JPH02129099A - ＺｎＳｅ単結晶の成長方法 - Google Patents
ＺｎＳｅ単結晶の成長方法Info
- Publication number
- JPH02129099A JPH02129099A JP28077788A JP28077788A JPH02129099A JP H02129099 A JPH02129099 A JP H02129099A JP 28077788 A JP28077788 A JP 28077788A JP 28077788 A JP28077788 A JP 28077788A JP H02129099 A JPH02129099 A JP H02129099A
- Authority
- JP
- Japan
- Prior art keywords
- growth
- znse
- single crystal
- crucible
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 35
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 19
- 239000000155 melt Substances 0.000 claims description 3
- 229910052711 selenium Inorganic materials 0.000 abstract description 13
- 239000011261 inert gas Substances 0.000 abstract description 5
- 229910052582 BN Inorganic materials 0.000 abstract description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 3
- 239000003575 carbonaceous material Substances 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 abstract 2
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 13
- 239000011669 selenium Substances 0.000 description 13
- 239000002994 raw material Substances 0.000 description 11
- 239000003708 ampul Substances 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 230000007704 transition Effects 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010587 phase diagram Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28077788A JPH02129099A (ja) | 1988-11-07 | 1988-11-07 | ＺｎＳｅ単結晶の成長方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28077788A JPH02129099A (ja) | 1988-11-07 | 1988-11-07 | ＺｎＳｅ単結晶の成長方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02129099A true JPH02129099A (ja) | 1990-05-17 |
| JPH0535720B2 JPH0535720B2 (enrdf_load_stackoverflow) | 1993-05-27 |
Family
ID=17629815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28077788A Granted JPH02129099A (ja) | 1988-11-07 | 1988-11-07 | ＺｎＳｅ単結晶の成長方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02129099A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5679151A (en) * | 1995-03-16 | 1997-10-21 | Kabushiki Kaisha Kobe Seiko Sho | Method for growing single crystal |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57183400A (en) * | 1981-05-07 | 1982-11-11 | Semiconductor Res Found | Method and apparatus for liquid-phase growth of 2-6 compound |
-
1988
- 1988-11-07 JP JP28077788A patent/JPH02129099A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57183400A (en) * | 1981-05-07 | 1982-11-11 | Semiconductor Res Found | Method and apparatus for liquid-phase growth of 2-6 compound |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0535720B2 (enrdf_load_stackoverflow) | 1993-05-27 |
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