JPH0252149U - - Google Patents
Info
- Publication number
- JPH0252149U JPH0252149U JP13058388U JP13058388U JPH0252149U JP H0252149 U JPH0252149 U JP H0252149U JP 13058388 U JP13058388 U JP 13058388U JP 13058388 U JP13058388 U JP 13058388U JP H0252149 U JPH0252149 U JP H0252149U
- Authority
- JP
- Japan
- Prior art keywords
- light
- detector
- defect detector
- inspection area
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13058388U JPH0252149U (OSRAM) | 1988-10-05 | 1988-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13058388U JPH0252149U (OSRAM) | 1988-10-05 | 1988-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252149U true JPH0252149U (OSRAM) | 1990-04-13 |
Family
ID=31385883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13058388U Pending JPH0252149U (OSRAM) | 1988-10-05 | 1988-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252149U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009512839A (ja) * | 2005-10-21 | 2009-03-26 | イスラ ヴィズィオーン アーゲー | ガラス板光学検査システム及び方法 |
-
1988
- 1988-10-05 JP JP13058388U patent/JPH0252149U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009512839A (ja) * | 2005-10-21 | 2009-03-26 | イスラ ヴィズィオーン アーゲー | ガラス板光学検査システム及び方法 |
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