JPH0213463B2 - - Google Patents

Info

Publication number
JPH0213463B2
JPH0213463B2 JP55030746A JP3074680A JPH0213463B2 JP H0213463 B2 JPH0213463 B2 JP H0213463B2 JP 55030746 A JP55030746 A JP 55030746A JP 3074680 A JP3074680 A JP 3074680A JP H0213463 B2 JPH0213463 B2 JP H0213463B2
Authority
JP
Japan
Prior art keywords
energy
sample
secondary beam
semiconductor
mesh
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55030746A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56126933A (en
Inventor
Yasushi Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP3074680A priority Critical patent/JPS56126933A/ja
Publication of JPS56126933A publication Critical patent/JPS56126933A/ja
Publication of JPH0213463B2 publication Critical patent/JPH0213463B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2653—Contactless testing using electron beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3074680A 1980-03-11 1980-03-11 Contactless evaluator for semiconductor Granted JPS56126933A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3074680A JPS56126933A (en) 1980-03-11 1980-03-11 Contactless evaluator for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3074680A JPS56126933A (en) 1980-03-11 1980-03-11 Contactless evaluator for semiconductor

Publications (2)

Publication Number Publication Date
JPS56126933A JPS56126933A (en) 1981-10-05
JPH0213463B2 true JPH0213463B2 (enrdf_load_stackoverflow) 1990-04-04

Family

ID=12312237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3074680A Granted JPS56126933A (en) 1980-03-11 1980-03-11 Contactless evaluator for semiconductor

Country Status (1)

Country Link
JP (1) JPS56126933A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60121654A (ja) * 1983-12-02 1985-06-29 Hitachi Ltd イオンビーム装置
JPH065691B2 (ja) * 1987-09-26 1994-01-19 株式会社東芝 半導体素子の試験方法および試験装置
US5047830A (en) * 1990-05-22 1991-09-10 Amp Incorporated Field emitter array integrated circuit chip interconnection
JP5492405B2 (ja) * 2008-12-02 2014-05-14 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123313A (ja) * 1974-08-13 1976-02-24 Sanyo Kokusaku Pulp Co Nannenshinoseizoho
JPS5726352Y2 (enrdf_load_stackoverflow) * 1976-07-31 1982-06-08

Also Published As

Publication number Publication date
JPS56126933A (en) 1981-10-05

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