JPS62182540U - - Google Patents
Info
- Publication number
- JPS62182540U JPS62182540U JP7053186U JP7053186U JPS62182540U JP S62182540 U JPS62182540 U JP S62182540U JP 7053186 U JP7053186 U JP 7053186U JP 7053186 U JP7053186 U JP 7053186U JP S62182540 U JPS62182540 U JP S62182540U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support plate
- film
- hole
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 8
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000007664 blowing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7053186U JPS62182540U (zh) | 1986-05-10 | 1986-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7053186U JPS62182540U (zh) | 1986-05-10 | 1986-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62182540U true JPS62182540U (zh) | 1987-11-19 |
Family
ID=30912254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7053186U Pending JPS62182540U (zh) | 1986-05-10 | 1986-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62182540U (zh) |
-
1986
- 1986-05-10 JP JP7053186U patent/JPS62182540U/ja active Pending