JPS52151090A - Electrostatic charged corpuscle energy analyzer - Google Patents

Electrostatic charged corpuscle energy analyzer

Info

Publication number
JPS52151090A
JPS52151090A JP6769776A JP6769776A JPS52151090A JP S52151090 A JPS52151090 A JP S52151090A JP 6769776 A JP6769776 A JP 6769776A JP 6769776 A JP6769776 A JP 6769776A JP S52151090 A JPS52151090 A JP S52151090A
Authority
JP
Japan
Prior art keywords
charged corpuscle
energy analyzer
electrostatic charged
electrostatic
corpuscle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6769776A
Other languages
Japanese (ja)
Inventor
Kiyoshi Ishikawa
Michiyasu Ito
Katsuhisa Usami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6769776A priority Critical patent/JPS52151090A/en
Publication of JPS52151090A publication Critical patent/JPS52151090A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To make possible analysis for extremely small range by providing charged corpuscle generator within deflection system.
JP6769776A 1976-06-11 1976-06-11 Electrostatic charged corpuscle energy analyzer Pending JPS52151090A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6769776A JPS52151090A (en) 1976-06-11 1976-06-11 Electrostatic charged corpuscle energy analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6769776A JPS52151090A (en) 1976-06-11 1976-06-11 Electrostatic charged corpuscle energy analyzer

Publications (1)

Publication Number Publication Date
JPS52151090A true JPS52151090A (en) 1977-12-15

Family

ID=13352395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6769776A Pending JPS52151090A (en) 1976-06-11 1976-06-11 Electrostatic charged corpuscle energy analyzer

Country Status (1)

Country Link
JP (1) JPS52151090A (en)

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