JPH02133656U - - Google Patents
Info
- Publication number
- JPH02133656U JPH02133656U JP4274789U JP4274789U JPH02133656U JP H02133656 U JPH02133656 U JP H02133656U JP 4274789 U JP4274789 U JP 4274789U JP 4274789 U JP4274789 U JP 4274789U JP H02133656 U JPH02133656 U JP H02133656U
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspected
- scanning
- defect detector
- electrical signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010926 purge Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4274789U JPH02133656U (OSRAM) | 1989-04-12 | 1989-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4274789U JPH02133656U (OSRAM) | 1989-04-12 | 1989-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02133656U true JPH02133656U (OSRAM) | 1990-11-06 |
Family
ID=31554563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4274789U Pending JPH02133656U (OSRAM) | 1989-04-12 | 1989-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02133656U (OSRAM) |
-
1989
- 1989-04-12 JP JP4274789U patent/JPH02133656U/ja active Pending
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