NL173799B - Apparatus for the analysis of the energy distribution of electrons in a beam. - Google Patents
Apparatus for the analysis of the energy distribution of electrons in a beam.Info
- Publication number
- NL173799B NL173799B NL7117400A NL7117400A NL173799B NL 173799 B NL173799 B NL 173799B NL 7117400 A NL7117400 A NL 7117400A NL 7117400 A NL7117400 A NL 7117400A NL 173799 B NL173799 B NL 173799B
- Authority
- NL
- Netherlands
- Prior art keywords
- electrons
- analysis
- energy distribution
- distribution
- energy
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9947570A | 1970-12-18 | 1970-12-18 | |
US16857571A | 1971-08-03 | 1971-08-03 |
Publications (3)
Publication Number | Publication Date |
---|---|
NL7117400A NL7117400A (en) | 1972-06-20 |
NL173799B true NL173799B (en) | 1983-10-03 |
NL173799C NL173799C (en) | 1984-03-01 |
Family
ID=26796151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7117400A NL173799C (en) | 1970-12-18 | 1971-12-17 | Apparatus for the analysis of the energy distribution of electrons in a beam. |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS512396B1 (en) |
CA (1) | CA942435A (en) |
DE (1) | DE2162808C3 (en) |
GB (1) | GB1370360A (en) |
NL (1) | NL173799C (en) |
SE (1) | SE367279B (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5335691U (en) * | 1976-09-02 | 1978-03-29 | ||
JPS55129083A (en) * | 1979-03-27 | 1980-10-06 | Kasai Kk | Playing tool for child |
DE3138927A1 (en) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Imaging spectrometer for electron-beam metrology and an electron beam measurement apparatus |
DE3206309A1 (en) * | 1982-02-22 | 1983-09-15 | Siemens AG, 1000 Berlin und 8000 München | SECONDARY ELECTRON SPECTROMETER AND METHOD FOR ITS OPERATION |
EP1605492B1 (en) * | 2004-06-11 | 2015-11-18 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device with retarding field analyzer |
CN112799120B (en) * | 2019-11-13 | 2024-03-22 | 中国科学院国家空间科学中心 | Dual-channel electrostatic analyzer for synchronous measurement of ions and electrons |
-
1971
- 1971-11-30 CA CA128,998A patent/CA942435A/en not_active Expired
- 1971-12-17 DE DE19712162808 patent/DE2162808C3/en not_active Expired
- 1971-12-17 GB GB5869571A patent/GB1370360A/en not_active Expired
- 1971-12-17 NL NL7117400A patent/NL173799C/en not_active IP Right Cessation
- 1971-12-17 JP JP10197271A patent/JPS512396B1/ja active Pending
- 1971-12-17 SE SE1622371A patent/SE367279B/xx unknown
Also Published As
Publication number | Publication date |
---|---|
GB1370360A (en) | 1974-10-16 |
NL173799C (en) | 1984-03-01 |
DE2162808C3 (en) | 1978-09-07 |
DE2162808A1 (en) | 1972-07-06 |
CA942435A (en) | 1974-02-19 |
SE367279B (en) | 1974-05-20 |
DE2162808B2 (en) | 1977-12-29 |
NL7117400A (en) | 1972-06-20 |
JPS512396B1 (en) | 1976-01-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
V4 | Lapsed because of reaching the maxim lifetime of a patent |