JPH0247411B2 - KOGAKUGARASUSOSHINOPURESUSEIKEIYOKATA - Google Patents
KOGAKUGARASUSOSHINOPURESUSEIKEIYOKATAInfo
- Publication number
- JPH0247411B2 JPH0247411B2 JP2385085A JP2385085A JPH0247411B2 JP H0247411 B2 JPH0247411 B2 JP H0247411B2 JP 2385085 A JP2385085 A JP 2385085A JP 2385085 A JP2385085 A JP 2385085A JP H0247411 B2 JPH0247411 B2 JP H0247411B2
- Authority
- JP
- Japan
- Prior art keywords
- mold
- press
- optical glass
- thin film
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000005304 optical glass Substances 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 25
- 238000000465 moulding Methods 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 22
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- 229910052799 carbon Inorganic materials 0.000 claims description 11
- 229910003460 diamond Inorganic materials 0.000 claims description 11
- 239000010432 diamond Substances 0.000 claims description 11
- 239000011195 cermet Substances 0.000 claims description 7
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 7
- 239000011521 glass Substances 0.000 description 13
- 239000002585 base Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000003825 pressing Methods 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910021397 glassy carbon Inorganic materials 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
- C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
- C03B2215/24—Carbon, e.g. diamond, graphite, amorphous carbon
Description
産業上の利用分野
本発明は光学ガラス素子の製造方法に関し、特
にプレス成形後研磨工程を必要としない高精度光
学ガラス素子をプレス成形する際に用いる光学ガ
ラス素子のプレス成形用型に関するものである。
従来の技術
高精度な光学ガラス素子を直接プレスにより成
形するためには、像形成品質が良好な事が要求さ
れる。このため型材料としては高温度のもとでガ
ラスに対して化学的に不活性であること、型のガ
ラスプレス面が十分硬くすり傷等の損傷を受けに
くいこと、また高温度でのプレスにより型が塑性
変形などをしないこと、耐熱性、耐熱衝撃性に優
れていること、さらに型の加工性が良く精密加工
が可能なことなどが必要であり、これらの要求を
比較的満足する型材料として例えば、特開昭49−
81419号公報に示されているガラス状炭素，特開
昭52−45613号公報に示されているシリコンカー
バイド（SiC）、又はシリコンナイトライド
（Si3N4）、特開昭59−121126号公報に示されてい
るチタンカーバイド（TiC）および金属の混合材
料などが用いられており、様々な検討がなされて
いる。
発明が解決しようとする問題点
このような従来の型材料、例えばラス状炭素で
は、構造的に強度が弱い、表面が傷がつきやす
い、および酸化し易いという欠点を有している。
またシリコンカーバイドおよびシリコンナイトラ
イドの場合は、その硬度が極めて高いためガラス
プレス面を球面形状あるいは非球面形状に高精度
に加工することが非常に困難であつた。しかもこ
れらの材料はいずれも焼結タイプのものであるた
め、その焼結性を向上させる目的で焼結助剤とし
て第三成分を含有するため、鉛やアルカリ元素を
大量に含有するガラス素子と比較的反応しやす
く、プレス成形をくり返すと型とガラス素子との
反応が進み、ガラスが型に付着するようになり像
形成品質の良い高精度な光学ガラス素子を成形す
ることができなかつた。チタンカーバイドおよび
金属の混合材料の場合もプレス成形をくり返すと
型とガラス素子とがくつつき高精度な光学ガラス
素子をプレス成形することができないという欠点
を有していた。
本発明はかかる点に鑑みてなされたもので、光
学ガラス素子の直接プレス成形法により像形成品
質の良好な高精度の光学ガラス素子の成形を可能
にするためのプレス成形用型を提供することを目
的としている。
問題点を解決するための手段
本発明は上記問題点を解決するため、プレス成
形用型の母材として精密加工が容易で、耐熱性、
耐熱衝撃性もある材料、例えばタングステンカー
バイド、サーメツト又はジルコニアを選び、これ
ら母材上に光学ガラス素子との反応性に乏しく、
硬度も高いダイヤモンド薄膜又はダイヤモンド型
炭素薄膜を成形して型を構成することにより像形
成品質の良好な高精度の光学ガラス素子のプレス
成形を可能にしようとしたものである。
作 用
本発明はダイヤモンド薄膜あるいはダイヤモン
ド型炭素薄膜が高温度においても鉛又はアルカリ
元素を大量に含有する光学ガラス素子と反応しな
いこと、またこれらの膜が十分な硬度を持ち型表
面にすり傷等が発生したり、プレス成形により塑
性変形などをおこしたりしない事を見いだし、前
記の薄膜を、精密加工性に優れ、耐熱性、耐熱衝
撃性もある材料、例えばタングステンカーバイ
ド、サーメツト、又はジルコニア母材の光学ガラ
スプレス面に形成して光学ガラス素子のプレス成
形用型として構成することにより、像形成品質が
良好で高精度な光学ガラス素子の直接プレス成形
を可能としたものである。
実施例
以下、本発明の実施例を説明する。
直径20mm、厚さ６mmのタングステンカーバイ
ド、サーメツトおよびジルコニアを曲率半径46mm
の凹面形状の上型、および曲率半径200mmの凹面
形状の下型から成る一対の光学ガラス素子のプレ
ス成形用型にそれぞれ加工した。これらの型のプ
レス面を超微細なダイヤモンド砥粒を用いて鏡面
研磨した。次に、この研磨面上にイオンビームス
パツタ法により約1μmの厚さでダイヤモンド薄膜
又はダイヤモンド型炭素薄膜を形成した。図にこ
のようにして作製した上下型をプレスマシンにセ
ツトしたものを示す。１は上型、２は下型、３は
上型用加熱ヒータ、４は下型用加熱ヒータ、５は
上型用ピストンシリダ、６は下型用ピストンシリ
ダ、７は供給ガラス素子塊状物、８はガラス素子
供給用治具、９はプレス成形した光学ガラス素子
の取り出し口、１０は供給ガラス素子塊状物の予
備加熱炉、１１はおおいである。
酸化鉛（PbO）70重量％、シリカ（SiO2）27
重量％、および残りが微量成分から成る酸化鉛系
光学ガラスを半径10mmの球形状に加工した塊状物
７を予備加熱炉１０で加熱した後、520℃に保持
された上下の型１および２の下型２の上に置き、
窒素ガス雰囲気中でプレス圧約40Kg／cm2によりプ
レスし２分間保持した後、そのまま上下の型の温
度を300℃まで冷却して両面が凸形にプレス成形
された光学ガラス素子を作製し取り出し口９より
取り出して光学ガラス素子のプレス成形工程が完
了する。以上のような工程を1000回くり返した
後、使用した上下の型１および２をプレスマシン
より取りはずし型の表面状態、およびプレスされ
た光学ガラス素子のプレス面を走査型電子顕微鏡
を用い観察評価した。
以上のようにして異なつた母材を使用し、これ
ら母材上にダイヤモンド薄膜又はダイヤモンド型
炭素薄膜を形成したプレス用型を用いプレス成形
実験をくり返した。第１表にタングステンカーバ
イド、サーメツト、またはジルコニアを母材とし
たプレス成形用型を用いた時の実験結果を示し
た。第１表から明らかなように、母材がタングス
テンカーバイド、サーメツト、およびジルコニア
のいづれの場合でも像形成品質の良好な高精度の
光学ガラス素子をプレス成形することができた。
以上のことからプレス成形用型の母材としては前
記の３種類の材料だけに限定されるものではな
く、加工精度に優れ、耐熱性が有り、ダイヤモン
ド薄膜およびダイヤモンド型炭素薄膜との接着性
の良い全ての材料に適合するものである。
INDUSTRIAL APPLICATION FIELD The present invention relates to a method for manufacturing an optical glass element, and in particular to a press-molding mold for an optical glass element used when press-molding a high-precision optical glass element that does not require a polishing step after press-molding. . Prior Art In order to directly mold a high-precision optical glass element by pressing, it is required that the quality of image formation be good. For this reason, the mold material must be chemically inert to glass at high temperatures, the glass press surface of the mold must be sufficiently hard and resistant to damage such as scratches, and It is necessary that the mold does not undergo plastic deformation, has excellent heat resistance and thermal shock resistance, and that the mold has good workability and can be precisely processed, and mold materials that relatively satisfy these requirements are required. For example, JP-A-49-
Glassy carbon shown in JP-A No. 81419, silicon carbide (SiC) or silicon nitride (Si 3 N 4 ) shown in JP-A-52-45613, JP-A-59-121126 Mixed materials of titanium carbide (TiC) and metals, as shown in Figure 1, have been used, and various studies have been conducted. Problems to be Solved by the Invention Such conventional mold materials, such as carbon laths, have the disadvantages of having weak structural strength, being easily scratched on the surface, and being easily oxidized.
Furthermore, in the case of silicon carbide and silicon nitride, their extremely high hardness makes it extremely difficult to process the glass press surface into a spherical or aspherical shape with high precision. Moreover, since these materials are all sintered types, they contain a third component as a sintering aid to improve their sinterability, so they cannot be used with glass elements containing large amounts of lead or alkali elements. It is relatively easy to react, and when press molding is repeated, the reaction between the mold and the glass element progresses, causing the glass to adhere to the mold, making it impossible to mold a high-precision optical glass element with good image formation quality. . The mixed material of titanium carbide and metal also has the disadvantage that repeated press molding causes the mold and glass element to become loose, making it impossible to press mold a highly precise optical glass element. The present invention has been made in view of the above points, and an object of the present invention is to provide a press molding mold that enables the molding of highly accurate optical glass elements with good image forming quality by a direct press molding method of optical glass elements. It is an object. Means for Solving the Problems In order to solve the above-mentioned problems, the present invention provides a base material for press molding that is easy to precision process, has high heat resistance,
Select a material that is also thermal shock resistant, such as tungsten carbide, cermet, or zirconia, and place on these base materials a material that has poor reactivity with the optical glass element.
By forming a mold by molding a diamond thin film or a diamond-shaped carbon thin film with high hardness, it is possible to press-form an optical glass element with good image formation quality and high precision. Function The present invention provides that the diamond thin film or diamond-shaped carbon thin film does not react with optical glass elements containing a large amount of lead or alkali elements even at high temperatures, and that these films have sufficient hardness to prevent scratches and the like on the mold surface. They found that the thin film does not cause any plastic deformation during press forming, and the thin film can be made of a material that has excellent precision workability, heat resistance, and thermal shock resistance, such as tungsten carbide, cermet, or zirconia base material. By forming the mold on the optical glass pressing surface of the optical glass and configuring it as a mold for press molding of an optical glass element, it is possible to directly press mold an optical glass element with good image formation quality and high precision. Examples Examples of the present invention will be described below. Tungsten carbide, cermet and zirconia with a diameter of 20mm and a thickness of 6mm with a radius of curvature of 46mm
A pair of press-molding molds for optical glass elements were fabricated, each consisting of a concave upper mold with a radius of curvature of 200 mm and a concave lower mold with a radius of curvature of 200 mm. The press surfaces of these molds were mirror polished using ultrafine diamond abrasive grains. Next, a diamond thin film or a diamond-shaped carbon thin film with a thickness of about 1 μm was formed on this polished surface by an ion beam sputtering method. The figure shows the upper and lower molds produced in this way set in a press machine. 1 is an upper mold, 2 is a lower mold, 3 is a heater for the upper mold, 4 is a heater for the lower mold, 5 is a piston cylinder for the upper mold, 6 is a piston cylinder for the lower mold, 7 is a supply glass element lump, 8 is a jig for supplying glass elements, 9 is a take-out port for press-molded optical glass elements, 10 is a preheating furnace for supplying glass element blocks, and 11 is a cover. Lead oxide (PbO) 70% by weight, silica (SiO 2 ) 27
A block 7 made of lead oxide optical glass processed into a spherical shape with a radius of 10 mm is heated in a preheating furnace 10, and then placed in upper and lower molds 1 and 2 held at 520°C. Place it on the lower mold 2,
After pressing in a nitrogen gas atmosphere at a press pressure of approximately 40 kg/cm 2 and holding for 2 minutes, the temperature of the upper and lower molds was cooled to 300°C to produce an optical glass element press-molded with convex surfaces on both sides. 9 to complete the press molding process of the optical glass element. After repeating the above process 1000 times, the upper and lower molds 1 and 2 used were removed from the press machine and the surface condition of the molds and the pressed surface of the pressed optical glass element were observed and evaluated using a scanning electron microscope. . As described above, different base materials were used, and press molding experiments were repeated using press dies in which a diamond thin film or a diamond-like carbon thin film was formed on these base materials. Table 1 shows experimental results using press molding molds made of tungsten carbide, cermet, or zirconia as a base material. As is clear from Table 1, high-precision optical glass elements with good image forming quality could be press-molded regardless of whether the base material was tungsten carbide, cermet, or zirconia.
Based on the above, the base material for press molding molds is not limited to the above three types, but also has excellent processing accuracy, heat resistance, and adhesive properties with diamond thin films and diamond-shaped carbon thin films. Good and compatible with all materials.
【表】
なお本発明を説明するための凹面形状のプレス
成形用型を使用したが、型表面の形状は本実施例
のような形状に限定されるものではなく、プリズ
ム等の光学ガラス素子形状にも適合するものであ
ることは言うまでもない。
考案の効果
以上述べてきたように、本発明は加工精度に優
れ、耐熱性があり、ダイヤモンド薄膜およびダイ
ヤモンド型炭素薄膜との接着性が良い材料、例え
ばタングステンカーバイド、サーメツト、あるい
はジルコニアをプレス成形用型の母材として選
び、これら母材上に硬度が高く、光学ガラスとの
反応性の無いダイヤモンド薄膜またはダイヤモン
ド型炭素薄膜を形成することにより像形成品質の
良好な高精度の光学ガラス素子の直接プレス成形
用型を提供したものであり、高精度な光学ガラス
素子を安価に量産するためのきわめて有用な発明
である。[Table] Although a concave press molding mold was used to explain the present invention, the shape of the mold surface is not limited to the shape of this example, and can be used to form optical glass elements such as prisms. Needless to say, it is also compatible with Effects of the Invention As described above, the present invention uses materials that have excellent processing accuracy, heat resistance, and good adhesion to diamond thin films and diamond-shaped carbon thin films, such as tungsten carbide, cermet, or zirconia, for press molding. By forming a diamond thin film or a diamond-shaped carbon thin film that has high hardness and no reactivity with optical glass on these base materials, it is possible to directly form high-precision optical glass elements with good image forming quality. This invention provides a press molding mold, and is an extremely useful invention for mass-producing high-precision optical glass elements at low cost.
図は本発明の光学ガラス素子の直接プレス成形
用型を組み込んだプレスマシンの概略図である。
１……上型、２……下型、３……上型用加熱ヒ
ータ、４……下型用加熱ヒータ、５……上型用ピ
ストンシリンダ、６……下型用ピストンシリン
ダ、７……供給ガラス塊状物、８……ガラス供給
用治具、９……プレス成形した光学ガラス素子取
り出し口、１０……供給ガラス塊状物の予備加熱
炉、１１……おおい。
The figure is a schematic view of a press machine incorporating a mold for direct press molding of an optical glass element of the present invention. DESCRIPTION OF SYMBOLS 1... Upper mold, 2... Lower mold, 3... Heater for upper mold, 4... Heater for lower mold, 5... Piston cylinder for upper mold, 6... Piston cylinder for lower mold, 7... ...Supplied glass lumps, 8...Glass supply jig, 9...Press-molded optical glass element outlet, 10...Preheating furnace for supplied glass lumps, 11...Shell.
Claims (1)
ド薄膜およびダイヤモンド型炭素薄膜との接着性
の良い材料を母材とし、前記母材上にダイヤモン
ド薄膜又はダイヤモンド状炭素薄膜を形成して構
成されることを特徴とする光学ガラス素子のプレ
ス成形用型。 ２ タングステンカーバイド（WC）、サーメツ
ト、又はジルコニア（ZrO2）を母材とし、これ
ら母材上にダイヤモンド薄膜又はダイヤモンド型
炭素薄膜を形成して構成されることを特徴とする
特許請求の範囲第１項記載の光学ガラス素子のプ
レス成形用型。[Scope of Claims] 1. A material having heat resistance, excellent processing accuracy, and good adhesion to a diamond thin film and a diamond-like carbon thin film is used as a base material, and a diamond thin film or a diamond-like carbon thin film is formed on the base material. A press-molding mold for an optical glass element, characterized in that it is configured as follows. 2 Claim 1, characterized in that it is constructed by using tungsten carbide (WC), cermet, or zirconia (ZrO 2 ) as a base material, and forming a diamond thin film or a diamond-shaped carbon thin film on these base materials. A press-molding mold for the optical glass element described in 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2385085A JPH0247411B2 (en) | 1985-02-08 | 1985-02-08 | KOGAKUGARASUSOSHINOPURESUSEIKEIYOKATA |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2385085A JPH0247411B2 (en) | 1985-02-08 | 1985-02-08 | KOGAKUGARASUSOSHINOPURESUSEIKEIYOKATA |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61183134A JPS61183134A (en) | 1986-08-15 |
| JPH0247411B2 true JPH0247411B2 (en) | 1990-10-19 |
Family
ID=12121888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2385085A Expired - Lifetime JPH0247411B2 (en) | 1985-02-08 | 1985-02-08 | KOGAKUGARASUSOSHINOPURESUSEIKEIYOKATA |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247411B2 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6483529A (en) * | 1987-09-28 | 1989-03-29 | Hoya Corp | Production of glass forming mold |
| JPH01301864A (en) * | 1988-05-31 | 1989-12-06 | Hoya Corp | Manufacture of glass forming die |
| US5202156A (en) * | 1988-08-16 | 1993-04-13 | Canon Kabushiki Kaisha | Method of making an optical element mold with a hard carbon film |
| JP2504835B2 (en) * | 1988-08-16 | 1996-06-05 | キヤノン株式会社 | Optical element molding die, method for manufacturing the same, and molding method using the same |
| US5380349A (en) * | 1988-12-07 | 1995-01-10 | Canon Kabushiki Kaisha | Mold having a diamond layer, for molding optical elements |
| US5246198A (en) * | 1990-06-01 | 1993-09-21 | Canon Kabushiki Kaisha | Diamond crystal coated mold for forming optical elements |
| JP2815057B2 (en) * | 1992-06-08 | 1998-10-27 | キヤノン株式会社 | Mold for molding optical element, method for producing the same, optical element and lens |
| EP0581013B1 (en) * | 1992-06-25 | 1998-11-25 | Canon Kabushiki Kaisha | Mold for forming optical element and method for producing the same |
| JP3231165B2 (en) * | 1993-11-15 | 2001-11-19 | キヤノン株式会社 | Optical element molding die and method of manufacturing the same |
-
1985
- 1985-02-08 JP JP2385085A patent/JPH0247411B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61183134A (en) | 1986-08-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |