JPH02138420U - - Google Patents

Info

Publication number
JPH02138420U
JPH02138420U JP4758189U JP4758189U JPH02138420U JP H02138420 U JPH02138420 U JP H02138420U JP 4758189 U JP4758189 U JP 4758189U JP 4758189 U JP4758189 U JP 4758189U JP H02138420 U JPH02138420 U JP H02138420U
Authority
JP
Japan
Prior art keywords
transfer chamber
gate valve
vapor phase
phase growth
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4758189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4758189U priority Critical patent/JPH02138420U/ja
Publication of JPH02138420U publication Critical patent/JPH02138420U/ja
Pending legal-status Critical Current

Links

JP4758189U 1989-04-21 1989-04-21 Pending JPH02138420U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4758189U JPH02138420U (zh) 1989-04-21 1989-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4758189U JPH02138420U (zh) 1989-04-21 1989-04-21

Publications (1)

Publication Number Publication Date
JPH02138420U true JPH02138420U (zh) 1990-11-19

Family

ID=31563634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4758189U Pending JPH02138420U (zh) 1989-04-21 1989-04-21

Country Status (1)

Country Link
JP (1) JPH02138420U (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006216710A (ja) * 2005-02-02 2006-08-17 Hitachi High-Technologies Corp 半導体製造装置
JP2016535940A (ja) * 2013-09-30 2016-11-17 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 移送チャンバガスパージ装置、電子デバイス処理システム、及びパージ方法。

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6247118B2 (zh) * 1982-05-12 1987-10-06 Kobe Steel Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6247118B2 (zh) * 1982-05-12 1987-10-06 Kobe Steel Ltd

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006216710A (ja) * 2005-02-02 2006-08-17 Hitachi High-Technologies Corp 半導体製造装置
JP2016535940A (ja) * 2013-09-30 2016-11-17 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 移送チャンバガスパージ装置、電子デバイス処理システム、及びパージ方法。

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