JPS56126933A - Contactless evaluator for semiconductor - Google Patents

Contactless evaluator for semiconductor

Info

Publication number
JPS56126933A
JPS56126933A JP3074680A JP3074680A JPS56126933A JP S56126933 A JPS56126933 A JP S56126933A JP 3074680 A JP3074680 A JP 3074680A JP 3074680 A JP3074680 A JP 3074680A JP S56126933 A JPS56126933 A JP S56126933A
Authority
JP
Japan
Prior art keywords
secondary beam
electrodes
collector
energy
outputs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3074680A
Other languages
English (en)
Other versions
JPH0213463B2 (ja
Inventor
Yasushi Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP3074680A priority Critical patent/JPS56126933A/ja
Publication of JPS56126933A publication Critical patent/JPS56126933A/ja
Publication of JPH0213463B2 publication Critical patent/JPH0213463B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2653—Contactless testing using electron beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3074680A 1980-03-11 1980-03-11 Contactless evaluator for semiconductor Granted JPS56126933A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3074680A JPS56126933A (en) 1980-03-11 1980-03-11 Contactless evaluator for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3074680A JPS56126933A (en) 1980-03-11 1980-03-11 Contactless evaluator for semiconductor

Publications (2)

Publication Number Publication Date
JPS56126933A true JPS56126933A (en) 1981-10-05
JPH0213463B2 JPH0213463B2 (ja) 1990-04-04

Family

ID=12312237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3074680A Granted JPS56126933A (en) 1980-03-11 1980-03-11 Contactless evaluator for semiconductor

Country Status (1)

Country Link
JP (1) JPS56126933A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60121654A (ja) * 1983-12-02 1985-06-29 Hitachi Ltd イオンビーム装置
US4912052A (en) * 1987-09-26 1990-03-27 Kabushiki Kaisha Toshiba Method of testing semiconductor elements
FR2662543A1 (fr) * 1990-05-22 1991-11-29 Amp Inc Assemblage pour etablir un trajet electrique separable entre une zone situee sur un substrat et une zone situee sur un autre substrat.
WO2010064360A1 (ja) * 2008-12-02 2010-06-10 株式会社 日立ハイテクノロジーズ 荷電粒子線装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123313A (ja) * 1974-08-13 1976-02-24 Sanyo Kokusaku Pulp Co Nannenshinoseizoho
JPS5320871U (ja) * 1976-07-31 1978-02-22

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320871B2 (ja) * 1975-01-31 1978-06-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123313A (ja) * 1974-08-13 1976-02-24 Sanyo Kokusaku Pulp Co Nannenshinoseizoho
JPS5320871U (ja) * 1976-07-31 1978-02-22

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60121654A (ja) * 1983-12-02 1985-06-29 Hitachi Ltd イオンビーム装置
JPH0588502B2 (ja) * 1983-12-02 1993-12-22 Hitachi Ltd
US4912052A (en) * 1987-09-26 1990-03-27 Kabushiki Kaisha Toshiba Method of testing semiconductor elements
FR2662543A1 (fr) * 1990-05-22 1991-11-29 Amp Inc Assemblage pour etablir un trajet electrique separable entre une zone situee sur un substrat et une zone situee sur un autre substrat.
WO2010064360A1 (ja) * 2008-12-02 2010-06-10 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
JP2010135072A (ja) * 2008-12-02 2010-06-17 Hitachi High-Technologies Corp 荷電粒子線装置
US8455823B2 (en) 2008-12-02 2013-06-04 Hitachi High-Technologies Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPH0213463B2 (ja) 1990-04-04

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