JPH02129650U - - Google Patents
Info
- Publication number
- JPH02129650U JPH02129650U JP3876289U JP3876289U JPH02129650U JP H02129650 U JPH02129650 U JP H02129650U JP 3876289 U JP3876289 U JP 3876289U JP 3876289 U JP3876289 U JP 3876289U JP H02129650 U JPH02129650 U JP H02129650U
- Authority
- JP
- Japan
- Prior art keywords
- arc chamber
- ion source
- source device
- permanent magnet
- filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 230000005291 magnetic effect Effects 0.000 claims description 2
- 239000003302 ferromagnetic material Substances 0.000 claims 2
- 230000005415 magnetization Effects 0.000 claims 2
- 238000010891 electric arc Methods 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3876289U JPH02129650U (zh) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3876289U JPH02129650U (zh) | 1989-03-31 | 1989-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02129650U true JPH02129650U (zh) | 1990-10-25 |
Family
ID=31547061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3876289U Pending JPH02129650U (zh) | 1989-03-31 | 1989-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02129650U (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04282549A (ja) * | 1991-03-11 | 1992-10-07 | G T C:Kk | イオンビームの照射方法 |
| JP2007154229A (ja) * | 2005-12-01 | 2007-06-21 | Sumitomo Heavy Ind Ltd | 成膜装置 |
| JP2011228044A (ja) * | 2010-04-16 | 2011-11-10 | Nissin Ion Equipment Co Ltd | イオン源及びイオン注入装置 |
-
1989
- 1989-03-31 JP JP3876289U patent/JPH02129650U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04282549A (ja) * | 1991-03-11 | 1992-10-07 | G T C:Kk | イオンビームの照射方法 |
| JP2007154229A (ja) * | 2005-12-01 | 2007-06-21 | Sumitomo Heavy Ind Ltd | 成膜装置 |
| JP2011228044A (ja) * | 2010-04-16 | 2011-11-10 | Nissin Ion Equipment Co Ltd | イオン源及びイオン注入装置 |
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