JPH02135777U - - Google Patents

Info

Publication number
JPH02135777U
JPH02135777U JP4545589U JP4545589U JPH02135777U JP H02135777 U JPH02135777 U JP H02135777U JP 4545589 U JP4545589 U JP 4545589U JP 4545589 U JP4545589 U JP 4545589U JP H02135777 U JPH02135777 U JP H02135777U
Authority
JP
Japan
Prior art keywords
ring
valve
valve body
ball screw
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4545589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4545589U priority Critical patent/JPH02135777U/ja
Publication of JPH02135777U publication Critical patent/JPH02135777U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP4545589U 1989-04-18 1989-04-18 Pending JPH02135777U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4545589U JPH02135777U (enExample) 1989-04-18 1989-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4545589U JPH02135777U (enExample) 1989-04-18 1989-04-18

Publications (1)

Publication Number Publication Date
JPH02135777U true JPH02135777U (enExample) 1990-11-13

Family

ID=31559646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4545589U Pending JPH02135777U (enExample) 1989-04-18 1989-04-18

Country Status (1)

Country Link
JP (1) JPH02135777U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2003060973A1 (ja) * 2002-01-10 2005-05-19 東京エレクトロン株式会社 処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190029A (enExample) * 1975-02-04 1976-08-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190029A (enExample) * 1975-02-04 1976-08-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2003060973A1 (ja) * 2002-01-10 2005-05-19 東京エレクトロン株式会社 処理装置

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