JPS57189448A - Charged-particle analyzing device - Google Patents

Charged-particle analyzing device

Info

Publication number
JPS57189448A
JPS57189448A JP56073468A JP7346881A JPS57189448A JP S57189448 A JPS57189448 A JP S57189448A JP 56073468 A JP56073468 A JP 56073468A JP 7346881 A JP7346881 A JP 7346881A JP S57189448 A JPS57189448 A JP S57189448A
Authority
JP
Japan
Prior art keywords
lens
mass spectrograph
electrodes
tetra
constituted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56073468A
Other languages
Japanese (ja)
Other versions
JPS645748B2 (en
Inventor
Norimichi Anazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP56073468A priority Critical patent/JPS57189448A/en
Publication of JPS57189448A publication Critical patent/JPS57189448A/en
Publication of JPS645748B2 publication Critical patent/JPS645748B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To enable a cylindrical electrostatic-energy analyzer with high energy- analyzing efficiency to be used, and increase the resolution of a mass spectrograph by providing a lens between the energy analyzer and the mass spectrograph. CONSTITUTION:A lens 3, which is constituted by placing three lens electrodes 15-17 parallel to each other, is installed in the middle of a double-cylindrical electrostatic-energy analyzer 1, which is constituted of an inner and an outer cylindrical electrodes 5 and 4 having the same central axis, and a tetra-polar mass spectrograph 2 having a tetra-polar part 14, which is constituted of two pairs of pole electrodes located on the X and the Y axes. Charged particles 10 such as secondary ions developing from a sample 9 are analyzed with the analyzer 1, and are focused on an image point 12. Then, charged particles, after passing through the image point 12, are deflected with the lens 3, and are focused on an image point 19. Since the point 19 is apart from the lens 3 and is located on the Z axis, the incidence angle of the beam of charged particles, which is incident upon the mass spectrograph 2, becomes small and is located between the electrodes of the tetra-polar part 14. Consequently, the resolution of the mass spectrograph 2 is increased.
JP56073468A 1981-05-18 1981-05-18 Charged-particle analyzing device Granted JPS57189448A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56073468A JPS57189448A (en) 1981-05-18 1981-05-18 Charged-particle analyzing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56073468A JPS57189448A (en) 1981-05-18 1981-05-18 Charged-particle analyzing device

Publications (2)

Publication Number Publication Date
JPS57189448A true JPS57189448A (en) 1982-11-20
JPS645748B2 JPS645748B2 (en) 1989-01-31

Family

ID=13519128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56073468A Granted JPS57189448A (en) 1981-05-18 1981-05-18 Charged-particle analyzing device

Country Status (1)

Country Link
JP (1) JPS57189448A (en)

Also Published As

Publication number Publication date
JPS645748B2 (en) 1989-01-31

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