JPS61242922A - Pressing mold for optical glass element - Google Patents

Pressing mold for optical glass element

Info

Publication number
JPS61242922A
JPS61242922A JP60084902A JP8490285A JPS61242922A JP S61242922 A JPS61242922 A JP S61242922A JP 60084902 A JP60084902 A JP 60084902A JP 8490285 A JP8490285 A JP 8490285A JP S61242922 A JPS61242922 A JP S61242922A
Authority
JP
Japan
Prior art keywords
mold
diamond
press
silicon
optical glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60084902A
Other languages
Japanese (ja)
Inventor
Kiyoshi Kuribayashi
清 栗林
Masaki Aoki
正樹 青木
Hideto Monju
秀人 文字
Masayuki Sakai
界 政行
Hideyuki Okinaka
秀行 沖中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60084902A priority Critical patent/JPS61242922A/en
Priority to US06/824,961 priority patent/US4685948A/en
Priority to KR1019860000879A priority patent/KR900002704B1/en
Priority to DE8686300879T priority patent/DE3681303D1/en
Priority to EP86300879A priority patent/EP0191618B1/en
Publication of JPS61242922A publication Critical patent/JPS61242922A/en
Pending legal-status Critical Current

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  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

PURPOSE:A pressing mold having shape precision of high accuracy, producible without requiring precision processing after a film formation, having hardly wear of diamond bite during cutting processing, obtained by coating a silicon parent material with a thin film consisting of a specific material. CONSTITUTION:Silicon is used as a parent material and any of a platinum alloy film (alloy film consisting of one or more of Ir, Os, Rh, Pd, Ru and Re and Pt), a diamond thin film and a diamond carbon film is formed on the parent material to give the titled mold. Since silicon having improved precision processing properties is used as the parent material for pressing mold, water of diamond bite is hardly recognized during cutting processing.s A precision processing process after the formation of the platinum alloy film can be eliminated and simultaneously a pressing mold having a higher shape precision can be produced than a case where a conventional zirconia, tungsten carbide, etc. is used as the parent material.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、光学ガラス素子の製造に際して、プレス成形
後研磨工程を必要としない高精度光学ガラス素子をプレ
ス成形する際に用いる光学ガラス素子のプレス成形用型
に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to press-molding of optical glass elements used in press-molding high-precision optical glass elements that do not require a polishing step after press-molding. It is related to usage patterns.

従来の技術 高精度な光学ガラス素子を直接プレスにより成形するた
めには、像形成品質が良好な事が要求される。このため
、型材料としては、高温度のもとてガラスに対して化学
的に不活性であること、型のガラスプレス面が充分硬く
、すり傷等の損傷を受けにくいこと、また高温度でのプ
レスで型が塑性変形などをおこさないこと、耐熱性・耐
熱衝撃性に優れていること、さらに型の加工性が良く、
超精密加工が可能なことなどが必要であり、これらの性
質を比較的満足する型として、例えば母材にタングステ
ンカーバイド(WC)、サーメット、又はジルコニア(
ZrO□)を用い、これらの母材上に白金系合金膜を形
成して構成される光学ガラス素子のプレス形成用型や、
シリコンカーバンド(SiC)またはシリコンナイトラ
イド(SIJ4)を用いたプレス形成用型(特開昭52
−45613号公報)などが提案されている。
2. Description of the Related Art In order to directly mold a high-precision optical glass element by pressing, it is required that the quality of image formation be good. For this reason, the mold material must be chemically inert to the glass at high temperatures, the glass pressing surface of the mold must be sufficiently hard and resistant to damage such as scratches, and it must also be able to withstand high temperatures. The mold does not undergo plastic deformation when pressed, has excellent heat resistance and thermal shock resistance, and has good workability.
It is necessary to be able to perform ultra-precision machining, and molds that relatively satisfy these properties are, for example, made of tungsten carbide (WC), cermet, or zirconia (
A press-forming mold for an optical glass element constructed by forming a platinum-based alloy film on these base materials using ZrO□),
Press forming mold using silicon carbide (SiC) or silicon nitride (SIJ4)
-45613) etc. have been proposed.

発明が解決しようとする問題点 しかしながらこのような従来の型材料、例えばシリコン
カーバイドおよびシリコンナイトライドの場合では、そ
の硬度が極めて高いため、ガラスプレス面を球面形状あ
るいは非球面形状に高精度に加工することが非常に困難
であった。しかも。
Problems to be Solved by the Invention However, in the case of conventional mold materials such as silicon carbide and silicon nitride, their hardness is extremely high, making it difficult to process the glass press surface into a spherical or aspherical shape with high precision. It was very difficult to do so. Moreover.

これらの材料はいずれも焼結タイプのものであるため、
その焼結性を向上させる目的で、焼結助剤として第三成
分を含有するため、鉛やアルカリ元素を含有するガラス
素子と比較的反応しやすく。
These materials are all sintered types, so
Since it contains a third component as a sintering aid for the purpose of improving its sinterability, it is relatively easy to react with glass elements containing lead or alkali elements.

プレス形成を繰り返すと型とガラス素子との反応が進み
、ガラスが型に付着するようになり、像形成品質の良い
高精度な光学ガラス素子を成形することができなかった
。またタングステンカーバイド、サーメット、又はジル
コニアを母材とし、これら母材上に白金系合金膜を形成
して構成した型の場合、まず、研削により母材を所望す
る形状に近い状態に加工した後、母材上に白金系合金膜
を形成し、ダイヤモンドバイトを用いた切削法により、
白金系合金膜を削り、所望の形状に精密に加工して、光
学ガラス素子のプレス用型を作成している。しかし、白
金系合金膜を切削する際のダイヤモンドバイトの摩耗が
激しく、バイト1個でプレス用型を数個しか精度良く切
削加工できなかった。
When press forming is repeated, the reaction between the mold and the glass element progresses, and the glass adheres to the mold, making it impossible to mold a highly accurate optical glass element with good image formation quality. In addition, in the case of a mold made of tungsten carbide, cermet, or zirconia as a base material and a platinum-based alloy film formed on these base materials, the base material is first processed into a shape close to the desired shape by grinding, and then By forming a platinum-based alloy film on the base material and cutting it using a diamond cutting tool,
Platinum-based alloy films are shaved and precisely processed into desired shapes to create press molds for optical glass elements. However, when cutting the platinum-based alloy film, the diamond cutting tool was severely worn, and only a few press molds could be cut with a single cutting tool with high precision.

問題点を解決するための手段 上記問題点を解決するため、本発明の光学ガラス素子の
プレス成形用型は、シリコン(Si)  を母材とし、
この母材上に白金系合金膜またはダイヤモンド薄膜ある
いはダイヤモンド状炭素膜のいずれかを形成した構成と
したものである。
Means for Solving the Problems In order to solve the above problems, the press molding mold for the optical glass element of the present invention uses silicon (Si) as a base material,
The structure is such that a platinum-based alloy film, a diamond thin film, or a diamond-like carbon film is formed on this base material.

作用 上記構成によれば、光学ガラス素子のプレス成形用型の
母材として、精密加工性に優れたシリコンを用いたので
、切削加工の際のダイヤモンドバイトの摩耗がほとんど
無視できるようになった。
Effects According to the above configuration, since silicon, which has excellent precision machinability, is used as the base material of the press molding die for the optical glass element, the wear of the diamond cutting tool during cutting can be almost ignored.

また所望の形状に精密に加工したシリコン母材上に、形
状精度が損なわれない程度の厚さに、白金系合金膜ある
いはダイヤモンド薄膜またはダイヤモンド状炭素膜のい
ずれかを形成したので、像形成品質の良好な高精度の光
学ガラス素子のプレス成形が可能となった。また母材と
してシリコンを用いた事により、白金系合金膜形成後の
精密加工工程を省くことができると同時に、母材にジル
コニア、タングステンカーバイド、又はサーメットを使
用した場合よりも高精度の形状精度をもつプレス成形用
型を作製できるようになった。一方、ダイヤモンドバイ
トの寿命という点に関しても、長寿命化が可能となった
In addition, a platinum-based alloy film, a diamond thin film, or a diamond-like carbon film is formed on a silicon base material that has been precisely processed into the desired shape to a thickness that does not impair the shape accuracy, resulting in improved image formation quality. It has become possible to press-form optical glass elements with high precision and good quality. In addition, by using silicon as the base material, it is possible to omit the precision machining process after forming the platinum alloy film, and at the same time, it is possible to achieve higher shape accuracy than when using zirconia, tungsten carbide, or cermet as the base material. It is now possible to create molds for press molding. On the other hand, it has become possible to extend the life of the diamond tool.

実施例 以下、本発明の詳細な説明する。Example The present invention will be explained in detail below.

直径20m+a、厚さ6mmのシリコンを、 曲率半径
46IIm及び200+a+++の凹面形状の上型と下
型とからなる一対のプレス成形用型の母材として、高精
度に加工した。このようにして10対のプレス成形用型
の母材を作成したが、切削に用いたダイヤモンドバイト
の摩耗は全くなかった。次にこれらの切削面上にスパッ
タ法により約1〜2μmの厚さで白金系合金膜(イリジ
ウム、オスミウム、ロジウム、パラジウム、ルテニウム
、およびレニウムから成る群より選ばれた少なくとも一
種類の金属元素と白金とから成る合金膜)を形成した。
Silicon with a diameter of 20 m+a and a thickness of 6 mm was processed with high precision as a base material for a pair of press molding molds consisting of an upper mold and a lower mold with a concave shape of a radius of curvature of 46 II m and a radius of 200 + a +++. In this way, base materials for 10 pairs of press molding molds were prepared, but the diamond bit used for cutting was not worn at all. Next, a platinum-based alloy film (with at least one metal element selected from the group consisting of iridium, osmium, rhodium, palladium, ruthenium, and rhenium) with a thickness of approximately 1 to 2 μm is applied to these cut surfaces by sputtering. An alloy film consisting of platinum and platinum was formed.

このとき用いた白金系合金膜の組成を下記第1表に示す
The composition of the platinum alloy film used at this time is shown in Table 1 below.

〈以下余白〉 一方、さらに別の試料として、前記高精度に加工したシ
リコン母材上にダイヤモンド薄膜及びダイヤモンド状炭
素薄膜を、イオンビームスパッタ法を用いて各々形成し
た。
(Left below) On the other hand, as yet another sample, a diamond thin film and a diamond-like carbon thin film were each formed on the highly precisely processed silicon base material using an ion beam sputtering method.

以上のようにして作成したプレス成形用型の形状精度及
び面粗さを、タングステンカーバイド、ジルコニア、又
はサーメットを母材として作成した型の形状精度及び面
粗さとともに、下記第2表に示す。なおλ= 633n
mで測定した。
The shape accuracy and surface roughness of the press molding mold created as described above are shown in Table 2 below, along with the shape accuracy and surface roughness of the mold created using tungsten carbide, zirconia, or cermet as a base material. Note that λ = 633n
Measured in m.

上記第2表から、シリコンを母材とした型の形状精度が
優れている事は明白である。
From Table 2 above, it is clear that the shape accuracy of the mold made of silicon as the base material is excellent.

図面は上記のようにして作製した上下一対のプレス成形
用型をプレスマシンに設置した状態の構成図で、1は上
型、2は下型、3は上型用加熱ヒータ、4は下型用加熱
ヒータ、5は上型用ピストンシリンダ、6は下型用ピス
トンシリンダ、7は供給ガラス塊状物、8はガラス塊状
物供給用治具、9はプレス成形した光学ガラス素子の取
り出し口、10は供給ガラス塊状物7の予備加熱炉、1
1はおおいである。
The drawing is a configuration diagram of a pair of upper and lower press molding molds prepared as described above installed in a press machine, where 1 is an upper mold, 2 is a lower mold, 3 is a heater for the upper mold, and 4 is a lower mold. 5 is a piston cylinder for the upper mold, 6 is a piston cylinder for the lower mold, 7 is a supply glass lump, 8 is a jig for supplying the glass lump, 9 is an outlet for taking out the press-molded optical glass element, 10 is a preheating furnace for the supplied glass mass 7, 1
1 is a cover.

以下、プレス加工の工程について説明する。酸化鉛(P
bO)70重量%、シリカ(Sin2)27重量%、お
よび残りが微量成分から成る酸化鉛系光学ガラスを半径
10mmの球形状に加工した供給用ガラス素子塊状物7
を、供給ガラス予備加熱炉10で加熱した後、520℃
に保持された上下の型1,2のうちの下型2の上に置き
、窒素ガス雰囲気中でプレス圧約40kg/cdにより
プレスし、 2分間保持した後、そのまま上下の型1,
2の温度を300℃まで冷却して、両面が凸形にプレス
成形された光学ガラス素子を作成し、取り出し口9より
取り出すことにより、光学ガラス素子のプレス成形工程
が完了する。以上のような工程を500回繰り返した後
、使用した上下の型1および2をプレスマシンより取り
外し。
The press working process will be explained below. Lead oxide (P
Supply glass element block 7 made of lead oxide optical glass made of 70% by weight bO), 27% by weight silica (Sin2), and the remainder processed into a spherical shape with a radius of 10 mm.
is heated in the supply glass preheating furnace 10, and then heated to 520°C.
It was placed on the lower mold 2 of the upper and lower molds 1 and 2 held at
The temperature of Step 2 is cooled to 300° C. to produce an optical glass element press-molded so that both sides are convex, and the optical glass element is taken out from the outlet 9, thereby completing the press-molding process of the optical glass element. After repeating the above process 500 times, the upper and lower molds 1 and 2 used were removed from the press machine.

型の表面状態、およびプレスされた光学ガラス素子のプ
レス面を走査型電子顕微鏡を用いて観察評価した。
The surface condition of the mold and the pressed surface of the pressed optical glass element were observed and evaluated using a scanning electron microscope.

以上のようして、シリコンを母材とし、精密加工したこ
の母材上に白金系合金膜、又はダイヤモンド薄膜、ある
いはダイヤモンド状炭素膜を形成したプレス成形用型の
プレス実験を繰り返し行なった。この実験で特に問題に
なると考えられた事は、シリコン母材と形成薄膜との接
着性の問題、およびシリコン母材の耐熱強度の問題であ
ったが、500回のプレス実験終了後でも、上記の問題
は発生しなかった。また薄膜のプレスによる面荒れ、す
り傷についても、ダイヤモンド薄膜およびダイヤモンド
状炭素膜は、プレス実験前と変化はなかった。一方、白
金系合金膜については、タングステンカーバイド、ジル
コニア、又はサーメットを母材に選び、これら母材上に
白金系合金膜を形成して構成したプレス成形用型の実験
結果から容易に推測できたように、薄膜の面荒れはどの
試料についても発生しなかった。以上のようにシリコン
を母材として選んだプレス成形用型を使用しても、像形
成品質の良好なタングステンカーバイドなどを母材とし
た型を使用した時以上に、高精度の光学ガラス素子をプ
レス成形することができた。
As described above, press experiments were repeatedly conducted using a press molding die in which silicon was used as a base material and a platinum alloy film, a diamond thin film, or a diamond-like carbon film was formed on this precision-machined base material. What was thought to be a particular problem in this experiment was the problem of adhesion between the silicon base material and the formed thin film, and the problem of the heat resistance strength of the silicon base material, but even after 500 press experiments, the above No problems occurred. Also, regarding surface roughness and scratches caused by pressing the thin film, the diamond thin film and diamond-like carbon film did not change from before the pressing experiment. On the other hand, the platinum-based alloy film could be easily inferred from the experimental results of press-forming dies constructed by selecting tungsten carbide, zirconia, or cermet as the base material and forming a platinum-based alloy film on these base materials. As shown, no surface roughness of the thin film occurred in any of the samples. As mentioned above, even when using a press molding mold that uses silicon as the base material, it is possible to produce optical glass elements with higher precision than when using a mold that has a base material such as tungsten carbide, which has good image formation quality. It was possible to press mold.

なお、上記実施例では、凹面形状のプレス成形用型を使
用したが、型表面の形状はこのような形状に限定される
ものではなく、本発明はプリズム等の光学ガラス素子形
状にも適合するものであることは勿論である。
In addition, although a concave press molding mold was used in the above example, the shape of the mold surface is not limited to such a shape, and the present invention is also applicable to the shape of an optical glass element such as a prism. Of course it is a thing.

発明の効果 以上述べたごとく本発明によれば、加工性に優れ、耐熱
性があるシリコンをプレス成形用型の母材として選び、
このシリコン母材を高精度に加工した後、プレス面の形
状精度が損なわれない程度の膜厚で白金系合金膜、ダイ
ヤモンド薄膜、あるいはダイヤモンド状炭素膜を形成し
たものであるので、白金膜をスパッタにより形成した後
の精密加工工程を省くことができる。また精密加工の際
に使用するダイヤモンドバイトの摩耗も低減でき。
Effects of the Invention As described above, according to the present invention, silicone, which has excellent workability and heat resistance, is selected as the base material of the press molding die,
After processing this silicon base material with high precision, a platinum-based alloy film, diamond thin film, or diamond-like carbon film is formed to a thickness that does not impair the shape accuracy of the pressed surface. A precision processing step after forming by sputtering can be omitted. It also reduces wear on the diamond bit used during precision machining.

より高精度の形状精度に加工できる。したがって、像形
成品質の良好な高精度の光学ガラス素子を安価に量産す
ることが可能となった。
Can be processed to a higher degree of shape accuracy. Therefore, it has become possible to mass-produce high-precision optical glass elements with good image forming quality at low cost.

【図面の簡単な説明】[Brief explanation of drawings]

図面は本発明の実施例における光学ガラス素子のプレス
成形用型をプレスマシンに組込んだ状態の構成図である
。 1・・・上型、2・・・下型
The drawing is a configuration diagram of a state in which a press-molding mold for an optical glass element according to an embodiment of the present invention is installed in a press machine. 1... Upper mold, 2... Lower mold

Claims (1)

【特許請求の範囲】 1、シリコン(Si)を母材とし、この母材上に白金系
合金膜またはダイヤモンド薄膜あるいはダイヤモンド状
炭素膜のいずれかを形成した光学ガラス素子のプレス成
形用型。 2、白金系合金膜は、イリジウム(Ir)、オスミウム
(Os)、ロジウム(Rh)、パラジウム(Pd)、ル
テニウム(Ru)、およびレニウム(Re)から成る群
より選ばれた少なくとも一種類の金属元素と白金(Pt
)とから成る合金膜である特許請求の範囲第1項記載の
光学ガラス素子のプレス成形用型。
[Scope of Claims] 1. A mold for press-molding an optical glass element, which uses silicon (Si) as a base material and has either a platinum alloy film, a diamond thin film, or a diamond-like carbon film formed on the base material. 2. The platinum-based alloy film is made of at least one metal selected from the group consisting of iridium (Ir), osmium (Os), rhodium (Rh), palladium (Pd), ruthenium (Ru), and rhenium (Re). Elements and platinum (Pt
) A mold for press-molding an optical glass element according to claim 1, which is an alloy film comprising:
JP60084902A 1985-02-08 1985-04-19 Pressing mold for optical glass element Pending JPS61242922A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60084902A JPS61242922A (en) 1985-04-19 1985-04-19 Pressing mold for optical glass element
US06/824,961 US4685948A (en) 1985-02-08 1986-01-31 Mold for press-molding glass optical elements and a molding method using the same
KR1019860000879A KR900002704B1 (en) 1985-02-08 1986-02-08 Elements and a molding method using the same
DE8686300879T DE3681303D1 (en) 1985-02-08 1986-02-10 DIE FOR PRESSING OPTICAL ELEMENTS FROM GLASS AND PRODUCTION METHOD BY MEANS OF THIS DIE.
EP86300879A EP0191618B1 (en) 1985-02-08 1986-02-10 Mold for press-molding glass optical elements and a molding method using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60084902A JPS61242922A (en) 1985-04-19 1985-04-19 Pressing mold for optical glass element

Publications (1)

Publication Number Publication Date
JPS61242922A true JPS61242922A (en) 1986-10-29

Family

ID=13843665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60084902A Pending JPS61242922A (en) 1985-02-08 1985-04-19 Pressing mold for optical glass element

Country Status (1)

Country Link
JP (1) JPS61242922A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5246198A (en) * 1990-06-01 1993-09-21 Canon Kabushiki Kaisha Diamond crystal coated mold for forming optical elements
KR19980073002A (en) * 1997-03-10 1998-11-05 구자홍 Mold for optical glass molding
DE10358684A1 (en) * 2003-12-12 2005-07-21 Schott Ag Tool for the hot deformation of glass comprises a silicon substrate having a surface with a metallic coating made from a precious metal or a precious metal alloy and a substrate carrier with a bearing surface to support the substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60180926A (en) * 1984-02-29 1985-09-14 Ohara Inc Mold for press-molding highly accurate glass molded article

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60180926A (en) * 1984-02-29 1985-09-14 Ohara Inc Mold for press-molding highly accurate glass molded article

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5246198A (en) * 1990-06-01 1993-09-21 Canon Kabushiki Kaisha Diamond crystal coated mold for forming optical elements
KR19980073002A (en) * 1997-03-10 1998-11-05 구자홍 Mold for optical glass molding
DE10358684A1 (en) * 2003-12-12 2005-07-21 Schott Ag Tool for the hot deformation of glass comprises a silicon substrate having a surface with a metallic coating made from a precious metal or a precious metal alloy and a substrate carrier with a bearing surface to support the substrate
DE10358684B4 (en) * 2003-12-12 2009-01-15 Schott Ag Tool, method for its manufacture and method and apparatus for hot forming glass and glass elements

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