JPH02137741A - Mold for making optical glass element - Google Patents
Mold for making optical glass elementInfo
- Publication number
- JPH02137741A JPH02137741A JP28997988A JP28997988A JPH02137741A JP H02137741 A JPH02137741 A JP H02137741A JP 28997988 A JP28997988 A JP 28997988A JP 28997988 A JP28997988 A JP 28997988A JP H02137741 A JPH02137741 A JP H02137741A
- Authority
- JP
- Japan
- Prior art keywords
- mold
- film
- glass
- intermediate layer
- optical glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000005304 optical glass Substances 0.000 title claims abstract description 13
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 5
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 5
- 238000000465 moulding Methods 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 19
- 239000000956 alloy Substances 0.000 abstract description 8
- 229910045601 alloy Inorganic materials 0.000 abstract description 8
- 239000000843 powder Substances 0.000 abstract description 4
- 238000003825 pressing Methods 0.000 abstract description 4
- 239000011230 binding agent Substances 0.000 abstract description 2
- 230000003647 oxidation Effects 0.000 abstract description 2
- 238000007254 oxidation reaction Methods 0.000 abstract description 2
- 239000004503 fine granule Substances 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
- 238000007493 shaping process Methods 0.000 abstract 1
- 238000009736 wetting Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 6
- 230000003746 surface roughness Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000004927 fusion Effects 0.000 description 3
- 238000004554 molding of glass Methods 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000004709 eyebrow Anatomy 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
- C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/10—Die base materials
- C03B2215/12—Ceramics or cermets, e.g. cemented WC, Al2O3 or TiC
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
- C03B2215/22—Non-oxide ceramics
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
- C03B2215/32—Intermediate layers, e.g. graded zone of base/top material of metallic or silicon material
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、光学ガラス素子成形用金型に係シ、特に、機
械研磨工程を必要としないで、直接熱間プレス成形によ
シ、光学ガラス素子を成形するための成形用金型に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a mold for forming an optical glass element, and in particular, the present invention relates to a mold for forming an optical glass element. The present invention relates to a mold for molding a glass element.
近年、光学ガラスレンズとして、非球面レンズの要求が
高まっている。これは、非球面形状の採用によシ、光学
系が簡略化できるため、小形化。In recent years, there has been an increasing demand for aspheric lenses as optical glass lenses. This is due to the adoption of an aspherical shape, which simplifies the optical system, resulting in a smaller size.
軽量化、原価低減が可能となるためである。しかし、こ
の非球面レンズを、従来の研削、研磨技術で加工するこ
とは非常に難しく、量産が困難となっている。This is because weight reduction and cost reduction become possible. However, it is extremely difficult to process this aspherical lens using conventional grinding and polishing techniques, making mass production difficult.
そこで最近では、熱間プレス成形によって非球面ガラス
レンズを製造する方法も試みられている。Therefore, recently, a method of manufacturing an aspherical glass lens by hot press molding has been attempted.
熱間プレス成形は、所定の非球面形状に仕上げた型内に
ガラス素材を挿入し、素材を成形温度まで加熱した後、
加圧してプレス成形するというものである。In hot press molding, a glass material is inserted into a mold finished with a predetermined aspherical shape, and after heating the material to the molding temperature,
It is press-molded under pressure.
従って、プレス金型材料としては、高温での強度が大き
く、型の形状精度９面粗さが出しやすく、高温でガラス
と反応しないなどの特性が必要であるＯ
このような型として、特開昭６１−１９７４５０の公知
例に示されるＮ１基合金、Ｆｏ基合金、ＷＣ−Ｇ。Therefore, press mold materials must have properties such as high strength at high temperatures, easy mold shape accuracy and surface roughness, and non-reaction with glass at high temperatures. N1-based alloy, Fo-based alloy, and WC-G shown in the known examples of 197450/1983.
系合金のいずれかの金属材料に、ＡＩ！Ｎからなる被着
膜を形成した金型や、ＡＩ！ＮまたはＳｉ５ Ｎ４ を
主成分とするセラミック材料にＡＩ！Ｎからなる被着膜
を形成した金型がある。AI! to any metal material of the alloy system. Molds with a coating film made of N, AI! AI for ceramic materials whose main components are N or Si5 N4! There is a mold in which a deposited film made of N is formed.
しかし、上記の金属材料にＡＩ！Ｎ膜を形成した金型を
用いてガラスのプレス成形を行なうと、上記金属材料と
Ａ７Ｎ膜の密着力が弱いため、膜はがれが発生してしま
い、高精度なプレス成形品が得られないという問題があ
った。However, AI! When glass is press-molded using a mold with an N film formed on it, the adhesion between the metal material and the A7N film is weak, resulting in film peeling and making it impossible to obtain high-precision press-formed products. There was a problem.
本発明の目的は、ガラスをプレス成形する際、金型にガ
ラスが融着することなく、また、金型表面が劣化するこ
となく、高精度なプレス成形品を得ることができる光学
ガラス素子成形型を提供することにある〇
〔課題を解決するための手段〕
上記目的を達成するために、光学ガラス素子成形型とし
て炭化タングステンとコバルトを含んだ超硬合金表面に
、チタンま九はアルミニウムの中間層を設け、更に窒化
アルミニウムを成膜した。An object of the present invention is to form an optical glass element by which a high-precision press-molded product can be obtained without glass being fused to the mold or deteriorating the mold surface when glass is press-molded. [Means for solving the problem] In order to achieve the above object, titanium and aluminum are used as a mold for forming an optical glass element on a cemented carbide surface containing tungsten carbide and cobalt. An intermediate layer was provided, and aluminum nitride was further formed into a film.
一般に超硬合金は、ＷＣの細粒粉末にバインダーとして
ｃｏ粉末を加え焼結したものであり、その加工性は良好
で、プレス成形用金型として所定の非球面形状を得やす
い口
しかし、これを加熱していくと、約４００°Ｃ以上でＣ
ｏの粒子の酸化が開始し、表面から脱落しやすくなるた
め、ガラスのプレス成形によ）、金型の表面粗さが劣化
し、良好なプレス成形品が得られないという問題がある
。Generally, cemented carbide is made by adding CO powder as a binder to fine-grained WC powder and sintering it.It has good workability and can be used as a press mold to easily obtain a predetermined aspherical shape. As you heat it, it will reach C above about 400°C.
Since the particles of O start to oxidize and easily fall off the surface, there is a problem that the surface roughness of the mold deteriorates during press molding of glass, making it impossible to obtain a good press molded product.
これに対し、ＡＪＮ膜は、高温で酸化しにくく、ガラス
との濡れ性が非常に低い為、高温でガラスと接触しても
、ＡＪＮ膜表面が劣化することはなく、また、ガラスが
ＡＩ！Ｎ膜に融着する現象も生じにくい。On the other hand, the AJN film is difficult to oxidize at high temperatures and has very low wettability with glass, so even if it comes into contact with glass at high temperatures, the AJN film surface does not deteriorate, and the glass is AI! The phenomenon of fusion to the N film is also less likely to occur.
しかし、超硬合金表面に、ｋｌＮ膜を形成し、ガラスの
プレス成形を行なうと、超硬合金とＡＪＮ膜の密着力が
弱いため、ｋｌ！Ｎ膜の膜はがれが発生し良好なプレス
成形品が得られにくい。However, when a klN film is formed on the surface of a cemented carbide and glass is press-formed, the adhesion between the cemented carbide and the AJN film is weak. Peeling of the N film occurs, making it difficult to obtain a good press-formed product.
そこで、超硬合金表面に、Ｍまたは、Ｔ１の中間層を設
け、その後、ＡＪＮ膜を形成した。Therefore, an intermediate layer of M or T1 was provided on the surface of the cemented carbide, and then an AJN film was formed.
Ｍ及びｎは、超硬合金中のＧｏと合金を形成するため、
その密着力は大きく、境界面で非常にはがれにくい０ま
た、ＡＪとＡＩ！Ｎは、同じ元素の化合物であるので、
界面での密着力が犬きく、’ＰＬ、！＝ＡＪＮは、やは
シ、Ｔ１とＡＩ！が合金を形成するので、その密着力は
大きく、界面ではがれにくい。Since M and n form an alloy with Go in the cemented carbide,
Its adhesion is strong and it is very difficult to peel off at the interface.Also, AJ and AI! Since N is a compound of the same element,
The adhesion at the interface is amazing, 'PL! =AJN is T1 and AI! form an alloy, its adhesion is strong and it is difficult to peel off at the interface.
従って、超硬合金表面に、ＡＪまたはＴ１の中間層を形
成し、更にＡＩ！Ｎ膜を形成することによ）、眉間の密
着性が向上する。Therefore, an intermediate layer of AJ or T1 is formed on the cemented carbide surface, and further AI! By forming a N film), the adhesion between the eyebrows is improved.
コノ金型を用いて、ガラスのプレス成形を行なったとこ
ろ、ｋｌＮ膜のはがれが発生せず、また、ガラスが金型
に融着することもなく、良好な面性状を持つプレス成形
品が得られた。When glass was press-molded using the Kono mold, the klN film did not peel off, the glass did not fuse to the mold, and a press-molded product with good surface properties was obtained. It was done.
その際、Ｍの融点は６６０℃と低く、Ｔ１の融点は１８
００℃と非常に高いので、成形温度が６２０℃以下のガ
ラスのプレス成形には、Ｍ中間層の金型を用い、成形温
度が６２０℃よシ高いガラスのプレス成形には、Ｔ１中
間層の金型を用いた。At that time, the melting point of M is as low as 660°C, and the melting point of T1 is 18
00℃, so for press molding of glass with a molding temperature of 620℃ or less, a mold with an M intermediate layer is used, and for press molding of glass with a molding temperature higher than 620℃, a mold with a T1 intermediate layer is used. A mold was used.
以下、本発明の一実施例を第１図によシ説明するＯ
第１図は、本発明のカラスプレス用金型である０まず、
直径５０Ｂ、高さ４０ｍｍの円柱の超硬合金１のプレス
使用面を、曲率半径５０ｍｍで±１μｍの形状精度で凹
曲面に研削加工した。この後、ダイヤモンド砥粒で形状
精度を維持したまま研磨し、面粗さＲｍａｘα１μｍに
仕上げた０
この加工面に、中間層として、スパッタリング法により
約１μｍの厚さでＡＩ！の膜２を均一に成膜し、更に、
その上にＡ７Ｎ焼結体をターゲットとしてスパッタリン
グ法により約１μｍの厚さでＡＪＮ膜Ｓを均一に成膜し
た。その後ダイヤモンド砥粒を用いて、表面粗さα０１
μｍ以下に研磨して、プレス用金型を製作した〇
この後、５７ｗｔ％５１０２−２２ｗｔ％ＫＨＦ２−１
６ｗｔ％Ｂ２Ｏ５を主成分とする光学ガラスのφ２５ｘ
Ｒ３０ｘｔ７ｍｍの両凸形状素材を、上記により製作し
たプレス用金型の凹面間に載置し、窒素雰囲気中で約６
２０℃に加熱した後、約５０Ｋｇｆ／ａｍ２の荷１を約
１０秒間負荷してプレス成形を行なった。この時のプレ
ス成形品の形状精度１面粗さは、釜のそれらとほぼ同一
で、型表面の膜はがれ、型へのガラスの融着は生じてい
ない。その結果を第１表に示す。尚、比較の為、超硬合
金に祷膜を形成した型につい第１表
５７ｗｔ％Ｓｉｎ２−２２ｗｔ％ＫＨＦ２−１６ｗｔ％
Ｂ２０．ガラスプレス後の変化
ても、結果を合せて示す。Hereinafter, one embodiment of the present invention will be explained with reference to FIG. 1. FIG. 1 shows a crow press mold of the present invention.
The pressing surface of a cylindrical cemented carbide 1 with a diameter of 50 B and a height of 40 mm was ground into a concave curved surface with a radius of curvature of 50 mm and a shape accuracy of ±1 μm. After this, it was polished with diamond abrasive grains while maintaining the shape accuracy, and finished to a surface roughness Rmax α of 1 μm. On this processed surface, an intermediate layer of approximately 1 μm thickness was applied by sputtering with AI! A film 2 of is uniformly formed, and further,
An AJN film S having a thickness of about 1 μm was uniformly formed thereon by sputtering using the A7N sintered body as a target. After that, using diamond abrasive grains, the surface roughness is α01
Polished to below μm and produced a press mold 〇After this, 57wt%5102-22wt%KHF2-1
Optical glass φ25x whose main component is 6wt% B2O5
A double-convex material of R30xt7mm was placed between the concave surfaces of the press mold manufactured as described above, and was heated for about 6 hours in a nitrogen atmosphere.
After heating to 20° C., press molding was performed by applying a load 1 of about 50 kgf/am 2 for about 10 seconds. The shape accuracy and surface roughness of the press-formed product at this time were almost the same as those of the pot, and there was no peeling of the film on the mold surface and no fusion of glass to the mold. The results are shown in Table 1. For comparison, Table 1 shows 57wt%Sin2-22wt%KHF2-16wt% for a mold in which a protective film is formed on cemented carbide.
B20. The results are also shown for changes after glass pressing.
実施例２
実施例１と同様に、超硬合金のプレス使用面を所定の形
状１面粗さに仕上げた後、中間層として、スパッタリン
グ法によシ、約１μｍの厚さでＴ１の膜を均一に成膜す
る。その後、実施例１と同様に、ＡＪ！Ｎ膜を成膜し、
表面研磨を行ないプレス用金型を製作した。Example 2 Similarly to Example 1, after finishing the pressed surface of the cemented carbide to a predetermined shape and surface roughness, a T1 film with a thickness of about 1 μm was formed as an intermediate layer by sputtering. Forms a film uniformly. After that, as in Example 1, AJ! Form an N film,
The surface was polished and a press mold was manufactured.
この後、４ａｖｒｔ＊ ＢａＯ−５９Ｖｒｔ％５１０２
−１５ｗｔ％Ｂ２Ｏ３を主成分とする光学ガラスのφ２
５Ｘ”５０Ｘｔ７！ｎｍの両凸形状素材を、上記によシ
製作したプレス用金型の凹面間に載置し、窒素雰囲気中
で約７５０℃に加熱し、約５０Ｋｇｆ／ｃｍ２ の荷
重を約１０秒間負荷してプレス成形を行なった。After this, 4avrt* BaO-59Vrt%5102
-φ2 of optical glass whose main component is 15wt% B2O3
A biconvex material of 5X"50Xt7!nm was placed between the concave surfaces of the press mold prepared above, heated to about 750°C in a nitrogen atmosphere, and subjected to a load of about 50Kgf/cm2 for about 10 minutes. Press molding was performed by applying a load for seconds.
この場合も、実施例１と同様に、プレス成形品の形状精
度２面粗さは型とほぼ同一で、型表面の膜はがれ、星へ
のガラスの融着は見られない。その結果を第２表に示す
。In this case, as in Example 1, the shape accuracy and two-sided roughness of the press-formed product are almost the same as the mold, and no peeling of the film on the mold surface or fusion of glass to the star is observed. The results are shown in Table 2.
第 ２ 表
４０ｗｔ％ＢａＯ−３９ｗｔ％５ｉ０２−１５ｗｔ％Ｂ
２Ｏ５ガ２スプレス後の変化
本実施例では、超硬合金として、ＷＣとＣｏの組成から
なるものを用いたが、ＷＣ，Ｃｏ、 ＴｉＣ，ＴａＣの
組成からなる超硬合金でも良い。Table 2 40wt%BaO-39wt%5i02-15wt%B
Changes after 2O5 Gas Pressing In this example, a cemented carbide having a composition of WC and Co was used, but a cemented carbide having a composition of WC, Co, TiC, or TaC may also be used.
また、本実施例では、スパッタリング法によシ、中間層
及びｋＩ！Ｎ膜を形成したが、これに限らず、蒸着法、
イオンブレーティング法、イオンミキシング法でも良い
＠
また、本実施例では、中間層及びＡＪＮ膜の厚さを約１
顯としたが、最低１２μｍ程度あれば良い。In addition, in this example, the intermediate layer and kI! are formed by the sputtering method. Although the N film was formed, the method is not limited to this, and the method is not limited to this.
Ion blating method or ion mixing method may also be used. In this example, the thickness of the intermediate layer and AJN film is set to about 1
Although I mentioned this, a minimum thickness of about 12 μm is sufficient.
本発明によれば、光学ガラス素子の熱間プレス成形型と
して、ＡＪＮ膜とＡＩ！またはＴ１の中間層と超硬合金
からなるプレス用金型を用いることにより、型表面の酸
化や膜はがれによる劣化が発生せず、また、ガラスが型
表面に融着することもないので、高精度の光学ガラス素
子の量産化が可能となる。According to the present invention, AJN film and AI! are used as a hot press mold for an optical glass element. Alternatively, by using a press mold made of a T1 intermediate layer and a cemented carbide, the mold surface will not deteriorate due to oxidation or film peeling, and the glass will not be fused to the mold surface, resulting in high performance. It becomes possible to mass produce precision optical glass elements.
第１図は本発明の一実施例を示す超硬合金上にＭ中間層
を設けその上にＡ７Ｎ膜を成膜したプレス用金型の断面
図である。
１・・・超硬合金、２・・・ＡＩ！中間層、５・・−Ａ
ＪＮ膜。FIG. 1 is a sectional view of a press mold according to an embodiment of the present invention, in which an M intermediate layer is provided on a cemented carbide and an A7N film is formed thereon. 1...Cemented carbide, 2...AI! Middle class, 5...-A
JN membrane.
Claims (1)
金表面に、アルミニウムまたはチタンの中間層を形成し
、その上に窒化アルミニウム膜を形成したことを特徴と
する光学ガラス素子成形用金型。1. A mold for molding an optical glass element, characterized in that an intermediate layer of aluminum or titanium is formed on the surface of a cemented carbide whose main components are tungsten carbide and cobalt, and an aluminum nitride film is formed thereon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28997988A JPH02137741A (en) | 1988-11-18 | 1988-11-18 | Mold for making optical glass element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28997988A JPH02137741A (en) | 1988-11-18 | 1988-11-18 | Mold for making optical glass element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02137741A true JPH02137741A (en) | 1990-05-28 |
Family
ID=17750207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28997988A Pending JPH02137741A (en) | 1988-11-18 | 1988-11-18 | Mold for making optical glass element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02137741A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03237024A (en) * | 1990-02-13 | 1991-10-22 | Asahi Optical Co Ltd | Optical element forming mold and its regenerating method |
-
1988
- 1988-11-18 JP JP28997988A patent/JPH02137741A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03237024A (en) * | 1990-02-13 | 1991-10-22 | Asahi Optical Co Ltd | Optical element forming mold and its regenerating method |
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