GB1370360A - Charged particle energy analysis - Google Patents
Charged particle energy analysisInfo
- Publication number
- GB1370360A GB1370360A GB5869571A GB5869571A GB1370360A GB 1370360 A GB1370360 A GB 1370360A GB 5869571 A GB5869571 A GB 5869571A GB 5869571 A GB5869571 A GB 5869571A GB 1370360 A GB1370360 A GB 1370360A
- Authority
- GB
- United Kingdom
- Prior art keywords
- filter
- electrons
- energy
- dec
- energy analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
1370360 Electron spectrometers E I DU PONT DE NEMOURS & CO 17 Dec 1971 [18 Dec 1970 3 Aug 1971] 58695/71 Heading H1D Apparatus for -energy analysis of charged particles, e.g. electrons, comprises a filter 17 which allows only electrons having less than a certain energy to pass from a sample 11 towards an electrostatic mirror 18 which acts as a further filter by reflecting electrons below a selected energy to a spherical grid filter 21 which transmits electrons having energies greater than a further predetermined level, the number so transmitted being counted by an electron multiplier 23. The filter 17 consists of two parallel plates 17a, 17b, the former having an inlet window 16a through which particles enter, are reflected at plate 17b and leave through exit window 16b if they have the desired energy. Filter 21 consists of a retarding field set up between grids 21a, 21b. A concentrating lens 24 may be provided. Mirror 18 can be plane but an additional focusing lens is then required.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9947570A | 1970-12-18 | 1970-12-18 | |
US16857571A | 1971-08-03 | 1971-08-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1370360A true GB1370360A (en) | 1974-10-16 |
Family
ID=26796151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5869571A Expired GB1370360A (en) | 1970-12-18 | 1971-12-17 | Charged particle energy analysis |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS512396B1 (en) |
CA (1) | CA942435A (en) |
DE (1) | DE2162808C3 (en) |
GB (1) | GB1370360A (en) |
NL (1) | NL173799C (en) |
SE (1) | SE367279B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3138927A1 (en) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Imaging spectrometer for electron-beam metrology and an electron beam measurement apparatus |
DE3206309A1 (en) * | 1982-02-22 | 1983-09-15 | Siemens AG, 1000 Berlin und 8000 München | SECONDARY ELECTRON SPECTROMETER AND METHOD FOR ITS OPERATION |
EP1605492A1 (en) * | 2004-06-11 | 2005-12-14 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device with retarding field analyzer |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5335691U (en) * | 1976-09-02 | 1978-03-29 | ||
JPS55129083A (en) * | 1979-03-27 | 1980-10-06 | Kasai Kk | Playing tool for child |
CN112799120B (en) * | 2019-11-13 | 2024-03-22 | 中国科学院国家空间科学中心 | Dual-channel electrostatic analyzer for synchronous measurement of ions and electrons |
-
1971
- 1971-11-30 CA CA128,998A patent/CA942435A/en not_active Expired
- 1971-12-17 GB GB5869571A patent/GB1370360A/en not_active Expired
- 1971-12-17 NL NL7117400A patent/NL173799C/en not_active IP Right Cessation
- 1971-12-17 JP JP10197271A patent/JPS512396B1/ja active Pending
- 1971-12-17 SE SE1622371A patent/SE367279B/xx unknown
- 1971-12-17 DE DE19712162808 patent/DE2162808C3/en not_active Expired
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3138927A1 (en) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Imaging spectrometer for electron-beam metrology and an electron beam measurement apparatus |
DE3206309A1 (en) * | 1982-02-22 | 1983-09-15 | Siemens AG, 1000 Berlin und 8000 München | SECONDARY ELECTRON SPECTROMETER AND METHOD FOR ITS OPERATION |
EP1605492A1 (en) * | 2004-06-11 | 2005-12-14 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device with retarding field analyzer |
WO2005122208A2 (en) * | 2004-06-11 | 2005-12-22 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device with retarding field analyzer |
WO2005122208A3 (en) * | 2004-06-11 | 2006-04-13 | Lbleiterprueftechnik Mbh Ict I | Charged particle beam device with retarding field analyzer |
US8203119B2 (en) | 2004-06-11 | 2012-06-19 | Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh | Charged particle beam device with retarding field analyzer |
Also Published As
Publication number | Publication date |
---|---|
DE2162808C3 (en) | 1978-09-07 |
DE2162808B2 (en) | 1977-12-29 |
NL173799C (en) | 1984-03-01 |
NL7117400A (en) | 1972-06-20 |
CA942435A (en) | 1974-02-19 |
DE2162808A1 (en) | 1972-07-06 |
NL173799B (en) | 1983-10-03 |
JPS512396B1 (en) | 1976-01-26 |
SE367279B (en) | 1974-05-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PE20 | Patent expired after termination of 20 years |