NL173799C - Apparatus for the analysis of the energy distribution of electrons in a beam. - Google Patents

Apparatus for the analysis of the energy distribution of electrons in a beam.

Info

Publication number
NL173799C
NL173799C NL7117400A NL7117400A NL173799C NL 173799 C NL173799 C NL 173799C NL 7117400 A NL7117400 A NL 7117400A NL 7117400 A NL7117400 A NL 7117400A NL 173799 C NL173799 C NL 173799C
Authority
NL
Netherlands
Prior art keywords
electrons
analysis
energy distribution
distribution
energy
Prior art date
Application number
NL7117400A
Other languages
Dutch (nl)
Other versions
NL7117400A (en
NL173799B (en
Original Assignee
Du Pont
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Du Pont filed Critical Du Pont
Publication of NL7117400A publication Critical patent/NL7117400A/xx
Publication of NL173799B publication Critical patent/NL173799B/en
Application granted granted Critical
Publication of NL173799C publication Critical patent/NL173799C/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
NL7117400A 1970-12-18 1971-12-17 Apparatus for the analysis of the energy distribution of electrons in a beam. NL173799C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9947570A 1970-12-18 1970-12-18
US16857571A 1971-08-03 1971-08-03

Publications (3)

Publication Number Publication Date
NL7117400A NL7117400A (en) 1972-06-20
NL173799B NL173799B (en) 1983-10-03
NL173799C true NL173799C (en) 1984-03-01

Family

ID=26796151

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7117400A NL173799C (en) 1970-12-18 1971-12-17 Apparatus for the analysis of the energy distribution of electrons in a beam.

Country Status (6)

Country Link
JP (1) JPS512396B1 (en)
CA (1) CA942435A (en)
DE (1) DE2162808C3 (en)
GB (1) GB1370360A (en)
NL (1) NL173799C (en)
SE (1) SE367279B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5335691U (en) * 1976-09-02 1978-03-29
JPS55129083A (en) * 1979-03-27 1980-10-06 Kasai Kk Playing tool for child
DE3138927A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Imaging spectrometer for electron-beam metrology and an electron beam measurement apparatus
DE3206309A1 (en) * 1982-02-22 1983-09-15 Siemens AG, 1000 Berlin und 8000 München SECONDARY ELECTRON SPECTROMETER AND METHOD FOR ITS OPERATION
EP1605492B1 (en) * 2004-06-11 2015-11-18 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with retarding field analyzer
CN112799120B (en) * 2019-11-13 2024-03-22 中国科学院国家空间科学中心 Dual-channel electrostatic analyzer for synchronous measurement of ions and electrons

Also Published As

Publication number Publication date
DE2162808C3 (en) 1978-09-07
GB1370360A (en) 1974-10-16
JPS512396B1 (en) 1976-01-26
DE2162808A1 (en) 1972-07-06
NL7117400A (en) 1972-06-20
SE367279B (en) 1974-05-20
DE2162808B2 (en) 1977-12-29
CA942435A (en) 1974-02-19
NL173799B (en) 1983-10-03

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Legal Events

Date Code Title Description
V4 Lapsed because of reaching the maxim lifetime of a patent