JPS6358738U - - Google Patents
Info
- Publication number
- JPS6358738U JPS6358738U JP15323086U JP15323086U JPS6358738U JP S6358738 U JPS6358738 U JP S6358738U JP 15323086 U JP15323086 U JP 15323086U JP 15323086 U JP15323086 U JP 15323086U JP S6358738 U JPS6358738 U JP S6358738U
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- light
- detector
- light source
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000005856 abnormality Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15323086U JPS6358738U (OSRAM) | 1986-10-06 | 1986-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15323086U JPS6358738U (OSRAM) | 1986-10-06 | 1986-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6358738U true JPS6358738U (OSRAM) | 1988-04-19 |
Family
ID=31071926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15323086U Pending JPS6358738U (OSRAM) | 1986-10-06 | 1986-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6358738U (OSRAM) |
-
1986
- 1986-10-06 JP JP15323086U patent/JPS6358738U/ja active Pending
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