JPH0578145A - Fusing preventing coating film - Google Patents

Fusing preventing coating film

Info

Publication number
JPH0578145A
JPH0578145A JP24362891A JP24362891A JPH0578145A JP H0578145 A JPH0578145 A JP H0578145A JP 24362891 A JP24362891 A JP 24362891A JP 24362891 A JP24362891 A JP 24362891A JP H0578145 A JPH0578145 A JP H0578145A
Authority
JP
Japan
Prior art keywords
film
mold
preventing
glass
fusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24362891A
Other languages
Japanese (ja)
Inventor
Toshiro Kasai
俊郎 河西
Masami Murai
正己 村井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP24362891A priority Critical patent/JPH0578145A/en
Publication of JPH0578145A publication Critical patent/JPH0578145A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06Construction of plunger or mould
    • C03B11/08Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/084Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
    • C03B11/086Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/02Press-mould materials
    • C03B2215/08Coated press-mould dies
    • C03B2215/10Die base materials
    • C03B2215/12Ceramics or cermets, e.g. cemented WC, Al2O3 or TiC
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/02Press-mould materials
    • C03B2215/08Coated press-mould dies
    • C03B2215/14Die top coat materials, e.g. materials for the glass-contacting layers
    • C03B2215/22Non-oxide ceramics
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/02Press-mould materials
    • C03B2215/08Coated press-mould dies
    • C03B2215/30Intermediate layers, e.g. graded zone of base/top material
    • C03B2215/31Two or more distinct intermediate layers or zones
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/02Press-mould materials
    • C03B2215/08Coated press-mould dies
    • C03B2215/30Intermediate layers, e.g. graded zone of base/top material
    • C03B2215/32Intermediate layers, e.g. graded zone of base/top material of metallic or silicon material
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/02Press-mould materials
    • C03B2215/08Coated press-mould dies
    • C03B2215/30Intermediate layers, e.g. graded zone of base/top material
    • C03B2215/34Intermediate layers, e.g. graded zone of base/top material of ceramic or cermet material, e.g. diamond-like carbon

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

PURPOSE:To improve facial properties of high, precision and durability by forming two layers of a protecting film of preventing a metal from diffusing from a mold and a coating film of a nonoxidizable compound on a molding mold. CONSTITUTION:A material consisting essentially of tungsten carbide, etc., is alloyed by using a metal such as cobalt as a binder to give a hard metal alloy 1 having high facial precision. Then, the allay 1 is pressed into a dented shape to prepare a mold, which is abraded to give a mirror surface. Then a thin film of tantalum is formed on the mirror surface by sputtering method, etc., to make a diffusion protecting film 2 of preventing cobalt in the alloy 1 from diffusing. Then thin films of h-BN and C-BN are alternately produced on the film 2 by deposition method and an nonoxidizable compound film 3 is developed to yield a mold of molding glass having a fusing preventing coating film of suppressing fusing to glass.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ガラスからなる光学部
品をプレス成形によって大量に生産するために、プレス
成形用金型上に形成される融着防止被膜に関するもので
ある。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anti-fusion coating formed on a press-molding die for mass-producing glass optical components by press molding.

【0002】[0002]

【従来の技術】高精度なガラス製光学部品をプレス成形
するには、型材料として高温でも安定で面精度に優れ、
耐酸化性に優れたものが必要であり、超硬合金を母材と
し貴金属被膜を融着防止被膜とした型が用いられてい
る。
2. Description of the Related Art For press-molding high-precision glass optical parts, the mold material is stable even at high temperatures and has excellent surface accuracy.
A mold having excellent oxidation resistance is required, and a mold having a base material made of cemented carbide and a noble metal coating used as a fusion preventing coating is used.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、高精度
あるいは複雑形状の光学部品を得るには、タングステン
カーバイト、チタンナイトライド、チタンカーバイト、
アルミナなどを主成分として、コバルトやニッケルをバ
インダとして合金化させた超硬合金が使用される。
However, in order to obtain an optical component with high precision or complicated shape, tungsten carbide, titanium nitride, titanium carbide,
A cemented carbide is used which is mainly composed of alumina and the like, and is alloyed with cobalt and nickel as a binder.

【0004】このような超硬合金を高温で繰り返しプレ
ス型として使用すると、金型材のコバルトやニッケルが
融着防止被膜中に拡散し、金型表面に酸化被膜を形成し
ガラスと融着するようになり、精度のよい光学部品を得
ることができない。また、金型材の金属拡散を防ぐため
に保護膜の膜厚を大きくすると、超硬合金に加工した形
状がくずれてしまい、複雑形状の光学部品を得ることは
できない。
When such a cemented carbide is repeatedly used as a press die at high temperature, cobalt or nickel of the die material is diffused into the anti-fusing coating to form an oxide coating on the die surface and fuse with glass. Therefore, an accurate optical component cannot be obtained. Further, if the film thickness of the protective film is increased in order to prevent metal diffusion of the mold material, the shape processed into the cemented carbide will be broken, and an optical component having a complicated shape cannot be obtained.

【0005】本発明は上記の問題点を、金型材から金属
拡散を防ぐ保護膜を形成し、ガラスとの融着を防ぐ非酸
化化合薄膜を形成することによって、プレス成形法によ
る高精度なガラス製光学部品を得ることを可能とする成
形用金型を提供することにある。
The present invention solves the above-mentioned problems by forming a protective film for preventing metal diffusion from a mold material and forming a non-oxidized compound thin film for preventing fusion with glass, thereby achieving high precision glass by press molding. It is to provide a molding die that enables obtaining an optical component.

【0006】[0006]

【課題を解決するための手段】上記課題を解決するため
に、本発明ではコバルトあるいはニッケルなどの金属を
バインダとして合金化させてある超硬合金の金型上に、
金属からの金属拡散を防ぐ保護膜と、ガラスとの融着を
防止する非酸化化合薄膜の二層で構成するものである。
In order to solve the above problems, according to the present invention, on a cemented carbide die on which a metal such as cobalt or nickel is alloyed as a binder,
It is composed of two layers of a protective film for preventing metal diffusion from metal and a non-oxidized compound thin film for preventing fusion with glass.

【0007】超硬合金としては、タングステンカーバイ
ト、チタンナイトライド、チタンカーバイト、アルミナ
などを主成分とし、面精度を上げるためにコバルトある
いはニッケルなどの金属をバインダとして合金化させた
ものを使用する。
As the cemented carbide, a material containing tungsten carbide, titanium nitride, titanium carbide, alumina or the like as a main component, and alloyed with a metal such as cobalt or nickel as a binder to improve surface accuracy is used. To do.

【0008】金型材からの金属拡散を防ぐ保護膜は、高
熱によるコバルトやニッケルの析出を防止するため、高
融点でかつ耐酸化性を有するタンタルおよびレニウムが
好ましい。
The protective film for preventing metal diffusion from the die material is preferably tantalum or rhenium having a high melting point and oxidation resistance in order to prevent precipitation of cobalt or nickel due to high heat.

【0009】また、ガラスとの融着を防止する非酸化化
合薄膜として、高温時に相分離や金属間化合物を生成し
ない、C−BN、およびh−BNの混合薄膜が良い。
As the non-oxidized compound thin film for preventing fusion with glass, a mixed thin film of C-BN and h-BN which does not generate phase separation or intermetallic compound at high temperature is preferable.

【0010】[0010]

【実施例】以下、本発明の一実施例を、図1のプレス成
形金型の断面図によって説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to a sectional view of a press molding die shown in FIG.

【0011】タングステンカーバイトを主成分とし、バ
インダとしてコバルトを使用している直径25mm、厚
さ10mmの超硬合金1を用いて、曲率半径50mmの
凹面形状のプレス面を有する金型を作成し、ダイヤモン
ド砥粒を用いて鏡面に研磨した。次に超硬合金中のコバ
ルトの拡散を防止するために、この鏡面上にタンタルを
スパッタ法により0.1マイクロメートルの厚みで形成
し拡散保護膜2とする。さらにガラスとの融着を防止す
るために、蒸着法によって、h−BN、C−BNの薄膜
を交互に生成して1.2マイクロメートルのh−BN、
C−BNの混合薄膜を、非酸化化合膜3として形成し
た。
Using a cemented carbide 1 having a diameter of 25 mm and a thickness of 10 mm and containing tungsten carbide as a main component and cobalt as a binder, a mold having a concave pressing surface with a radius of curvature of 50 mm was prepared. Then, it was mirror-polished using diamond abrasive grains. Next, in order to prevent the diffusion of cobalt in the cemented carbide, tantalum is formed on the mirror surface by sputtering to have a thickness of 0.1 μm to form the diffusion protection film 2. Further, in order to prevent fusion with glass, a thin film of h-BN or C-BN is alternately produced by a vapor deposition method to obtain a h-BN of 1.2 μm,
A mixed thin film of C-BN was formed as the non-oxidized composite film 3.

【0012】なお、比較サンプルとして上記と同形状
で、超硬合金の鏡面上に、ガラスとの融着を防止する非
酸化合金被膜として、従来から使用されているプラチナ
−イリジウム合金被膜を、スパッタ法により1.1マイ
クロメートルの厚みで金型に形成した。
As a comparative sample, a platinum-iridium alloy coating, which has been conventionally used as a non-oxidizing alloy coating for preventing fusion with glass, was sputtered on the mirror surface of cemented carbide with the same shape as the above. It was formed into a mold with a thickness of 1.1 micrometers by the method.

【0013】これらの金型で、窒素雰囲気中摂氏600
度でプレス成形加工を実施し、表面性状の変化を調べ
た。
With these molds, 600 ° C. in a nitrogen atmosphere
The press molding process was carried out at various degrees to examine the change in surface properties.

【0014】プレス成形加工を200時間実施した結果
は以下の通りである。本発明の金型が全く変化がないの
に対して、比較用の金型は80時間経過後から、表面が
酸化コバルトの析出により白濁し始め、110時間後で
は鏡面が曇って面粗度が低下し、145時間後では、酸
化コバルトが更に析出して、ガラスと融着してしまい、
ガラスの成形が不可能となった。
The results of press-forming for 200 hours are as follows. The mold of the present invention has no change, whereas the mold for comparison starts clouding due to the precipitation of cobalt oxide after 80 hours, and after 110 hours, the mirror surface becomes cloudy and the surface roughness is After 145 hours, cobalt oxide was further deposited and fused with glass,
Molding of glass became impossible.

【0015】本発明の金型では、拡散防止保護膜を超硬
合金と非酸化化合薄膜の間に形成することにより、超硬
合金中に含まれるコバルトの析出を、高融点で、かつ耐
酸化性を有するタンタルによって抑制し、非酸化化合薄
膜中に拡散するのを防止している。
In the mold of the present invention, the diffusion preventive protective film is formed between the cemented carbide and the non-oxidized compound thin film to prevent precipitation of cobalt contained in the cemented carbide with a high melting point and oxidation resistance. It is suppressed by tantalum, which has a property to prevent its diffusion into the non-oxidized compound thin film.

【0016】また、従来の拡散防止保護膜は5から20
マイクロメートルの厚さで形成されていたが、本発明の
ように拡散防止保護膜と非酸化化合薄膜の二層で構成す
ることにより、1から2マイクロメートルの厚さで拡散
防止保護膜として機能するものである。
The conventional diffusion preventive protective film has a thickness of 5 to 20.
Although it was formed to have a thickness of 1 μm, it can function as a diffusion prevention protective film with a thickness of 1 to 2 μm by being composed of two layers of a diffusion prevention protective film and a non-oxidized compound thin film as in the present invention. To do.

【0017】また、従来ガラス融着防止被膜として、白
金系合金被膜が使用されているが、被膜硬度がHv90
0から1200で、プレス成形加工中に小傷の発生が認
められ、精度の優れた光学部品の品質の低下となり、成
形金型の耐久性に問題を残した。それにくらべて、本発
明によるC−BN、h−BNの混合被膜はC−BNの立
方晶系の結晶構造によりHv2500から3000が得
られ耐摩耗性が大で、傷の発生防止に大きく貢献してお
り、200時間成形加工において、成形開始直後と20
0時間経過後の面粗度測定において、成形開始直後の面
粗度Rmax10nmに対し、200時間後でもRma
x21nmと良好な結果を得た。またガラスとの融着防
止もC−BN、h−BNの混合被膜はh−BNの六方晶
系の結晶構造が、優れた潤滑性を有しており、プレス成
形後の成形品の離形も極めて良好であった。
A platinum alloy coating is conventionally used as the glass fusion preventing coating, but the coating hardness is Hv90.
From 0 to 1200, small scratches were observed during the press molding process, which deteriorated the quality of the optical component with excellent accuracy, and left a problem in the durability of the molding die. On the other hand, the mixed coating of C-BN and h-BN according to the present invention has Hv 2500 to 3000 due to the cubic crystal structure of C-BN, has high abrasion resistance, and greatly contributes to the prevention of scratches. In the 200-hour molding process, 20 minutes after the start of molding
In the surface roughness measurement after the lapse of 0 hours, the surface roughness Rmax of 10 nm immediately after the start of molding was compared with the Rma even after 200 hours.
A good result of x21 nm was obtained. In addition, for preventing fusion with glass, the mixed coating of C-BN and h-BN has an excellent lubricity due to the hexagonal crystal structure of h-BN, and the release of the molded product after press molding is performed. Was also very good.

【0018】以上述べたように、バインダとして金属が
合金化されている超硬合金上に、拡散防止保護膜と非酸
化化合薄膜の二層を形成することにより、精度の優れた
光学部品をプレス成形によって得ることが可能となっ
た。
As described above, by forming two layers of a diffusion preventing protective film and a non-oxidized compound thin film on a cemented carbide in which a metal is alloyed as a binder, an optical component with excellent precision is pressed. It became possible to obtain it by molding.

【0019】[0019]

【発明の効果】本発明によれば、面性状に優れ、金属バ
インダを含む超硬合金をガラス成形用金型として使用で
き、従来にくらべて高精度な光学部品を得ることができ
ることはもとより、ガラス成形金型の耐久性を大幅に伸
ばすという効果を有する。
EFFECTS OF THE INVENTION According to the present invention, a cemented carbide having an excellent surface property and containing a metal binder can be used as a mold for glass molding, and it is possible to obtain a highly accurate optical component as compared with the conventional one. It has the effect of significantly extending the durability of the glass molding die.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の拡散防止保護膜と非酸化化
合薄膜の二層構造を示すプレス成形金型の断面図。
FIG. 1 is a cross-sectional view of a press molding die showing a two-layer structure of a diffusion prevention protective film and a non-oxidized compound thin film according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 超硬合金 2 拡散防止保護膜 3 非酸化化合薄膜 1 Cemented Carbide 2 Diffusion Prevention Protective Film 3 Non-Oxidized Compound Thin Film

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 ガラス成形用金型上に形成される保護膜
において、金型からの金属拡散を防ぐ保護膜と、ガラス
との融着を防ぐ非酸化化合薄膜の二層からなることを特
徴とする融着防止被膜。
1. A protective film formed on a glass molding die, which comprises two layers of a protective film for preventing metal diffusion from the die and a non-oxidized compound thin film for preventing fusion with glass. An anti-fusion coating to be used.
JP24362891A 1991-09-24 1991-09-24 Fusing preventing coating film Pending JPH0578145A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24362891A JPH0578145A (en) 1991-09-24 1991-09-24 Fusing preventing coating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24362891A JPH0578145A (en) 1991-09-24 1991-09-24 Fusing preventing coating film

Publications (1)

Publication Number Publication Date
JPH0578145A true JPH0578145A (en) 1993-03-30

Family

ID=17106656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24362891A Pending JPH0578145A (en) 1991-09-24 1991-09-24 Fusing preventing coating film

Country Status (1)

Country Link
JP (1) JPH0578145A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6119485A (en) * 1997-02-21 2000-09-19 Matsushita Electric Industrial Co., Ltd. Press-molding die, method for manufacturing the same and glass article molded with the same
US8887532B2 (en) 2010-08-24 2014-11-18 Corning Incorporated Glass-forming tools and methods

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6119485A (en) * 1997-02-21 2000-09-19 Matsushita Electric Industrial Co., Ltd. Press-molding die, method for manufacturing the same and glass article molded with the same
US8887532B2 (en) 2010-08-24 2014-11-18 Corning Incorporated Glass-forming tools and methods
US9586849B2 (en) 2010-08-24 2017-03-07 Corning Incorporated Glass-forming tools and methods

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