zum Transport von Testboards
DE19845504A1 (de) * 1998-10-02 2000-04-20 Wacker Siltronic Halbleitermat Hordenaufnahmevorrichtung
FR3075771A1 (fr) * 2017-12-21 2019-06-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Systeme de transfert de plusieurs plaques entre deux paniers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4534695A (en) * 1983-05-23 1985-08-13 Eaton Corporation Wafer transport system
US4536122A (en) * 1983-08-22 1985-08-20 Trilogy Computer Development Partners, Ltd. Wafer transfer device
JPS636857A (ja) * 1986-06-26 1988-01-12 Fujitsu Ltd ウエ−ハ移し替え装置

Also Published As

Publication number Publication date
DE3843369A1 (de) 1989-08-24
DE3843369C2 (member.php) 1991-02-14
FR2624839B1 (fr) 1990-06-01
KR890011020A (ko) 1989-08-12
FR2624839A1 (fr) 1989-06-23

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