JPH0451495B2 - - Google Patents
Info
- Publication number
- JPH0451495B2 JPH0451495B2 JP6316288A JP6316288A JPH0451495B2 JP H0451495 B2 JPH0451495 B2 JP H0451495B2 JP 6316288 A JP6316288 A JP 6316288A JP 6316288 A JP6316288 A JP 6316288A JP H0451495 B2 JPH0451495 B2 JP H0451495B2
- Authority
- JP
- Japan
- Prior art keywords
- mold
- molding
- glass material
- press
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 48
- 239000011521 glass Substances 0.000 claims description 34
- 238000000465 moulding Methods 0.000 claims description 31
- 230000003287 optical effect Effects 0.000 claims description 27
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 239000005304 optical glass Substances 0.000 description 12
- 229910052799 carbon Inorganic materials 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- 230000007704 transition Effects 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
- C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/05—Press-mould die materials
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/10—Die base materials
Description
【発明の詳細な説明】
「産業上の利用分野」
この発明は、例えば、レンズ、プリズム、その
他の光学素子を押圧成形によつて生産するための
光学素子用成形型の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a method of manufacturing a mold for an optical element, for example, for producing lenses, prisms, and other optical elements by press molding.
「従来の技術」
従来、レンズ等の光学素子を生産するには、ガ
ラスを溶融し、これを金型内に注入して、大略の
レンズ形状のレンズ素材に押圧成形し、このレン
ズ素材をダイヤモンド砥石等を使つて研削加工
し、その後、酸化セリウム等にて研磨する方法が
採用されていた。"Conventional technology" Conventionally, in order to produce optical elements such as lenses, glass is melted, injected into a mold, and press-molded into a lens material in the approximate shape of a lens. The method used was to grind using a whetstone or the like and then polish with cerium oxide or the like.
しかし、このような押圧成形後に研削加工や研
磨工程を要する従来技術においては、レンズ等の
光学素子を仕上げるまでに多くの作業工程と高度
な熟練技術を必要とし、そのために、光学素子に
要求される高い面精度と面粗度とを得るために多
くの時間と費用がかかるという問題点があつた。
特に、収差補正に有効とされる非球面レンズの製
作においては、さらに高度な製作技術が要求され
るので、安価で高精度を有する光学素子を大量生
産することは極めて困難な状態であつた。 However, with conventional technology that requires grinding and polishing processes after pressure molding, many work processes and highly skilled techniques are required to finish optical elements such as lenses, and for this reason, the requirements for optical elements are There was a problem in that it took a lot of time and money to obtain high surface accuracy and surface roughness.
In particular, the manufacture of aspherical lenses, which are effective in correcting aberrations, requires more sophisticated manufacturing techniques, so it has been extremely difficult to mass-produce optical elements with high precision at low cost.
そこで、最近では、ガラス材を加熱し成形用型
を使つて押圧成形するだけで、つまり、押圧成形
後の研削、研磨加工を一切施すことなく高い面精
度と面粗度とを有するレンズを製作する方法が案
出されており、上記問題点は解決されつつある。 Therefore, recently, lenses with high surface precision and surface roughness have been manufactured simply by heating the glass material and press-forming it using a mold, that is, without any grinding or polishing after press-forming. A method has been devised, and the above problems are being solved.
この種の方法の従来技術としては、例えば、特
開昭52−45613号公報に記載された技術がある。
この技術の概略は不活性ガスの雰囲気中で特殊な
材料よりなる金型の内にレンズ素材（ガラス）を
置き、加熱しながら金型によつてレンズ素材を押
圧成形し、金型と成形されたレンズとを転移点温
度以下になるまで押圧し続けて成形するという方
法である。 As a conventional technique of this type of method, for example, there is a technique described in Japanese Patent Application Laid-Open No. 52-45613.
The outline of this technology is that a lens material (glass) is placed in a mold made of a special material in an inert gas atmosphere, and the lens material is press-molded by the mold while being heated. This method involves continuing to press and mold the lenses until the temperature drops below the transition point.
上記のように押圧成形する方法では、光学素子
に要求される高い面精度と面粗度とを得るために
金型についても同様に高精度の面精度と面粗度が
要求される。 In the method of press molding as described above, in order to obtain the high surface precision and surface roughness required for the optical element, the mold is similarly required to have high surface precision and surface roughness.
また、この金型はレンズ素材の転移点温度以上
の温度で押圧成形するため、そのような高温の雰
囲気で充分な強度を有すること、押圧成形する雰
囲気での耐候性、高温度においてレンズ素材に対
しての化学反応性が少なくこと、金型のプレス面
にすり傷等の損傷を受けにくいこと、熱衝撃によ
る耐破壊性能が高いことなどが必要である。 In addition, since this mold is press-molded at a temperature above the transition point temperature of the lens material, it must have sufficient strength in such a high-temperature atmosphere, be weather resistant in the press-molded atmosphere, and protect the lens material from high temperatures. It is necessary to have low chemical reactivity against metal molds, to be resistant to damage such as scratches on the pressing surface of the mold, and to have high resistance to destruction due to thermal shock.
このような要請に応えられる金型材料として
は、炭化ケイ素、窒化ケイ素などの材料、あるい
は、高密度カーボンの上に炭化ケイ素、窒化ケイ
素などのコーテイング膜を形成したものが適して
いるとされており、いろいろ検討が加えられてい
る。 Suitable mold materials that can meet these demands include materials such as silicon carbide and silicon nitride, or materials in which a coating film of silicon carbide or silicon nitride is formed on high-density carbon. Various considerations have been made.
その他、超硬合金を放電加工で加工し、その上
に炭化ケイ素のコーテング膜を形成する金型の製
法も開発されている（特開昭62−3030号参照）
「発明が解決しようとする課題」
しかしながら、炭化ケイ素（SiC）、窒化ケイ
素（Si3N4）等の材料は硬度が極めて高いため、
これらの材料を加工して球面レンズあるいは、非
球面レンズの形成用金型を高精度に加工すること
は非常に困難である。 In addition, a mold manufacturing method has been developed in which cemented carbide is machined by electrical discharge machining and a silicon carbide coating film is formed on the mold (see Japanese Patent Application Laid-Open No. 62-3030). ” However, materials such as silicon carbide (SiC) and silicon nitride (Si 3 N 4 ) have extremely high hardness, so
It is extremely difficult to process these materials into molds for forming spherical lenses or aspheric lenses with high precision.
また、超硬合金の金型が放電加工で加工できる
とはいうものの、加工に時間がかかつたり、超硬
合金は一般にタングステンカーバイト（WC）に
コバルト（Co））などの金属を加えて焼結したも
のであるから、結晶粒界や、空孔などが合金中に
含まれ、これらが金型表面に表われると、高精度
なレンズを生産することが困難になるといつた問
題があつた。 Furthermore, although cemented carbide molds can be machined by electric discharge machining, machining takes time, and cemented carbide is generally made by adding metals such as cobalt (Co) to tungsten carbide (WC). Because it is sintered, the alloy contains grain boundaries and pores, and if these appear on the mold surface, it becomes difficult to produce high-precision lenses. Ta.
「課題を解決するための手段」
本発明は上記した問題点にかんがみ、加熱して
軟化させた光学素子用材料を押圧成形して光学素
子を生産する手段に使用する光学素子用成形型を
可能なるかぎり、簡単に、かつ、高精度に製造す
る方法を開発することを目的とする。"Means for Solving the Problems" In view of the above-mentioned problems, the present invention enables a mold for optical elements that is used as a means for producing optical elements by press-molding a heated and softened optical element material. The aim is to develop a manufacturing method that is as simple and accurate as possible.
そこで、この発明では、生産する光学素子の有
効形成面に対応して型面形成したマスター型を作
つた後、このマスター型の型面にカーボンコーテ
ングを施す。 Therefore, in the present invention, a master mold whose mold surface is formed corresponding to the effective forming surface of the optical element to be produced is prepared, and then carbon coating is applied to the mold surface of this master mold.
次に、マスター型の型面には成形型となるガラ
ス材を対接し、これらマスター型とガラス材とを
真空中で加熱する。 Next, a glass material serving as a mold is brought into contact with the mold surface of the master mold, and the master mold and the glass material are heated in a vacuum.
ガラス材は加熱により軟化し、それにマスター
型の型面形状が転写されるため、その後、加熱す
ることにより成形型が製造される。 The glass material is softened by heating, and the mold surface shape of the master mold is transferred thereto, so that a mold is manufactured by subsequently heating it.
「作 用」
成形型となるガラス材が加熱することによつて
軟化し、マスター型の型面に対して高密度の状態
で接合するため、その型面形状の転写が非常に正
確に行なわれ、製造された成形型が高い精度のも
のとなる。``Function'' The glass material that becomes the mold softens when heated and bonds to the mold surface of the master mold in a highly dense state, so the shape of the mold surface is transferred very accurately. , the manufactured mold has high precision.
また、マスター型は、ニツケル（Ni）、銅
（Cu）等の金属で製作できるため、球面または非
球面の光学素子を問わず、その型面形成が容易と
なり、このようなマスター型の型面形状をガラス
材に加熱転写させるため、成形型の製造が簡単
で、その上、マスター型の型面にカーボンコーテ
ングを施すことによつてガラス材の熱融着を確実
に防ぐことができる。 In addition, since the master mold can be made of metals such as nickel (Ni) and copper (Cu), it is easy to form the mold surface regardless of whether it is a spherical or aspherical optical element. Since the shape is thermally transferred to the glass material, the mold is easy to manufacture, and by applying carbon coating to the mold surface of the master mold, thermal fusion of the glass material can be reliably prevented.
「実施例」
次に、この発明の実施例を図面を参照しながら
説明する。"Example" Next, an example of the present invention will be described with reference to the drawings.
第１図から第５図は、この発明の一実施例を示
す光学素子用成形型の製造工程図、第６図は生産
しようとする光学素子としてのレンズを示す断面
図である。 1 to 5 are manufacturing process diagrams of a mold for an optical element showing one embodiment of the present invention, and FIG. 6 is a sectional view showing a lens as an optical element to be produced.
ここでは、先ず、レンズ７の有効形成面７ａを
形成するための成形型の製造方法について説明す
る。第１図は金属材からなるマスター型１を示す
断面図である。このマスター型１はニツケル金属
（Ni）によつて製作してあり、直径20mm、長さ15
mmの大きさに設定し、その一端面はレンズ７の有
効形成面７ａと同一形状となるように曲面形成し
た。これが型面１ａとなつている。 Here, first, a method for manufacturing a mold for forming the effective forming surface 7a of the lens 7 will be described. FIG. 1 is a sectional view showing a master mold 1 made of a metal material. This master mold 1 is made of nickel metal (Ni), and has a diameter of 20 mm and a length of 15 mm.
mm, and one end surface thereof was curved to have the same shape as the effective forming surface 7a of the lens 7. This becomes the mold surface 1a.
マスター型１の材質としては、ニツケル金属
（Ni）の他に、アルミニウム、銅合金、無酸素銅
などが適している。マスター型１の型面１ａは、
ダイヤモンドのバイトを用いた超精密旋盤によつ
てレンズ７の生産に要求される面形状に球面もし
くは非球面形状に切削し、その後、引き目を除く
ためダイヤモンドペーストで表面を研磨した。研
磨面の表面荒さはRtm0.068μｍであつた。その
後、第２図に示すように真空蒸着によりりマスタ
ー型１の型面１ａの上にカーボンを0.2μｍの厚さ
にコーテングしてカーボン層２を設けた。このカ
ーボン層２は、後の工程において成形型となるガ
ラス材を熱変形させる場合に、ガラス材がマスタ
ー型１に融着するのを防ぐためのものであり、上
記の前工程で得られた型面１ａの形状を崩さない
程度に薄いことが望ましい。 Suitable materials for the master mold 1 include nickel metal (Ni), aluminum, copper alloy, and oxygen-free copper. The mold surface 1a of the master mold 1 is
It was cut into a spherical or aspherical surface shape required for the production of the lens 7 using an ultra-precision lathe using a diamond cutting tool, and then the surface was polished with diamond paste to remove scratches. The surface roughness of the polished surface was Rtm 0.068 μm. Thereafter, as shown in FIG. 2, a carbon layer 2 was provided by coating carbon to a thickness of 0.2 μm on the mold surface 1a of the master mold 1 by vacuum evaporation. This carbon layer 2 is to prevent the glass material from being fused to the master mold 1 when the glass material that will become the mold is thermally deformed in a later step, and is to prevent the glass material from being fused to the master mold 1. It is desirable that it be as thin as possible without destroying the shape of the mold surface 1a.
なお、この実施例で形成した型面１ａはレンズ
７の有効形成面７ａに合せて半径35mmの球面に形
成してある。 The mold surface 1a formed in this example is formed into a spherical surface with a radius of 35 mm to match the effective forming surface 7a of the lens 7.
次に、実際の成形型となるガラス材を第３図に
参照符号３をもつて示す如く用意する。 Next, a glass material that will become an actual mold is prepared as indicated by reference numeral 3 in FIG.
このガラス材３は外径20mm、中心部の厚さが５
mmの大きさのもので、その一方の面を平面とし、
その他方の面を半径36mmの球面に形成してある。
この他方面をなす球面は酸化セリウム等で研磨
し、キズ、砂目等がない面に仕上げてある。本実
施例においては、ガラス材３として、光学ガラス
BK７（小原光学硝子製作所の製品）を使用して
作られている。光学ガラスBK７の転移点は565
℃、屈伏点は624℃、軟化点は715℃、線膨張係数
は86×10-7cm/degcmである。 This glass material 3 has an outer diameter of 20 mm and a thickness of 5 mm at the center.
mm in size, one side of which is flat,
The other surface is formed into a spherical surface with a radius of 36 mm.
The other spherical surface is polished with cerium oxide or the like to provide a surface free of scratches, grains, etc. In this embodiment, optical glass is used as the glass material 3.
It is made using BK7 (a product of Ohara Optical Glass Manufacturing). The transition point of optical glass BK7 is 565
℃, yield point is 624℃, softening point is 715℃, and linear expansion coefficient is 86×10 -7 cm/degcm.
一方、マスター型１の上に上記のガラス材３を
第３図の様に置き、真空加熱炉の中でマスター型
１と共にガラス材３を750℃に加熱し、ガラス材
３を軟化変形させ、ガラス材３の研磨面とマスタ
ー型１の型面１ａとが確実に面接合して一致する
様にする。 On the other hand, the glass material 3 described above is placed on the master mold 1 as shown in FIG. 3, and the glass material 3 is heated to 750°C together with the master mold 1 in a vacuum heating furnace to soften and deform the glass material 3. The polished surface of the glass material 3 and the mold surface 1a of the master mold 1 are ensured to make surface contact and match.
このように、加熱が真空加熱炉の中で行なわれ
ているため、ガラス材３とマスター型１の間に空
気が存在しないため、マスター型１の型面１ａ形
状がガラス材３に正確に転写される。なお、真空
加熱炉の真空度は、１×10-5Torrである。上記
の加熱を空気中で行なうと、ガラス材３が軟化し
マスター型１の形状に倣う時に、マスター型１と
ガラス材３との間に空気を取り込んでしまい、取
り込まれた空気が加熱により膨張しガラス材３の
表面に泡状の気泡を生じさせることがある。 In this way, since the heating is performed in the vacuum heating furnace, there is no air between the glass material 3 and the master mold 1, so the shape of the mold surface 1a of the master mold 1 is accurately transferred to the glass material 3. be done. Note that the vacuum degree of the vacuum heating furnace is 1×10 −5 Torr. If the above heating is performed in air, when the glass material 3 softens and follows the shape of the master mold 1, air will be trapped between the master mold 1 and the glass material 3, and the trapped air will expand due to heating. This may cause bubbles to form on the surface of the glass material 3.
次に、加熱温度をゆつくり下げ、アニールによ
つてガラス材３に含まれている歪を取り除く。そ
の後、マスター型１とガラス材３とを真空加熱炉
より取り出し、これらを分離する。 Next, the heating temperature is gradually lowered and the strain contained in the glass material 3 is removed by annealing. Thereafter, the master mold 1 and the glass material 3 are taken out from the vacuum heating furnace and separated.
取り出したガラス材３は第５図に示すように、
型成形面４の反対側を平らに加工し、また、コー
テングされているカーボン層２を均等研磨方法に
より型成形面４の形状が離れないようにして取り
除く。 The glass material 3 taken out is as shown in FIG.
The opposite side of the molding surface 4 is processed to be flat, and the coated carbon layer 2 is removed by a uniform polishing method so that the shape of the molding surface 4 is not separated.
この様にしてガラス材３からなるレンズ成形用
の成形型５が作られる。 In this way, a mold 5 for molding a lens made of the glass material 3 is produced.
また、レンズ７を製作する光学ガラスを押圧成
形するための金型として上記成形型５を使用する
ために、型成形面４に白金〜95％−金５％合金膜
６をスパツタリングにより厚さ2μｍに厚さでコ
ーテングした。この合金膜６は押圧成形されるレ
ンズ７と成形型５とが熱融着するのを防ぐもので
ある。 In addition, in order to use the above-mentioned mold 5 as a mold for press-molding the optical glass for manufacturing the lens 7, a platinum to 95%-gold 5% alloy film 6 is sputtered to a thickness of 2 μm on the molding surface 4. coated with a thickness of This alloy film 6 prevents the lens 7 to be press-molded and the mold 5 from being thermally fused together.
なお、押圧形成されるレンズ７と成形型５との
熱融着を防ぐための保護層としては、上記した合
金膜６の他に酸化アルミニウム（Ａ2O3）、窒
化チタン（TiN）、ＡＮ、白金（Pt）、炭素(C)
等により膜形成しても有効である。 In addition to the alloy film 6 described above, aluminum oxide (A 2 O 3 ), titanium nitride (TiN), AN , platinum (Pt), carbon (C)
It is also effective to form a film using methods such as the following.
次に、上記した成形型５を使用して光学素子と
してのレンズを生産する一例について説明する。
第８図及び第９図は押圧成形装置の簡略図を示
し、この装置に設備した成形上型１１と成形下型
１２は既に説明した実施例にしたがつて成形型５
と同様に製作したものである。 Next, an example of producing a lens as an optical element using the mold 5 described above will be described.
FIGS. 8 and 9 show simplified diagrams of a press molding apparatus, in which an upper mold 11 and a lower mold 12 are constructed in accordance with the embodiments already described.
It was produced in the same way.
成形工程１１は上側の油圧シリンダ１３に取り
付けてあり、成形下型１２は下側の油圧シリンダ
１４に取り付けてあり、また、これら上型１１と
下型１２との温度を測定するための熱電対１５，
１６が各油圧シリンダ１３，１４に配設してあ
る。その他、１７は加熱炉内に設けられたヒータ
ー、１８は成形部、１９は成形部に連通するガス
送入口である。 The molding process 11 is attached to an upper hydraulic cylinder 13, the lower molding die 12 is attached to a lower hydraulic cylinder 14, and a thermocouple is installed to measure the temperature of these upper die 11 and lower die 12. 15,
16 is arranged in each hydraulic cylinder 13,14. In addition, 17 is a heater provided in the heating furnace, 18 is a molding section, and 19 is a gas inlet communicating with the molding section.
光学素子用材料の一例として、光学ガラス２０
（SFS 01、小原光学硝子製；転移点約393℃）を
用意し、当該光学ガラス２０を球形に研磨加工す
る。この研磨加工に当たり、重量を体積に換算し
て体積調整を行なつた。 Optical glass 20 is an example of a material for optical elements.
(SFS 01, manufactured by Ohara Optical Glass; transition point: approximately 393°C) is prepared, and the optical glass 20 is polished into a spherical shape. During this polishing process, the volume was adjusted by converting the weight into volume.
然る後、成形下型１２の型成形面を構成する凹
部の上側に、上記の光学ガラス２０を載置し、成
形部１８を外気と隔絶して、成形上型１１及び成
形下型１２の温度を熱電対１５，１６によつて測
定しながら、これら上型１１と下型１２の温度が
約420℃となるまで、ヒーター１７により加熱を
行なう。 After that, the optical glass 20 described above is placed above the concave portion constituting the molding surface of the lower molding mold 12, the molding part 18 is isolated from the outside air, and the upper molding mold 11 and the lower molding mold 12 are closed. While measuring the temperature with thermocouples 15 and 16, the upper mold 11 and the lower mold 12 are heated by the heater 17 until their temperature reaches about 420°C.
この際、上型１１と下型１２の劣化を軽減する
ため、ガス送入口１９を介して成形部１８に窒素
ガスを導入し、還元性雰囲気として加熱を行な
う。上型１１及び下型１２の温度が約420℃に達
した後、第９図からも理解できるように、上側の
油圧シリンダ１３を下降させて約80(Kg/cm2)の圧
力で圧接し、前述の光学ガラス２０を圧接成形す
る。 At this time, in order to reduce deterioration of the upper mold 11 and the lower mold 12, nitrogen gas is introduced into the molding section 18 through the gas inlet 19, and heating is performed to create a reducing atmosphere. After the temperature of the upper mold 11 and lower mold 12 reaches approximately 420°C, as can be seen from Fig. 9, the upper hydraulic cylinder 13 is lowered and the molds are pressed together at a pressure of approximately 80 (Kg/cm 2 ). , the above-mentioned optical glass 20 is pressure-molded.
この状態で、ヒーター１７の加熱を停止させて
光学ガラス２０と、上型１１及び下型１２とを放
熱する。その後、熱電対１５，１６により、上型
１１と下型１２の温度が光学ガラス２０の転移点
よりも低いこと（約390℃以下）を確認した時点
で、上側の油圧シリンダ１３を上昇させ当該押圧
成形装置から押圧成形品を取り出し、第６図に示
すようなレンズ７を得る。 In this state, the heating of the heater 17 is stopped to radiate heat from the optical glass 20, the upper mold 11, and the lower mold 12. After that, when it is confirmed by the thermocouples 15 and 16 that the temperature of the upper mold 11 and the lower mold 12 is lower than the transition point of the optical glass 20 (approximately 390°C or less), the upper hydraulic cylinder 13 is raised. The press-molded product is taken out from the press-molding device, and a lens 7 as shown in FIG. 6 is obtained.
このようにして生産したレンズ７は前述したマ
スター型１に形成した型面１ａと実質的に同一の
球面を有し、この発明の方法により製造された成
形型が、極めて高精度に仕上がつていることが確
認できた。 The lens 7 produced in this manner has a spherical surface that is substantially the same as the mold surface 1a formed in the master mold 1 described above, and the mold manufactured by the method of the present invention is finished with extremely high precision. I was able to confirm that there was.
また、上記の成形上型１１と下型１２を用いて
光学素子繰り返し押圧成形したところ、高い再現
性を以つて光学素子を製造することができた。 Further, when an optical element was repeatedly press-molded using the above molding upper mold 11 and lower mold 12, it was possible to manufacture an optical element with high reproducibility.
以上一実施例について説明したが、本発明は球
面レンズの成形型にかぎらず、非球面レンズの成
形型についても同様に製造することができ、ま
た、マスター型１はニツケル合金や銅合金などの
最も型面形成し易い材料を用いて作ることができ
ると共に、成形型となるガラス材３は光学ガラス
BK７の外、他の適当なガラス材を用いることが
できる。 Although one embodiment has been described above, the present invention is not limited to molding molds for spherical lenses, but can be similarly manufactured for molding molds for aspherical lenses, and the master mold 1 is made of nickel alloy, copper alloy, etc. It can be made using the material that is easiest to form the mold surface, and the glass material 3 that becomes the mold is optical glass.
Besides BK7, other suitable glass materials can be used.
「発明の効果」
上記した通り、本発明に係る製造方法によれ
ば、マスター型がニツケル（Ni）、銅（Cu）等の
金属材で製作するため、球面または非球面の光学
素子を問わず、生産すべき光学素子の有効形成面
に対応した型面形成が容易となり、また、マスタ
ー型の型面形状をガラス材に加熱転写させて光学
素子用の成形型を製造するため、成形型の型成形
面精度が高く、その上、マスター型の製作の容易
さと相俟つてこの成形型の製造が簡単となる。"Effects of the Invention" As described above, according to the manufacturing method of the present invention, since the master mold is made of metal materials such as nickel (Ni) and copper (Cu), it can be used for both spherical and aspherical optical elements. , it becomes easy to form a mold surface that corresponds to the effective forming surface of the optical element to be produced, and the shape of the mold surface of the master mold is thermally transferred to the glass material to manufacture the mold for the optical element. The precision of the molding surface is high, and combined with the ease of manufacturing the master mold, the manufacturing of this mold is simple.
第１図〜第５図は本発明の一実施例を示す光学
素子用成形型の簡略的な製造工程図、第６図は製
造された光学素子用成形型の断面図、第７図は生
産しようとするレンズの断面図、第８図及び第９
図は押圧成形装置の簡略図で、第８図は押圧成形
する前の状態を、第９図は押圧成形の状態を各々
示す。
１…マスター型、１ａ…型面、２…カーボン
層、３…ガラス材、４…型成形面、５…成形面、
７…レンズ、７ａ…有効形成面。
Figures 1 to 5 are simplified manufacturing process diagrams of a mold for optical elements showing one embodiment of the present invention, Figure 6 is a sectional view of the manufactured mold for optical elements, and Figure 7 is a production process diagram. Cross-sectional views of the lens to be used, Figures 8 and 9
The figure is a simplified diagram of the press molding apparatus, with FIG. 8 showing the state before press molding, and FIG. 9 showing the state after press molding. DESCRIPTION OF SYMBOLS 1... Master mold, 1a... Mold surface, 2... Carbon layer, 3... Glass material, 4... Mold molding surface, 5... Molding surface,
7... Lens, 7a... Effective forming surface.
Claims (1)
形して光学素子を生産する手段として使用される
光学素子用成形型の製造方法において、マスター
型の型面を、生産する光学素子の有効形成面に対
応して形成した後カーボンコーテングし、マスタ
ー型及びこれに対接させたガラス材を真空中で加
熱し、軟化したガラス材にマスター型の型面形状
を転写させ、ガラス材からなる光学素子用の成形
型を製造することを特徴とする方法。1. In a method for producing a mold for an optical element, which is used as a means for producing an optical element by press-molding a heated and softened optical element material, the mold surface of the master mold is used to effectively form the optical element to be produced. The master mold and the glass material in contact with it are heated in a vacuum to transfer the mold surface shape of the master mold to the softened glass material. A method characterized by manufacturing a mold for an element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6316288A JPH01239030A (en) | 1988-03-18 | 1988-03-18 | Production of forming mold for optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6316288A JPH01239030A (en) | 1988-03-18 | 1988-03-18 | Production of forming mold for optical element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01239030A JPH01239030A (en) | 1989-09-25 |
| JPH0451495B2 true JPH0451495B2 (en) | 1992-08-19 |
Family
ID=13221267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6316288A Granted JPH01239030A (en) | 1988-03-18 | 1988-03-18 | Production of forming mold for optical element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01239030A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03242332A (en) * | 1990-02-19 | 1991-10-29 | Canon Inc | Production of optical element |
| JP2001162626A (en) | 1999-04-02 | 2001-06-19 | Suzuka Fuji Xerox Co Ltd | Manufacturing method for plastic molded article and mold made of glass for molding plastic material |
| US6385997B1 (en) * | 2000-05-12 | 2002-05-14 | Eastman Kodak Company | Method for forming a tool for molding microlens arrays |
| JP4832939B2 (en) * | 2006-03-24 | 2011-12-07 | オリンパス株式会社 | Method for manufacturing optical element molding die |
| JP7125844B2 (en) | 2018-01-26 | 2022-08-25 | Hoya株式会社 | glass mold |
-
1988
- 1988-03-18 JP JP6316288A patent/JPH01239030A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01239030A (en) | 1989-09-25 |
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